High Vacuum Angle Valve Model Initial exhaust valve Main exhaust valve Example XLDV-25 V114-1GS XLDV-40/50/63/80/100/160 V114 SYJ314 V114 SYJ314-1GS Barrel Perfluoro is a registered trademark of Matsumura Oil Co., Ltd. Kalrez is a registered trademark of E. I. du Pont de Nemours and Company or its affiliates. Chemraz is a registered trademark of Greene, Tweed Technologies, Inc.
Operating solenoid shifting valve is V114-** for XLDV-25 and V114-**,SYJ314-** for XLDV-40,50,63 ,80 ,100 and 160. For further details on solenoid valve, refer to the SMC solenoid valve catalog V100, SYJ300. 7 XL-OMM0005-A See the figure on the right for the relationship between the number of revolutions of the adjustment nut (pitch 1mm) and conductance of the initial pumping valve.
ZQ-OM01301-A 7.3 How to Order Replacement Parts 1 Pilot valve for supply/ release Pilot valve for N.C. supply/ release Z1-V114-5LUB-A A (1) (2) (1) Electrical entry L L-type plug connector, with 0.3 m lead wire LO L-type plug connector, without connector (2) Manual Nil Non-locking push type B Slotted locking type N.O. supply pilot valve (including adapter plate) ZQ1-V124-5MUB-A (1) (2) (1
2ON 3, 4 51015 10 1% 6 7LCD 8FG 19 - No.ZQ-OM01401-B 6. 6.1 ON () () 6.2 1 2(0.4N m ) 315 30 (0.06~0.10 Nm) 20 - No.ZQ-OM01401-B 7 , 7.1 () 1 PBT 2 ,Assy POM, 3 PBT 4 PBT 5 6 (PET) P.25 3 7 HNBR P.25 6 8 SUS 9 10 PC P.25 4 11 SUS 12 PVA P.25 5 13 P.2223 1 14 PBT 15 P.2425 2 16 (V) P.25 7 17 Ass'y P.25 9 O HNBR,NBR 21 - No.ZQ-OM01401-B 7.2 1 N.C., ZQ1-V114
Vacuum Gripper 60(Operating range 50 to 70)60(Operating range 50 to 70) Pilot valve for supply V114(N.C.) Digital pressure switch ZSE20---M5-A1 Supply valve Circuit diagram -16* Cup distance is changeable. No. TQ1230001-OM105-A 5.2. Center of gravity (ZXP7A-ZPB25JN-X1-ASSISTA) Z Y X X Z (Unit: mm) Center of gravity X Y Z -2.5 -1.63 58.28 Y -17No. TQ1230001-OM105-A 5.3.
Do not replace V114(G,H,L,M,W) to V115 (DIN terminal), and vice versa. type Coil Varistor type (Ground) W type WA type 10 No.SYJ3000-OMM0002-A SYJ Series/ / / /Specific Product Precautions 4 Be sure to read this before handling How to Use DIN Terminal Connector Assembly with Cover Connector assembly with dust proof protective cover Effective to prevention of short circuit failure due to the
Do not replace V114 (G, H, L, M, W) to V115-D/Y (DIN terminal), and vice versa. Electrical entry Y With connector DIN terminal YO Without connector 1-5-73 74 Series SYJ3000/5000/7000 Specific Product Precautions 1 Be sure to read before handling.
Pilot Solenoid Valve Specifications Internal pilot solenoid / External pilot solenoid Model VEX3121, VEX3221, VEX3321, VEX3421 VEX3122, VEX3222, VEX3322, VEX3422 Pilot valve V114, V115 Symbol Electrical entry Grommet (G), L plug connector (L), M plug connector (M), DIN terminal (D) Rated coil voltage [V] AC (50/60 Hz) 100 V, 110 V, 200 V, 220 V DC 3 V, 5 V, 6 V, 12 V, 24 V Allowable voltage
Energy saving has also been considered as individual valves can be ordered with a power saving circuit as each valve can be manually turned off, safe maintenance is guaranteed.3 Port Solenoid Valve, Plug-in, Piping Variations, With Switch, SCREW, M2X14 (V114/124), VALVE, SY3000 SOL/VALVE, RUBBER SEAL, 21, SY NO SIZE RATING, .00059 lb
Do not replace 10-V114 (G, H, L, M, W) to 10-V115-D/Y (DIN terminal), and vice versa. Electrical entry DIN terminal Y With connector YO Without connector 557 Series 10-SYJ3000/5000/7000 Specific Product Precautions 1 Be sure to read before handling.
Do not replace V114 (G, H, L, M, W) with V115-D/Y (DIN terminal), and vice versa. DIN Connector Part No. Caution
New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer
VXD2A, 2B VXD2C, 2D VXD2E to 2G VXD2A to 2G VXD2A to 2G VXD2A to 2D VXD2A, 2B Body 1 Bonnet 2 Diaphragm assembly Spring O-ring Buffer Sleeve assembly Push rod assembly Stopper O-ring A O-ring B Adapter O-ring C Solenoid coil 3 4 5 6 7 8 9 10 11 12 13 14 VXD2A to 2G 137 VXD Series For Air For information on handling One-touch fittings and appropriate tubing, refer to page 167 and KQ2 series
For AC voltages add 1g to the weight of the single solenoid and 2g to the weight of the double solenoid and 3 position styles.
) MHCM2-7S Finger opening and closing speed Allowable inertial moment of attachment Note) Without speed controller 0.3 x 10-6 kgm2 2g or less With speed controller 1/2 to 1 3/4 reverse rotation from fully close state 1.0 x 10-6 kgm2 3.3g or less Air gripper direct connection type AS1211F-M3 Use a meter-in type.
Allowable Kinetic Energy E max=0.43 (J) V=Vax1.4=350x1.4=490mm/s W 30 xV2= x0.492=0.36 (J) Ev= 2g 2x9.8 Load Rate a5= E = 0.36 =0.84 Emax 0.43 3. Examination of Load Rate a = 0.84 1 OK With above allowable value, there is no problem on the selection.
WR A C E G I K B D F H J L 1)6 2)1245 SMC O A 2532 40 O C9 C11.2 Rz12.5 A 6 8 16 4-1 ML2 () 1(an1) (an1 ) 500mm/s W N Va P MPa NG NG OK OK NG OK OK 17 4-2 W (N) WeN) () V m/s) () Va (m/s) L (m) M (Nm) E (J) g (m/s) (9.8m/ ) (N) W1 (Nm) V=1.4Va MFL F (V=0.) 1 L <> W1.VaW10 M2F2L2 F2 M= WeL =5VaWL 3 2 L W2 M3F3L3 F3 an= F Fmax 3 L F W4 Fmax : () W Ek= W V 2g
Allowable kinetic energy E max=0.43 (J) V=Vax1.4=350x1.4=490mm/s W 30 Ev= xV2= x0.492=0.36 (J) 2g 2x9.8 Load factor a5= E = 0.36 =0.84 Emax 0.43 Examination of load factor a5 = 0.84 1 OK With above allowable value, there is no problem on the selection. ML2B25 is selected.
size 12, 16 20 to 63 M F N MF FN Both ends tapped 6 7 7 6 7 17 Rod end width across flats 10 10 21 21 46 46 Rear boss mounting 2 3 5 7 13 25 With arm 13 32 100 100 200 200 350 350 Rear flange 133 153 166 198 345 531 Calculation method/Example MKG20-10RFN I Standard calculation: MKB20-10R 250g I Extra weight calculation: Both ends tapped 6g Rear flange 133g Rear boss mounting 2g
Within 1% for each 1.5 psi Within 0.5% for each 1.5 psi Within 0.5% for each 1.5 psi Within 0.3% for each 1.5 psi " For 1/2 split range add 1.5% to these values Use clean, dry, oil free air Recommended for air preparation: NAC 2030-N02 or NAC 2040-N02 filter, coalescer, regulator combination Ref. catalog N5-G1 Modular type FRL Combinatton Recommended for control of pilot signal: NIT 200 OO 2G