Table of Contents

SB, counterbore depth SC P.C.D.R (Mounting hole) Auto switch mounting groove dimentions (2 locations) MHS3-16D MHS3-20D MHS3-25D 5 6 4 54 54 5 4 6.5 54 4 5 3 3 3 5 5 33 33 33 (mm) I G 25 27 28 FZ 3 3 5 FY 11 13 14.5 FX 12.5 14.5 17 CB 11 13 15 EC 5 6 7 EO 7 8 10 NB 0 0.030 0 0.030 0 0.030 DC 15 18 21 NA 8 10 12 DO 17 20 24 K 4 5 6 B 30 36 42 R 25 29 34 J 10 12 14 AA 35 38 40 AB 32 35 37 O

KQ2

thread (with sealant) 3 8 17.46 9 21.7 1 2 27 33 22 21.7 1 2 Reference dimensions after NPT thread installation.

Table of Contents

28 M14 x 2.0 100 210 62 188 39 33 8-19-6 Series MGP/ In the Case of With End Lock Specific Product Precautions Be sure to read before handling.

F

40.5 33 24 71 1/2 1/4 KQT13-U02 17.46 21.7 17 28 28.5 33 22 9 16 12 KQT16-U04 22 26.5 21 33 40.5 35 24 100 1/2 3/8 KQT13-U03 17.46 21.7 17 28 28.5 33.5 22 9.6 H: Width Across Flats 1/2 1/2 KQT13-U04 22.23 21.7 17 28 32 35 22 9.6 H: Width Across Flats Courtesy of Steven Engineering, Inc. !

ZP

44 50 60 11 14.5 20.5 13.8 15.1 17.5 26.5 29 33 44 50 60 11 14.5 20.5 14.0 15.3 17.7 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

KJ

33 !4 !5 !

A

Bore size A B C DA DB E F G GA GB H J K L MM ML NN P PW 12 39 39 29 6 8 0 8 29 11 7.5 58 16 13 18 M4 x 0.7 10 M4 x 0.7 M5 7 16 43 43 33 8 10 0 8 33 11 8 64 18 15 22 M5 x 0.8 13 M5 x 0.8 M5 5 20 47 47 37 10 12 0 8 36 10.5 8.5 74 19 17 26 M5 x 0.8 13 M5 x 0.8 1/8 7 S L I D E B E A R I N G 25 47.5 47.5 37.5 12 16 0 8 42 11.5 9 88 21 21 32 M6 x 1.0 15 M6 x 1.0 1/8 8 32 71.5 47.5 37.5 16 20 24

VFR

Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (Pitch) P = 33 (Pitch) P = 33 Manual override (Non-locking) Stations D side Exhaust cleaner (Option) U side Exhaust cleaner (Option) U side mounting 2-Rc 1/8 (X port) 2-Rc 1/8 (PE port) 6-Rc 1/2 Stations n: Station Formula L1 = 33 x n + 63 L2 = 33 x n + 75 2 129 141 3 162 174 4 195 207 5 228 240 6 261

1

Bore size (mm) A B Stroke Both of S1, S2 L 50 st or less 75, 100 st 50 st or less 75, 100 st 12 3.5 41 (63) 17 (28) 5 to 30 16 3.5 44 (68) 18.5 (30.5) 20 4.5 48 (72) 19.5 (31.5) 5 to 50 25 5 55 (75) 22.5 (32.5) 32 7 60 (80) 23 (33) 80 (80) 33 (33) 5 to 100 40 7 73 (93) 29.5 (39.5) 93 (93) 39.5 (39.5) 50 8 77 (97) 30.5 (40.5) 97 (97) 40.5 (40.5) 63 8 88 (108) 36 (46) 108 (108) 46 (

2-Color Display Digital Flow Switch Series PFM

piping Flow adjustment valve assembly (with pin) For 25 l/min ZS-33-25NL 6 For 50 l/min ZS-33-50NL For 100 l/min ZS-33-11NL 4 (5/32") ZS-33-C4 6 ZS-33-C6 7 One-touch fitting u 8 (5/16") ZS-33-C8 e 1/4" ZS-33-N7 t u i Rc 1/8 ZS-33-01 NPT 1/8 ZS-33-N01 G 1/8 i ZS-33-F01 8 Female thread Rc 1/4 ZS-33-02 u NPT 1/4 ZS-33-N02 G 1/4 ZS-33-F02 i y Straight piping with flow adjustment valve u Bottom

AC Servo Motor Driver

) OP(CN1-33) 6 17 6.

Air Fittings & Tubing

Weight (g) L A M d 7 34 32 KQ2N04-M5 KQ2N04-01S KQ2N06-M5 KQ2N06-01S 2 6 2 5 M5 X 0.8 29 13 4 2.5 1 8 M5 X 0.8 10 30 14 33 35 37.5 39 41 46 2.5 7 30 31 13 14 6 1 8 10 4.5 1 4 14 14 31.5 33 14.5 14.5 KQ2N06-02S 14 1 4 KQ2N08-02S 17 8 6 3 8 KQ2N08-03S 17 17 7.5 34.5 39.5 16 18.5 30 31 10 3 8 KQ2N10-03S Nipple: KQ2N Part No.

Free Mount Cylinder

40 10 11 14 16 20 24 22 24 32 40 50 62 17 18 25 30 38 48 3 4 6 8 10 12 8 8 8 8 10 12 7 7 7 9 10 11 20.5 22 28 33 43.5 51.5 11 12 13 16 20 24 9 12 17 20 22 29 5 6 8 10 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 16.5 16.5 Note) 19 21.5 23 Without auto switch With auto switch Bore size (mm) 6 10 16 20 25 32 NN P Q QA R Y T S 33 36 30 36 40 42 Z 51 57 56 65 73 84 S 33 36 40 46

Hydraulic

31.5 30.5 34 80 40.5 30 41 38 45 39.5 29 43.5 42.5 46 30.5 27.5 34.5 33 32 35.5 100 44.5 32.5 45 42 49 43.5 31.5 47.5 46.5 50 33 30 37 35.5 34.5 38 31 Compact Hydraulic Cylinder Double Acting/Single Rod: 3.5MPa Series CHQB B 32 to 100 D-A9 D-F9 D-F9W A Approx.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Without auto switch With auto switch Stroke range (mm) Bore size (mm) J K D L C E M I H P M5 x 0.8 A A B F 5.5 Q 11.5 B P F Q 5 10 to 50 75, 100 5 to 50 75, 100 10 to 50 75, 100 30 23 32 40 M8 x 1.25 4.5 33 7.5 Rc 1/8 14 10.5 16 7 13 45 34 60 Rc 1/8 10.5 7.5 40 36.5 46.5 38.5 48.5 33 29.5 39.5 30.5 40.5 40 Rc 1/8 46.5 39.5 M8 x 1.25 5 8 Rc 1/8 14 11 16 7 13 52 40 69 11 8 M10 x 1.5 50 Rc 1

VQZ1000/2000/3000

25 or less 33 or less 53 or less VQZ3320 0.54 0.21 2.1 0.54 0.19 2.3 Metal seal Closed center VQZ3000 30 or less 39 or less 59 or less VQZ3321 0.62 0.33 2.4 0.66 0.30 2.7 Rubber seal 134 25 or less 33 or less 53 or less VQZ3420 0.54 0.19 2.4 0.54 0.19 2.3 Metal seal Exhaust center 3 position 30 or less 39 or less 59 or less VQZ3421 0.81 0.38 3.2 0.66 0.30 2.7 Rubber seal 25 or less 33 or

Air Cylinder Series MB

Bore size (mm) Z Z B DA DB DL DU DC DX DE DR DO DT DS DH DD H10 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 +0.084 0 32 40 50 63 80 100 125 32 40 50 63 80 100 125 33 33 45 45 65 65 75 46 52 65 75 95 114 136 32 32 43 43 64 64 78 22 22 30 30 45 45 60 10 10 11.5 11.5 14 14 15 44 44 60 60 86 86 110 14 14 20 20 30 30 32 62 62 81 81 111 111 136 6.6 6.6 9 9 11 11 13.5 15 15 18 18 22 22

Smooth Cylinder/Low Speed Cylinder

32 29 28.5 29.5 22.5 23.5 25.5 26.5 27.5 28.5 24 25 25 25 28 27 29.5 30 28 33 32 29 28.5 29.5 22.5 23.5 25.5 26.5 27.5 28.5 24 25 32 32 31.5 30.5 33 33.5 29 34 33 30 29.5 30.5 23.5 24.5 26.5 27.5 28.5 29.5 25 26 40 40 36 35 37.5 38 32 39 36 35 32.5 35.5 26.5 29.5 29.5 32 31.5 34.5 28 31 50 50 41.5 40.5 43 43.5 40 46 44 42 40.5 42.5 34.5 36.5 37.5 39.5 39.5 41.5 36 38 63 63 48.5 47.5 50 50.5

V100

Base mounted (with sub-plate) 53 (32) 58 (37) M5 x 0.8 54 (33) Note) Value for DC. Add 1 g for AC. ( ): Without sub-plate.

LEC-OM02704CN

44 55 66 01610929H2345 33 23.45 14 18 14 (2) 1016 0 0 16 0 11 22 33 44 55 15.5 22 161016 1559B 0209B 14 19 14 14.5.2 (1) (a) [0][1][0][0][0][E] (14.4.1) (b) 0 0 5 9 (2) (a) [0][1][8][0][8][E] (14.4.1) (b) 0 0 32bit 16 () 0 10 1 16 0 11 22 33 44 55 66 (3) 0 [8][1] [0][0] 1EA5 [0][1][8][0] [8][1] [0][0][1EA5]0 14 20 14 14.5.3 (1) [8][5] [0][0] 0 (PA