3 Port Solenoid Valve Rubber Seal Series SY100

Type 31 How to Order Applicable solenoid valve Note) SY113--M3 SY113A--M3 SY123--M3 SY123A--M3 Applicable blanking plate assembly SY100-77-1A SYJ SS3Y1 31 05 VK Stations VZ 02 2 stations P R 20 VT 20 stations R port VP M5 x 0.8 P port M5 x 0.8 VG Note) SY113(A) and SY123(A) cannot be mounted on the same manifold.

S070

Note) Order is accepted in 10 units. 4-11-4 Series S070 3 Port Solenoid Valve Compact Direct Operated Dimensions Base mounted with screws S070B-G-M3 Grommet type 16 3 V100 7 SY 12 18 SYJ 2-3.4 mounting hole VK 150 (Lead wire AWG#26) 5 22 6 VZ VT 20.5 19 3 2 VP 1 9.5 6.5 5.5 4.5 VG 12.3 10 10 25 VP M3 x 0.5 3 (EXH) port M3 x 0.5 1 (SUP) port M3 x 0.5 2 (OUT) port S070 VQ VKF S070B-C-M3 Plug

3 Port Solenoid Valve Rubber Seal Series SY100 1

SY11 A 3 4 M3 x 0.5 M3 x 0.5 100 kPA to 0 0.22 100 kPA to 0.6 Large flow 0 to 0.7 N.C. SY13(A): 15 SY14(A): 26 (14) SY13(A): 13 SY14(A): 24 (12) (1) SY12 3 4 M3 x 0.5 M3 x 0.5 100 kPA to 0.6 0.14 100 kPA to 0 Standard 0 to 0.7 N.O. (1) SY12 A 3 4 M3 x 0.5 M3 x 0.5 100 kPA to 0.6 100 kPA to 0 0.22 Large flow 0 to 0.7 N.O.

S070

-www.stevenengineering.com VT 20.5 19 3 2 VP 1 9.5 6.5 5.5 4.5 VG 12.3 10 10 25 VP M3 x 0.5 3 (EXH) port M3 x 0.5 1 (SUP) port M3 x 0.5 2 (OUT) port S070 VQ VKF S070B-C-M3 Plug lead type VQZ VZ VS 0.1 W with power saving circuit 150 (Lead wire AWG#26) 3.5 27 6 VFN 26 23.5 20.5 3 9.5 28.5 3.5 4-11-5 6 Series S070 Dimensions Base mounted with screws S070B-G-M5 Grommet type 16.5 3 7 15 21 2-

Series SY100 3 Port Solenoid Valve Rubber Seal

VK 31 Type How to Order Applicable solenoid valve (1) VZ SS3Y1 31 05 SY113-l-M3 SY113A-l-M3 SY123-l-M3 SY123A-l-M3 VT Stations 02 VT 2 stations ... ... Applicable blank plate assembly SY100-77-1A P R 20 stations VP 20 R port M5 X 0.8 P port M5 X 0.8 VG VP Note 1) SY113 (A) and SY123 (A) cannot be mounted on the same manifold.

3 Port Solenoid Valve Series VQ100 1

Dimensions Grommet VQ10-G-M5 (M3) 29.2 6.1 Manual override 4.9 12.4 14.8 E 2-2.7 mounting hole 12 3.7 18.1 (Lead wire length) 300 Locking type manual override 30.7 28 11 A P (5.9) (5.9) 7 ( 4 . 1 ) 5 5 5 4.9 9.7 4.9 3-M5, (M3) (18.1) ( ): M3 Broken line: Locking type manual override 4-12-10 11 3 Port Solenoid Valve Series VQ100 Dimensions L plug connector VQ10-L-M5 (M3) 35.1 Manual override

VQ

14.8 SY Lead wire color: Black E Lead wire color: Red 2-2.7 SYJ 12 3.7 (Mounting hole) 18.1 (Lead wire length) (Latching) VK Latching and large flow capacity style (Lead wire length) 35.6 300 42 300 40.7 VZ Locking style manual override VT 4.18 (100V AC or more) VT VP 30.7 VG 11 A P VP (5.9) (4. 1) (5.9) 7 5 5 5 9.7 4.9 4.9 3-M5 (M3) 31.4 37.8 VQ ( ): M3 Broken line: Latching and large

3 Port Solenoid Valve Series VQ100

30 6.1 4.9 41.7 300 (Lead wire length) Lead wire color: Black 12.4 14.8 V100 Lead wire color: Red E 2-2.7 12 3.7 SY Mounting hole 18.1 SYJ Latching, AC, Large flow type Locking type manual override VK VZ VT 36.7 30.7 VP (4.1) VG 11 A P (5.9) (5.9) 7 5 5 5 VP 3-M5,(M3) 4.9 4.9 9.7 S070 (30) VQ ( ): M3 Broken line: Latching, AC and large flow capacity One dot chain line: Locking type manual

3 Port Solenoid Valve Series VQ100 1

30 6.1 4.9 41.7 300 (Lead wire length) Lead wire color: Black 12.4 14.8 V100 Lead wire color: Red E 2-2.7 12 3.7 SY Mounting hole 18.1 SYJ Latching, AC, Large flow type Locking type manual override VK VZ VT 36.7 30.7 VP (4.1) VG 11 A P (5.9) (5.9) 7 5 5 5 VP 3-M5,(M3) 4.9 4.9 9.7 S070 (30) VQ ( ): M3 Broken line: Latching, AC and large flow capacity One dot chain line: Locking type manual

0.55

DC 5 6 24 VDC 12 VDC Made to Order Nil AC (50/60 Hz) Pilot exhaust port with piping thread (M3) specification (Refer to page 24).

3 Port Direct Operated Solenoid Valve Rubber Seal Series SY100 For details about certified products conforming to international standards, visit us at www.smcworld.com.

SY11 A 3 4 0.22 100 kPA to 0.6 100 kPA to 0 M3 x 0.5 M3 x 0.5 Large flow 0 to 0.7 N.C. SY13(A): 15 SY14(A): 26 (14) SY13(A): 13 SY14(A): 24 (12) (1) SY12 3 4 100 kPA to 0 0.14 100 kPA to 0.6 M3 x 0.5 M3 x 0.5 Standard 0 to 0.7 N.O. (1) SY12 A 3 4 0.22 100 kPA to 0 100 kPA to 0.6 M3 x 0.5 M3 x 0.5 Large flow 0 to 0.7 N.O.

VK300

Combinations of Blanking Plate Assembly and Manifold Base Blanking plate assembly: VK300-42-1A M3 x 8 Round head combination screw Blanking plate Manifold gasket for blanking plate Caution Mounting Screw Tightening Torques M3: 0.6 Nm Applicable base: In common for all types of VV3K3 models 4-5-4 5 3 Port Direct Operated Poppet Solenoid Valve Rubber Seal Series VK300 Dimensions: Body Ported

VP300/500/700

Remove pilot valve mounting screws (M3, 2 pcs.), rotate the pilot valve at 180 and then re-tighten the valve with the screw.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

VP 3 1 (P) 3 (R) Manual override VG (A) 2 N.O.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

VP (A) 2 N.C. 3 VG 1 (P) 3 (R) Manual override (A) 2 N.O.

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VT Type 42 Type S42 1 (P) 3 (R) (Valve leakage: 0.03 cm3/s He or less) Can be used in vacuum/release circuits VP VG Universal porting Type 40 VP N.C.

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

Note) The tightening torque for the cross recessed round head screw (M3 x 6.5 L) is 0.37 to 0.52 lbfft (0.5 to 0.7 Nm).

Vacuum System Peripherals:

At compressor discharge concentration 30 mg/m3 (ANR) Modular, Mist separator Series AFM Rated flow rate (l/min (ANR)) Oil mist concentration at outlet side 200 450 1100 Filtration (m) Port size Rc Model AFM20 AFM30 AFM40 AFM40-06 1 8 1 4 , , , , Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) 1100 1 4 3 8 0.3 1 4 3 8 1 2 3 4 At inlet pressure 0.7 MPa (Rated flow depends on inlet pressure.)

SYJ300-OMU0003

SY100-68-A-20 W2WA2500mm W3WA31000mm <2> 300mm W4WA42000mm SYJ312-5LPZ-M3 W7WA75000mm Assy Ass'y SYJ312-5W1ZE-M3 13 No.SYJ300-OMU0003 SYJ Series M8 10COM2 B 12 DCU+COM-COM 1 3 4 L 300mm V100-49-1-1 500mm V100-49-1-2 A B A B A B A B 1000mm V100-49-1-3 A B COM (+)(-) COM (+)(-) 2000mm V100-49-1-4 5000mm V100-49-1-7 (+)(-) (+)(-) (+)(-) (+)(-) (+)(-) (+)(-) (+)(-) (+)(-) (+)(-) (+)(-)

VQZ100V-OMT0001

15 No.VQZ100V-OMT0001 No. () 1ISO VG 32 R ? ? ?