3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Standard Specifications Standard Specifications Type of seal Metal seal Rubber seal Fluid Air, Inert gas Air, Inert gas Max. operating pressure 100 psi (0.7MPa) High pressure type 113 psi (0.8MPa) Min. operating pressure 14 psi (0.1MPa) 21 psi (0.15MPa) Valve specifications Solenoid specifications Note 1) Note 1) Ambient and fluid temperature 14 to 122F 14 to 122F Max. operating frequency 20Hz 5Hz

Proposals for Energy Saving

(Panel adaptor A + Panel adaptor B + Mounting bracket) ZS-22-D (With 4 pcs. of M3 tapping screws) ZS-22-E Panel adaptor A ZS-22-03 Panel adaptor B ZS-22-02 Mounting bracket ..

IZx-OMX0087

Tightening torque: 0.61 to 0.65 Nm IZT43-BL1 / L-type bracket M3 screw 2) Angle adjustment bracket For mounting, fix the bracket using M3x4 screws with the specified tightening torque. Tightening torque: 0.61 to 0.65 Nm IZT43-BL2 / Angle adjustment bracket M3screw 3) Installation of the nozzle Fix the bracket to the specified position using M3 screws. Refer to "6.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

How to Order Valve T 5M N7 VQZ2120 SY Example/Valve C6 5M VQZ2120R SYJ External pilot specification Thread (Cylinder ports and P, R ports) SX VK Rc(PT) External pilot port N NPT VZ M3 x 0.5 (VQZ2000) M5 x 0.8 (VQZ3000) T NPTF F G(PF) VF Note) R port of VQZ2000 is only G(PF) 1/16 VFR Cylinder ports VP7 Symbol M5 02 N1 N3 N7 N9 N11 Applicable tube O.D.

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

This dimension shows Q3 (M3 x 0.5).

XSA Series

Class B coil: AWG20 Insulator O.D. 2.5 mm Terminal cover Round head combination screw M3 Tightening torque: 0.5 to 0.6 Nm mark mark Tightening torque: 0.5 to 0.6Nm Round head combination screw M3 Tightening torque: 0.5 to 0.6Nm Conduit terminal Cross section A-A (Wiring inside) Lead wire Seal Conduit piping (Port size G1/2 Tightening torque 0.5 to 0.6Nm) Rated voltage Lead wire color (1)

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

How to Order Valve T VQZ212 5M N7 Example/Valve VQZ212R 5M C6 External pilot specification Thread (Cylinder ports, and P/R ports) Rc(PT) N NPT External pilot port T NPTF M3 X 0.5 (VQZ200) M5 X 0.8 (VQZ300) F G(PF) Note) R port of VQZ200 is only PF 1/16 Cylinder ports Symbol M5 02 N1 N3 N7 N9 N11 3/8" 1/8" 5/32" 1/4" 5/16" M5 Tube O.D.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Specifications Metal seal Seal Rubber seal Air, lnert gas Fluid Air, lnert gas 0.7MPa (High pressure type: 1.0MPa) Max. operationg pressure 0.15MPa Single Double 2 position Min. operating pressure 0.1MPa only for VQZ3000, 3 position 0.15MPa Valve specifications 0.1MPa 3 position 0.2MPa (1) (1) 10 to 50C Ambient and fluid temperature 10 to 50C SY Single Double Max. operating frequency 20Hz 5Hz

PA3000/5000/PAX1000

Recommended Valve PA3000 PA5000 VQZ140 (exhaust center) VQZ240 (exhaust center) Refer to page 21 for further details. 6 Series PA3000/5000 Performance Curves/Air Operated Type PA513 Flow rate characteristics PA313 Flow rate characteristics 50 50 Cycle 7Hz Cycle 5Hz Cycle 3Hz (no change when SUP=0.2, 0.3MPa) Cycle 7Hz Cycle 5Hz Cycle 3Hz (no change when SUP=0.2MPa) SUP=0.5MPa 40 40 SUP=0.5MPa

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Look up from the 5Hz switching cycle to find the intersection with SUP=0.35MPa. 2. From the point just found, draw a line to the Y-axis to find the air consumption. The result is approximately 9l/min (ANR). 1 0 2 3 4 5 6 7 8 9 10 Cycle (Hz) Caution 1. These flow rate characteristics are for fresh water (viscosity 1mPas, specific gravity 1.0). 2.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Recommended Valve PA3000 PA5000 VQZ140 (exhaust center) VQZ240 (exhaust center) Refer to page 21 for further details. 6 Series PA3000/5000 Performance Curves/Air Operated Type PA513 Flow rate characteristics PA313 Flow rate characteristics 50 50 Cycle 7Hz Cycle 5Hz Cycle 3Hz (no change when SUP=0.2, 0.3MPa) Cycle 7Hz Cycle 5Hz Cycle 3Hz (no change when SUP=0.2MPa) SUP=0.5MPa 40 40 SUP=0.5MPa

PAB-OM-O003

Discharge capability 1) Flow-rate characteristics PB1313A Flow-rate characteristics (5Hz) PB1313A5Hz 0.5 SUP=0.5MPa Discharge pressure (MPa) 0.4 SUP=0.4MPa MPa 0.3 SUP=0.3MPa 0.2 SUP=0.2MPa 0.1 0 0 200 400 600 800 1000 Discharge rate (mL/min) mL/min Caution -The above flow characteristic graph is for clean water (viscosity 1mPas, specific gravity 1.0).

Process Pump <Fluororesin Type> Series PA3000

Clean room Assembled and double-packaged in clean-room environment Note) With 3/8" inlet/outlet tube: 1 to 12l * The values appearing in the above table are representative of use in a room temperature environment and with tap water. 3 Series PA3000 Performance Automatically operated type Air pilot actuation type * Solenoid valve switching cycle PA3313-m03: Flow rate characteristics (5Hz

Process Pump

Discharge capability 1) Flow-rate characteristics PB1013A Flow-rate characteristics (5Hz) PB1013A flow-rate characteristics (When operated at PB1013A5Hz 5H ) 0.7 Discharge pressure (MPa) 0.6 SUP=0.7MPa 0.5 MPa SUP=0.5MPa 0.4 SUP=0.35MPa 0.3 SUP=0.2MPa 0.2 0.1 0 0 200 400 600 800 1000 Discharge rate (mL/min) mL/min Caution The above flow characteristic graph is for clean water (viscosity

AXTS-OMY0007

Internal pilot: 1 to 5HZ and external pilot: 1 to 8Hz is reference. The charts on page 10 show the relation for the adjustment needle value and operation frequency. However, there is approx. 2Hz of variation depending on individuality. Operating conditions affect the operating frequency.

IZx-OMT0049

Display of frequency IZT40IZT41 1Hz 3Hz 5Hz 8Hz 10Hz 15Hz 20Hz 30Hz DC DC IZT42 0.1Hz 0.5Hz 1Hz 3Hz 5Hz 8Hz 10Hz 15Hz 20Hz 30Hz Default frequency setting is 30 Hz. Set the optimum frequency depending on the operating environment and installed distance. 4-4-4. Offset voltage adjustment mode Offset voltage is adjusted before shipment.

Function: 1 (2 Position Single), Piping: 2 (Body Ported), Exhaust: 0 (Individual), Specifications: Standard, Voltage: S (5VDC), Lead Wire: G (Grommet Lead Wire 0.3m), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Type, Port Size: M3 (Body Ported M3X0.5)

Function: 1 (2 Position Single), Piping: 2 (Body Ported), Exhaust: 0 (Individual), Specifications: Standard, Voltage: 4 (220VAC 50/60HZ), Lead Wire: MO (M Plug w/o Connector), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Type, Port Size: M3 (Body Ported M3X0.5)

Function: 1 (2 Position Single), Piping: 2 (Body Ported), Exhaust: 0 (Individual), Specifications: Standard, Voltage: 6 (12VDC), Lead Wire: G (Grommet Lead Wire 0.3m), Surge Suppressor: R (Surge Suppressor Non-polar), Manual Override: Non-locking Push Type, Port Size: M3 (Body Ported M3X0.5)

Function: 1 (2 Position Single), Piping: 2 (Body Ported), Exhaust: 0 (Individual), Specifications: Standard, Voltage: 6 (12VDC), Lead Wire: M (M Plug Connector w/Lead Wire 0.3m), Surge Suppressor: S (Surge Suppressor), Manual Override: Non-locking Push Type, Port Size: M3 (Body Ported M3X0.5)