SMC Corporation of America
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OR .15" Hg, whichever is greater, after 10,000 cycles, Weight: 20 grams Part Number Adjustment Range (In. Hg) Maximum Overpressure (In. Hg) Deadband (In. Hg) Std. Current Rating   Min. Max.   Typ. Max.  

OR .15" Hg, whichever is greater, after 10,000 cycles, Weight: 20 grams Part Number Adjustment Range (In. Hg) Maximum Overpressure (In. Hg) Deadband (In. Hg) Std. Current Rating   Min. Max.   Typ. Max.  

OR .15" Hg, whichever is greater, after 10,000 cycles, Weight: 20 grams Part Number Adjustment Range (In. Hg) Maximum Overpressure (In. Hg) Deadband (In. Hg) Std. Current Rating   Min. Max.   Typ. Max.  

OR .15" Hg, whichever is greater, after 10,000 cycles, Weight: 20 grams Part Number Adjustment Range (In. Hg) Maximum Overpressure (In. Hg) Deadband (In. Hg) Std. Current Rating   Min. Max.   Typ. Max.  

OR .15" Hg, whichever is greater, after 10,000 cycles, Weight: 20 grams Part Number Adjustment Range (In. Hg) Maximum Overpressure (In. Hg) Deadband (In. Hg) Std. Current Rating   Min. Max.   Typ. Max.  

OR .15" Hg, whichever is greater, after 10,000 cycles, Weight: 20 grams Part Number Adjustment Range (In. Hg) Maximum Overpressure (In. Hg) Deadband (In. Hg) Std. Current Rating   Min. Max.   Typ. Max.  

OR .15" Hg, whichever is greater, after 10,000 cycles, Weight: 20 grams Part Number Adjustment Range (In. Hg) Maximum Overpressure (In. Hg) Deadband (In. Hg) Std. Current Rating   Min. Max.   Typ. Max.  

OR .15" Hg, whichever is greater, after 10,000 cycles, Weight: 20 grams Part Number Adjustment Range (In. Hg) Maximum Overpressure (In. Hg) Deadband (In. Hg) Std. Current Rating   Min. Max.   Typ. Max.  

OR .15" Hg, whichever is greater, after 10,000 cycles, Weight: 20 grams Part Number Adjustment Range (In. Hg) Maximum Overpressure (In. Hg) Deadband (In. Hg) Std. Current Rating   Min. Max.   Typ. Max.  

OR .15" Hg, (3.8 mm Hg) whichever is greater, after 10,000 cycles Part Number Adjustment Range (In. Hg) Maximum Overpressure (In. Hg) Deadband (In. Hg)2 Std. Current Rating2   Min. Max.   Typ. Max.  

OR .15" Hg, whichever is greater, after 10,000 cycles Part Number Adjustment Range (In. Hg) Maximum Overpressure (In. Hg) Deadband (In. Hg)2 Std. Current Rating2   Min. Max.   Typ. Max.  

Size LZ 40 200 to 1200 63 LC3F2 300 to 1500 Rod Type LEY Series Guide Rod Type LEYG Series Stroke Stroke Size Size 25 25 30 to 400 30 to 300 32 32 30 to 500 63 100 to 800 779 Motorless Type Electric Actuators Compatible Motors by Manufacturer (100 W/200 W/400 W equivalent) Manufacturer Series Type 1 Pulse input MELSERVO-JN HF-KN Mitsubishi Electric Corporation MELSERVO-J3 HF-KP MELSERVO-J4 HG-KR

d by rwo .trg noztee -25 inch Hg t630mm Hg) 50 PSI (3.5 kg cms) E fr E 5 g Specifications " 4o%Suction now hre Main: PooDet valve Pilot: NVJ114 (NVJ324M for N.O. Solid state type switch (ZSE1) lrlclas of suction flow Ete Thin and llghtweight. 0.6 inch (1 smm) width.

d by rwo .trg noztee -25 inch Hg t630mm Hg) 50 PSI (3.5 kg cms) E fr E 5 g Specifications " 4o%Suction now hre Main: PooDet valve Pilot: NVJ114 (NVJ324M for N.O. Solid state type switch (ZSE1) lrlclas of suction flow Ete Thin and llghtweight. 0.6 inch (1 smm) width.

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (mm) G GP H HB HG HP A HS HT HA D FB FA d EA EB B C Model CY1S6 CDY1S6 CY1S10 CDY1S10 6.5 3 17 7.6 6 32 27 8 5 4 8 26 8 19 8 4 18 12 7.5 6 5 40 34 12 10 3 6.5 10 12 33 14 25.5 PA J x K LD (N) PB PW Q S ta tb TT T QW W Z L Model CY1S6 CDY1S6 M4 x

for Ultra High Purity Series AP500 For UHP gas delivery Flow capacity Standard: to 15 slpm HF (option): to 30 slpm Body material: 316L SS secondary remelt Hastelloy internals available for corrosion resistance Sub-atmospheric pressure delivery option How to Order Port Number q w e AP5 S FV4 FV4 02 2PW Delivery pressure Code 0.5 to 10 psig (0.0034 to 0.07 MPa) Sub-atmospheric (A): 100 mm Hg

Nickel plated Chrome molybdenum steel Hexagon socket head screw 21 Aluminum alloy Switch mounting rail 22 Note) Brass for 6, 10, 15 28 Series CY1S Magnetic Rodless Cylinder Slider Type/Slide Bearing Dimensions Slider type/Slide bearing CY1S6, 10 (mm) FB FA d EA EB G GP H HB HG HP A HS HT HA D B C Model CY1S6 CDY1S6 CY1S10 CDY1S10 6.5 3 17 7.6 6 32 27 8 5 4 8 26 8 19 8 4 18 12 7.5 6 5

VAC 0~85PSI ~0PSI P->A 0.6 (0,034) A->R 0.9 (0.05) (N)VZ110--M5 NC 0 ~ 7MPa 0 ~ 100PSI Body Ported 10-32Nom (M5x0.8) 0.15g 22in-Hg VAC 0~85PSI ~55PSI 0 ~ 5MPa 0 ~ 70PSI R->A 0.6 (0.034) A->P 0.6 (0.034 (N)VZ110--M5 NO S A F E T Y Note: In case of (N)VZ120 Supply Air to 'R' Port.

However under Japanese regulation, only MPa is available in Japan. 2PW 3PW 3PW 4PW 0 1 1 MPA MPA 4PW 40 Specifications AZ1402TmmA AZ1402T AZ1406T AZ1415T AZ1410T Operating Parameters 100 mm Hg absolute to 30 psig (-88 kPa to 0.2 MPa) 2 to 60 psig (0.014 to 0.4 MPa) 5 to 150 psig (0.034 to 1.0 MPa) 1 to 30 psig (0.007 to 0.2 MPa) (Source pressure 1000psig or less)1) 2 to 100 psig (0.014 to

C Q + Stroke Shock absorber Shock absorber RB0805 Side plate Section IF (CY1L6) (mm) A B D d C EA FA EB Model G HP J JK FB GP H HB HG HI HO HS HT HA CY1L6 CY1L10 7.6 8 3 6.5 7 M4 x 0.7 6 26 6.5 36 27 10 11 9 25 14 16 5 12 10 4 8 8.5 M5 x 0.8 6 3 12 7.5 33 9.5 5 50 34 17.5 14.5 13.5 33 21.5 18 6 PA (N) (NA) (NB) RW Q Z W tb ta T PB MM NN M L QW LD Model CY1L6 CY1L10 TT PW 12 54 68 56 10