SMC Corporation of America
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B 34 38 HG PA 2 10 Counterbore depth C MM thread depth M HG 2-P d D 4-J x K (Depth) 4-LD GP PW QW GP PW PB W HT HT Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com HS 14 HA HP H NN G G L Q + Stroke HS 14 Auto switch A HA HP H Auto switch mounting rail can also be

B 34 38 HG PA 2 10 Counterbore depth C MM thread depth M HG 2-P d D 4-J x K (Depth) 4-LD GP PW QW GP PW PB W HT HT Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com HS 14 HA HP H NN G G L Q + Stroke HS 14 Auto switch A HA HP H Auto switch mounting rail can also be

OR .15" Hg, whichever is greater, after 10,000 cycles, Weight: 20 grams Part Number Adjustment Range (In. Hg) Maximum Overpressure (In. Hg) Deadband (In. Hg) Std. Current Rating   Min. Max.   Typ. Max.  

OR .15" Hg, whichever is greater, after 10,000 cycles, Weight: 20 grams Part Number Adjustment Range (In. Hg) Maximum Overpressure (In. Hg) Deadband (In. Hg) Std. Current Rating   Min. Max.   Typ. Max.  

OR .15" Hg, whichever is greater, after 10,000 cycles, Weight: 20 grams Part Number Adjustment Range (In. Hg) Maximum Overpressure (In. Hg) Deadband (In. Hg) Std. Current Rating   Min. Max.   Typ. Max.  

OR .15" Hg, whichever is greater, after 10,000 cycles, Weight: 20 grams Part Number Adjustment Range (In. Hg) Maximum Overpressure (In. Hg) Deadband (In. Hg) Std. Current Rating   Min. Max.   Typ. Max.  

OR .15" Hg, whichever is greater, after 10,000 cycles, Weight: 20 grams Part Number Adjustment Range (In. Hg) Maximum Overpressure (In. Hg) Deadband (In. Hg) Std. Current Rating   Min. Max.   Typ. Max.  

OR .15" Hg, whichever is greater, after 10,000 cycles, Weight: 20 grams Part Number Adjustment Range (In. Hg) Maximum Overpressure (In. Hg) Deadband (In. Hg) Std. Current Rating   Min. Max.   Typ. Max.  

OR .15" Hg, whichever is greater, after 10,000 cycles, Weight: 20 grams Part Number Adjustment Range (In. Hg) Maximum Overpressure (In. Hg) Deadband (In. Hg) Std. Current Rating   Min. Max.   Typ. Max.  

OR .15" Hg, whichever is greater, after 10,000 cycles, Weight: 20 grams Part Number Adjustment Range (In. Hg) Maximum Overpressure (In. Hg) Deadband (In. Hg) Std. Current Rating   Min. Max.   Typ. Max.  

OR .15" Hg, whichever is greater, after 10,000 cycles, Weight: 20 grams Part Number Adjustment Range (In. Hg) Maximum Overpressure (In. Hg) Deadband (In. Hg) Std. Current Rating   Min. Max.   Typ. Max.  

OR .15" Hg, (3.8 mm Hg) whichever is greater, after 10,000 cycles Part Number Adjustment Range (In. Hg) Maximum Overpressure (In. Hg) Deadband (In. Hg)2 Std. Current Rating2   Min. Max.   Typ. Max.  

HT HS HB HA HB HA HG HT HI WB 4 x J Depth JK Plug [P (port f)] WB WA TA TA WA R TB Plug TB R W [P (port d)] Inner cover Note 3) holding screw (mm) A B C E ED EK F G H HA HB HG HI HL HP HS HT J JK K L Model +0.030 0 +0.030 0 CYP15 CYP32 8 9.5 5.4 4H9 9.5 4 12.5 6.5 45 19.5 8.5 8.5 23 38.6 44 27 19.5 M6 x 1 10 21 67 12 14 8.6 6H9 13 6 25 8.5 75 39 19 19 39 64.9 73.5 49.5 39 M10 x 1.5 12 20

OR .15" Hg, whichever is greater, after 10,000 cycles Part Number Adjustment Range (In. Hg) Maximum Overpressure (In. Hg) Deadband (In. Hg)2 Std. Current Rating2   Min. Max.   Typ. Max.  

Size LZ 40 200 to 1200 63 LC3F2 300 to 1500 Rod Type LEY Series Guide Rod Type LEYG Series Stroke Stroke Size Size 25 25 30 to 400 30 to 300 32 32 30 to 500 63 100 to 800 779 Motorless Type Electric Actuators Compatible Motors by Manufacturer (100 W/200 W/400 W equivalent) Manufacturer Series Type 1 Pulse input MELSERVO-JN HF-KN Mitsubishi Electric Corporation MELSERVO-J3 HF-KP MELSERVO-J4 HG-KR

d by rwo .trg noztee -25 inch Hg t630mm Hg) 50 PSI (3.5 kg cms) E fr E 5 g Specifications " 4o%Suction now hre Main: PooDet valve Pilot: NVJ114 (NVJ324M for N.O. Solid state type switch (ZSE1) lrlclas of suction flow Ete Thin and llghtweight. 0.6 inch (1 smm) width.

d by rwo .trg noztee -25 inch Hg t630mm Hg) 50 PSI (3.5 kg cms) E fr E 5 g Specifications " 4o%Suction now hre Main: PooDet valve Pilot: NVJ114 (NVJ324M for N.O. Solid state type switch (ZSE1) lrlclas of suction flow Ete Thin and llghtweight. 0.6 inch (1 smm) width.

Nickel plated Chrome molybdenum steel Hexagon socket head screw 21 Aluminum alloy Switch mounting rail 22 Note) Brass for 6, 10, 15 28 Series CY1S Magnetic Rodless Cylinder Slider Type/Slide Bearing Dimensions Slider type/Slide bearing CY1S6, 10 (mm) FB FA d EA EB G GP H HB HG HP A HS HT HA D B C Model CY1S6 CDY1S6 CY1S10 CDY1S10 6.5 3 17 7.6 6 32 27 8 5 4 8 26 8 19 8 4 18 12 7.5 6 5

VAC 0~85PSI ~0PSI P->A 0.6 (0,034) A->R 0.9 (0.05) (N)VZ110--M5 NC 0 ~ 7MPa 0 ~ 100PSI Body Ported 10-32Nom (M5x0.8) 0.15g 22in-Hg VAC 0~85PSI ~55PSI 0 ~ 5MPa 0 ~ 70PSI R->A 0.6 (0.034) A->P 0.6 (0.034 (N)VZ110--M5 NO S A F E T Y Note: In case of (N)VZ120 Supply Air to 'R' Port.

for Ultra High Purity Series AP500 For UHP gas delivery Flow capacity Standard: to 15 slpm HF (option): to 30 slpm Body material: 316L SS secondary remelt Hastelloy internals available for corrosion resistance Sub-atmospheric pressure delivery option How to Order Port Number q w e AP5 S FV4 FV4 02 2PW Delivery pressure Code 0.5 to 10 psig (0.0034 to 0.07 MPa) Sub-atmospheric (A): 100 mm Hg