Table of Contents

O.D. 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 21 25 22 27 38 30 32 39 31 32 37 38 44 66 38 43 65 53 53 68 51 52 67 10 17 19 17 19 20 18 21 20 18 21 20 22 21 25 22 21 25 23 22 25 23 22 25 KFL04-01 KFL04-02 KFL06-01 KFL06-02 KFL06-03 KFL08U-01 KFL08U-02 KFL08U-03 KFL08N-01 KFL08N-02 KFL08N-03 KFL10U-02 KFL10U-03 KFL10U-04 KFL10N-02 KFL10N-03

5 Port Solenoid Valve Series SY3000/5000/7000/9000

(WO) 10-SY5 40(R)-WO-02 3 4 5 L plug connector (L): 10-SY5 40(R)-L-02 3 4 5 Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 83.4 75.9 MAX.10 157.8 50.6[57.6] 64.6 35.2 49.5 55.1 M8 x 1 37.6 (Lead wire length) Approx. 300 61.7[68.7] Pg7 83.2 39.8 38.3[40.5] 76.7 33.3 18 18 18 18 18 18 18 18 139.6[144] 120[124.4] 57.2 17.3 60.7 137.8 58.1 159.6 28 28 28 28 9.5 22 9.5 22 48.1[

ZP

01 01 47 69 13 58 80 21.5 75.5 97.5 35.5 01 01 01 01 01 01 50.5 72.5 16.5 63.5 85.5 27.5 84 106 44 01 01 01 54 Series ZP How to Order With buffer ZPT A18 B01 40 H N J 25 Pad diameter Mounting thread size Pad type ( ) Symbol Pad diameter 40 50 63 80 100 125 Symbol Thread size M18 x 1.5 (40 to 80) M22 x 1.5 (100, 125) Vacuum inlet direction Vertical 40 50 63 80 100 125 Symbol Type Heavy-duty

Table of Contents

12.8 29 5 50 63 6 30.5 18 12.8 29 5 50 78 8 39 23 13.7 35 7 61 78 8 39 23 13.7 35 7 61 B C D E F G H (Mounting hole) ZH05BS-06-01 ZH05BL-06-01 ZH07BS-06-01 ZH07BL-06-01 ZH10BS-06-01 ZH10BL-06-01 ZH13BS-08-02 ZH13BL-08-02 I J K L M N O P Model 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 ZH05BS-06-01 ZH05BL-06-01 ZH07BS-06-01 ZH07BL-06-01 ZH10BS-06-01 ZH10BL-06-01 ZH13BS-08-02 ZH13BL

Table of Contents

-23 AS131F-M5-07 3.2 17 8.4 24.4 1/4" M5 x 0.8 12 21.6 20.7 31.9 13.7 9.3 17.5 31.8 13.1 12.7 AS131F-U10/32-07 AS231F-01-04 4 9.3 24.9 1/4" 10-32UNF 12 (12.7) 18 14.2 32.1 27.1 31.1 36.1 1/8 ASF AS231F-01-01 AS231F-01-06 26.9 37.2 17 12.7 31.8 17.5 9.3 13.1 24.4 13.5 22.9 6 11.6 10.9 14 8.4 1/8" AS231F-01-03 AS231F-01-08 30.9 41.7 28.2 18.5 8 15.2 21 12.9 16.2 9.3 5/32" 24.9 18 12 (12.7)

Vacuum Pad

01 01 47 69 13 58 80 21.5 75.5 97.5 35.5 01 01 01 01 01 01 50.5 72.5 16.5 63.5 85.5 27.5 84 106 44 01 01 01 54 Series ZP How to Order With buffer ZPT A18 B01 40 H N J 25 Pad diameter Mounting thread size Pad type ( ) Symbol Pad diameter 40 50 63 80 100 125 Symbol Thread size M18 x 1.5 (40 to 80) M22 x 1.5 (100, 125) Vacuum inlet direction Vertical 40 50 63 80 100 125 Symbol Type Heavy-duty

Vacuum Pad

01 01 47 69 13 58 80 21.5 75.5 97.5 35.5 01 01 01 01 01 01 50.5 72.5 16.5 63.5 85.5 27.5 84 106 44 01 01 01 54 Series ZP How to Order With buffer ZPT A18 B01 40 H N J 25 Pad diameter Mounting thread size Pad type ( ) Symbol Pad diameter 40 50 63 80 100 125 Symbol Thread size M18 x 1.5 (40 to 80) M22 x 1.5 (100, 125) Vacuum inlet direction Vertical 40 50 63 80 100 125 Symbol Type Heavy-duty

Vacuum Pad

01 01 47 69 13 58 80 21.5 75.5 97.5 35.5 01 01 01 01 01 01 50.5 72.5 16.5 63.5 85.5 27.5 84 106 44 01 01 01 54 Series ZP How to Order With buffer ZPT A18 B01 40 H N J 25 Pad diameter Mounting thread size Pad type ( ) Symbol Pad diameter 40 50 63 80 100 125 Symbol Thread size M18 x 1.5 (40 to 80) M22 x 1.5 (100, 125) Vacuum inlet direction Vertical 40 50 63 80 100 125 Symbol Type Heavy-duty

Vacuum Pad

01 01 47 69 13 58 80 21.5 75.5 97.5 35.5 01 01 01 01 01 01 50.5 72.5 16.5 63.5 85.5 27.5 84 106 44 01 01 01 54 Series ZP How to Order With buffer ZPT A18 B01 40 H N J 25 Pad diameter Mounting thread size Pad type ( ) Symbol Pad diameter 40 50 63 80 100 125 Symbol Thread size M18 x 1.5 (40 to 80) M22 x 1.5 (100, 125) Vacuum inlet direction Vertical 40 50 63 80 100 125 Symbol Type Heavy-duty

Table of Contents

(The SI unit type is provided for use in Japan.) 20 30 40 01 02 03 04 06 1/8 1/4 3/8 1/2 3/4 Option (3) Applicable model AW20(K) to 40(K) AW20(K) to 40(K) AW30(K)/40(K) AW20(K) to 40(K) Description With bracket Float type auto-drain (N.C.) Float type auto-drain (N.O.)

5-Port Solenoid Valve

or less 22 or less 18 or less 14 or less 18 or less 14 or less Metal seal SY33/4/5l1 18 or less 22 or less 18 or less 14 or less 18 or less 14 or less Rubber seal SY3A/B/Cl0 4-position dual 3-port valve 18 or less 22 or less 18 or less 15 or less 19 or less 15 or less With Residual Pressure Release Valve SY3000 Vacuum Release Valve with Restrictor Rubber seal SY51l0 2-position single 24

Table of Contents

Description Material Return spring Gasket VF4000-18-1 VF4000-20-1 VF4000-20-1 VF4000-18-2A VF4000-20-1 Stainless steel NBR o !0 !1 Hexagon socket head screw Steel M4 x 40 M4 x 40 M4 x 40 !2 Detent assembly VF4000-12A Refer to How to Order Pilot Valve Assembly on page 3-8-70. Pilot valve assembly !

SY

plug (16.5) 56 L type plug connector (L): SY5 40(R)-L-02 M type plug connector (M): SY5 40(R)-M-02 DIN terminal (D): 3 4 5 3 4 5 3 4 5 SY5 40(R)-D-02 Applicable cable O.D. 3.5 to 7 81.7 74.2 157.8 Max. 10 62.9 Pg.7 18 18 159.6 28 58.1 9.5 22 Grommet .

Table of Contents

Nil, G 1 to 40 DC Note) With no condensation How to Order (Single Unit) 5 01 GY1 VX 2 0 21 Normally Closed (N.C.)

AS

-23 AS131F-M5-07 3.2 17 1/4" 8.4 24.4 M5 x 0.8 12 21.6 20.7 31.9 13.7 9.3 13.1 30.9 17.5 12.7 KE AS231F-01-04 AS131F-U10/32-07 4 1/4" 9.3 24.9 10-32UNF 12 18 14.2 35.2 30.2 27.1 32.1 1/8 (12.7) 17 AS231F-01-06 AS231F-01-01 12.7 30.9 17.5 9.3 13.1 24.4 8.4 36.3 26.9 6 1/8" 14 10.9 11.6 22.9 13.5 TMH AS231F-01-08 AS231F-01-03 9.3 40.8 30.9 21 8 5/32" 16.2 12.9 15.2 28.2 18.5 24.9 18 12 AS231F

Micro Mechanical Valve Series VM1000

F.O.F. 6.7 mm 52 N 2 x 1/4 40 VM430-01-30R/B/G/Y-X207 40 T.T. Panel mounting hole 28.6 1.5 1.5 30.5 3 43.8 0.8 to 7.5 (125.4) (96.8) Symbol (OUT) 2 NC 53 10 12 13.5 18 13.5 18 36 4.5 VM4 SMC NO 3 (N.C.) 1 (N.O.) 22.5 OUT 35 25 21 0.5 MPa supply 26 N 6.7 mm T.T.

CG5-S

40 10 10 18 18 M14 x 1.5 42 14 22 30 M14 x 1.5 12 14 42 16 22 41.6 30 36 12 14 IY-G04SUS +0.5 +0.3 +0.5 +0.3 I-G05SUS Y-G05SUS 50, 63 50,63 14 14 22 22 M18 x 1.5 56 18 28 40 M18 x 1.5 16 20 56 20 25 50.6 40 44 16 20 IY-G05SUS +0.070 0 I-G08SUS Y-G08SUS 80 80 18 18 28 28 M22 x 1.5 71 21 38 50 M22 x 1.5 21 27 71 23 35 64 50 56 21 27 IY-G08SUS +0.5 +0.3 +0.084 0 I-G10SUS Y-G10SUS 100 100 22

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

centre Grommet (G), (H): SY5 40(R)-02-Q 3 4 5 Scale: 35% G H With interface regulator 157 75.4 72.5 15 34 22 (59) With plug (16.5) 56 L type plug connector (L): SY5 40(R)-L-02-Q M type plug connector (M): SY5 40(R)-M-02-Q DIN terminal (D): SY5 40(R)-D-02-Q 3 4 5 3 4 5 3 4 5 Applicable cable O.D. 3.5 to 7 81.7 74.2 157.8 Max. 10 62.9 Pg.1.2-16 18 18 159.6 28 58.1 9.5 22 1.2-38 Base Mounted

Proposals for Energy Saving

S + Stroke ZZ + Stroke Bore size (mm) E F (E1) WA GA S TA ZZ (F1) 17 21 26 26 32 37 18 25 30 32 40 50 2 2 2 2 3 3 20 21 23 23 30 31 18 19 21 21 28 29 77 (85) 84 (93) 97 (109) 97 (109) 116 (130) 117 (131) 17 18 20 20 119 (127) 136 (145) 157 (169) 157 (169) 190 (204) 191 (205) 2 2 2 2 3 3 32 40 50 63 80 100 Note 1) Dimensions other than the above are the same as the standard double acting

KJ

O.D. 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 21 25 22 27 38 30 32 39 31 32 37 38 44 66 38 43 65 53 53 68 51 52 67 10 17 19 17 19 20 18 21 20 18 21 20 22 21 25 22 21 25 23 22 25 23 22 25 KFL04-01 KFL04-02 KFL06-01 KFL06-02 KFL06-03 KFL08U-01 KFL08U-02 KFL08U-03 KFL08N-01 KFL08N-02 KFL08N-03 KFL10U-02 KFL10U-03 KFL10U-04 KFL10N-02 KFL10N-03