Piping: Base Mounted Common SUP Individual EXH, Stations: 3 Stations, A B Port Size: 5/32" One-touch Fitting

Piping: Base Mounted Common SUP Individual EXH, Stations: 4 Stations, A B Port Size: 5/32" One-touch Fitting

Piping: Base Mounted Common SUP Individual EXH, Stations: 6 Stations, A B Port Size: 5/32" One-touch Fitting

Piping: Base Mounted Common SUP Individual EXH, Stations: 7 Stations, A B Port Size: 5/32" One-touch Fitting

Piping: Base Mounted Common SUP Individual EXH, Stations: 10 Stations, A B Port Size: 5/32" One-touch Fitting

Piping: Base Mounted Common SUP Individual EXH, Stations: 12 Stations, A B Port Size: 5/32" One-touch Fitting

1

P.43 P.43 P.43 P.71 SY70 SY30 Manifold Top ported Bottom ported Top ported Type 51 SY50 From page 43 P.43 P.43 P.71 P.43 SY70 SY33 Type 52 SY53 From page 63 P.63 P.63 P.81 P.63 SY73 SY30 Type 10 SY50 From page 95 P.95 P.95 P.113 P.143 P.163 P.171 P.179 P.187 P.95 P.123 P.133 P.151 SY70 Type 11 SY50 From page 95 P.95 P.95 P.143 P.163 P.171 P.179 P.187 P.95 P.113 P.123 P.133 P.151 SY70 SY33

2

(40) AS321F-02-08(S)A 8 13.2 22.7 33 14.2 41 (41) AS321F-02-10(S)A 10 15.9 26.7 37 35.7 15.6 42 (42) AS321F-02-12(S)A 12 18.5 29.7 40 34.5 17 43 (43) AS321F-03-06(S)A 6 10.4 21.8 32.1 36.4 50 48.4 44.5 42.9 Flow Control Equipment 1/4 19 16.6 13.3 31 (32) AS321F-03-08(S)A 8 13.2 22.7 33 14.2 AS321F-03-10(S)A 10 15.9 26.7 37 28 15.6 32 (33) AS321F-03-12(S)A 12 18.5 29.7 40 26.8 17 34 (35)

ZP

Note 3) ZP3B-T2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-T(04/06/08)UM;(J/K)3-@ ZP3-T(04/06/08)B;(J/K)3-@ ZP3-T(04/06/08)UM;(J/K)6-@ ZP3-T(04/06/08)B;(J/K)6-@ ZP3-T(04/06/08)UM;(J/K)10-@ ZP3-T(04/06/08)B;(J/K)10-@ ZP3-T(04/06/08)UM;(JB/K)15-

Table of Contents

-04-08-03S-3 MS Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 8 6 KM14-06-08-01S-3 31 1 8 1 4 3 8 76.5 77 78 80 83 84 17 20 15.5 12.8 45.4 17 11.1 18.5 39 6 KM14-06-08-02S-3 15.2 12.8 KM14-06-08-03S-3 T 10 6 KM14-06-10-02S-3 43 44 66 7.5 KM14-06-10-03S-3 18.5 12.8

Table of Contents

Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Rc 3 8 ZH05DS-06-01-06 ZH05DL-06-01-06 ZH07DS-06-01-06 ZH07DL-06-01-06 ZH10DS-06-01-08 ZH10DL-06-01-08 ZH13DS-08-02-10 ZH13DL-08-02-10 ZH15DS-10-03-12 ZH15DL-10-03-12 12.8 24 21 7.8 6 17 24 12.8 24 21 6 17 24 12.8 24 22 6 17 24 12.8 24 22 6 17 24 13.7 26 24.5 8 20 28 13.7 26 24.5 8 20 28 15.3 28 27 10 22 30 15.3 28 27 10 22 30

ZP

Note 3) ZP3B-T2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-T(04/06/08)UM;(J/K)3-@ ZP3-T(04/06/08)B;(J/K)3-@ ZP3-T(04/06/08)UM;(J/K)6-@ ZP3-T(04/06/08)B;(J/K)6-@ ZP3-T(04/06/08)UM;(J/K)10-@ ZP3-T(04/06/08)B;(J/K)10-@ ZP3-T(04/06/08)UM;(JB/K)15-

ZP

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet y Connection 4 4 thread 1.6 6 15 10 66 23 43 15 71 28 25 81 38 33 18 D B 02 1.2 Width across flats 12 A N S U F GN GS B3 B5 04 06 N4 U4 6 33 18 15 10 66 23 43 15 71 28 25 81 38 J K ZP T U 04 A8 1.6 6 33 18 J: 2.5 K: 2 15 10 66 23 43 15 71 28 25 81 38 06 08 C2 Dimensions Per Vacuum Inlet: Female Thread Vacuum inlet: One-touch

Table of Contents

VFN Stations n: Station 2-Rc 1/8 (PE port) 6-Rc 1/2 (P , EA, EB port) 2 156 168 3 199 211 4 242 254 5 285 297 6 328 340 7 371 383 8 414 426 Formula L1 = 43 x n + 70 L2 = 43 x n + 82 L L1 L2 Non plug-in type Manifold VV5FR4-10Station 1Port size U side Applicable cable O.D. 8 to 10 Manual override (Non-locking) P = 43 (Pitch) (Pitch) P = 43 Stations 2n-Rc 3/8 (A, B port) 2n-Rc 3/8, 1/2 (A,

ZP

Weight (g) Pad form Flat/Flat with ribs Female thread Female thread Female thread One-touch fitting One-touch fitting One-touch fitting Barb fitting Barb fitting Barb fitting Deep Bellows Stroke (mm) Vacuum entry port Model NU NU NU B5 B01 04 06 08 B5 B01 04 06 08 B3 B5 B01 04 06 08 B3 ZPT2004 3507 4010 ZPT thin section series 10 to 16 02 to 08 6 22 26 27 24 22 22 24 26 27 22 10 to 16 10

KJ

-04-08-03S-3 MS Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 8 6 KM14-06-08-01S-3 31 1 8 1 4 3 8 76.5 77 78 80 83 84 17 20 15.5 12.8 45.4 17 11.1 18.5 39 6 KM14-06-08-02S-3 15.2 12.8 KM14-06-08-03S-3 T 10 6 KM14-06-10-02S-3 43 44 66 7.5 KM14-06-10-03S-3 18.5 12.8

Compact Hydraulic Cylinder

36.5 43.5 78 88 Equipment CH2F 41.5 36.5 41.5 36.5 41.5 76 86 50 CH2H 40 42 36 42 36 42.5 77 87 D-m CH2E 47.5 47 43 48.5 43 50.5 85 95 CH2F 46.5 43 46.5 43 48.5 83 93 63 CH2H 47.5 47 43 48.5 43 50.5 85 95 CH2E 55.5 57 55.5 58.5 55.5 59 93.5 103.5 CH2F 80 56.5 55.5 56.5 55.5 57.5 92 102 CH2H 56 57.5 55.5 59 55.5 59.5 94 104 CH2E 65 66.5 67 66.5 67 69.5 104 114 CH2F 100 65.5 67 65.5 67

Air Fittings & Tubing

76.5 77 78 8 6 KM14-06-08-01S-3 31 39 6 KM14-06-08-02S-3 15.2 12.8 KM14-06-08-03S-3 1 4 3 8 1 2 10 6 KM14-06-10-02S-3 43 44 66 7.5 KM14-06-10-03S-3 18.5 12.8 KM14-06-10-04S-3 87.5 88.5 92 81.5 82 84 19 22 21 19 12.8 45.4 17 12.8 21 1 4 3 8 1 2 94 95 98.5 88 89 90.5 10 8 KM14-08-10-02S-3 47 19 70 7.5 KM14-08-10-03S-3 18.5 15.2 KM14-08-10-04S-3 22 22.5 19 15.2 52.6 18.5 12.8 21 KM15 Precautions

ZP

ZP2-08AN ZP2-11AN Adapter part no. 08 11 Type Nozzle Symbol ZP2A-Z21P ZP2-T08AN-A5 ZP2-T11AN-A5 AN Note) in the table indicates the pad material.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

-1ASY3000-43-2A+COM Type D, 9 to 16 stations Type U, 2 to 8 stations SY3000-43-2ASY3000-43-3A7 Connecter assembly COM Type D, 2 to 8 stations Type U, 9 to 16 stations SY3000-43-1NASY3000-43-2NACOM Type D, 9 to 16 stations Type U, 2 to 8 stations SY3000-43-2NASY3000-43-3NA8 Dust cap VZ3000-63-2 M3 x 26, Matt nickel plated Round head combination screw 9 SY3000-23-4 Refer to page 247. 10 Gasket