SV

Note Symbol 02 Stations 2 stations Double wiring specifications (1) 09 02 A, B port size (Metric) 9 stations 2 stations Specifications Symbol C3 C4 C6 C4 C6 C8 C6 C8 C10 C8 C10 C12 02 03 02F 03F M P, E port Applicable series Specified layout (2) One-touch fitting for 3.2 One-touch fitting for 4 One-touch fitting for 6 One-touch fitting for 4 One-touch fitting for 6 One-touch fitting for 8

Vacuum System Peripherals:

(When port sizes for A, B ports are mixed, indicate C4 or C6 in cell .)

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

, N3 C6, N7 Foot bracket 10-SY3120-F1 G H C4, N3 C6, N7 Directional Control Valves Air Grippers Modular F.

SZ3000

When the port size of the external pilot block assembly is 4, indicate with C4 in section (c).

PFxx-OMJ0005CN

) 10.1 8.1 C4 4(5/32) 10.1 8.1 C6 6 10.3 8.3 C6 6 10.3 8.3 C8 8(5/16) 12 10 C8 8(5/16) 12 10 N7 1/4 10.3 8.3 N7 1/4 10.3 8.3 PFM7-01/02--X693 PFM7S-01/02--X693 A B C() A B C() Rc1/81/4 Rc1/81/4 NPT1/81/4 NPT1/81/4 13 11 17 13 11 17 G1/8 G1/8 G1/4 17 15 21 G1/4 17 15 21 -73No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 A B A B C4 4(5/32) 10.1 36.1 C4 4(5/32) 10.1 8.1

Rubber seal 5 Port Solenoid Valve Series SYJ5000

(One-touch fitting for 4) C4 (One-touch fitting for 4) A, B port C6 (One-touch fitting for 6) M5 x 0.8 Flow Characteristics Flow characteristics Port size 14/2 (PA/B) 4/25/3 (A/BR) Manifold C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1(P), 5/3(R) Port 2(B), 4(A) Port M5 x 0.8 C4 C6 M5 x 0.8 M5 x 0.8 1/8 C6 C4 1/8 1/8 1/8 1/8 1/8 1/4 1/4 1/8 0.46 0.62 0.79 0.55 0.59 0.74 0.71 0.55 0.39 0.33 0.36

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

04 9 stations 4 stations 02 02 2 stations 2 stations Specified layout (Up to 9 solenoids possible) Specified layout (Up to 19 solenoids possible) 19 09 19 stations 9 stations Note 1) Double wiring: Single, double, 3 position and 4 position solenoid valves can be used at all of the manifold stations.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

Note 2) ( ): Denotes without sub-plate. 5-2-6 5 5 Port Air Operated Valve Series SYA3000/5000/7000 Series SYA3000: Body Ported Foot bracket SYA3120-F1 C4, N3 C6, N7 2 position single SYA3120(-F2) C4, N3 C6, N7 One-touch fitting (A, B port) M5 x 8 (Pilot port) Applicable tubing O.D.: 4, 1/4" 6, 5/32" Manual override (Non-locking) SA VA 2 2.2 (For manifold mounting) SA 2 3.2 (For mounting

Table of Contents

(VJ3133) Air operated VJA3130 0.245 0.213 0.194 0.187 0.174 0.184 0.214 K2 K3 C1 C2 C3 C4 Weight includes Bracket B. (Solenoid valve: 24 VDC, M plug connector type) Air operated VJA3130 N.C. (VJ3133) N.C. (VJ3133) Double SOL. (VJ3233-X18) How to Order Refer to page 13-3-34 for further part no. information.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

, C6, M5 C4, C6, C8 C8 C10 The total number of stations is tabulated starting from station one on the D-side.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

, C6, M5 C4, C6, C8 C8 C10 The total number of stations is tabulated starting from station one on the D-side.

0.4

Note) Based on JIS B 8375-1981 (Supply pressure: 0.5 MPa) To CYL port VP4 VQ 1/2 VQ 1/2 Dimensions VQ 4/5 Single unit Manifold VQC 1/2 2n x C4, C6 C4: 4 One-touch fitting C6: 6 One-touch fitting 2 x C4, C6 C4: 4 One-touch fitting C6: 6 One-touch fitting VQC 4/5 VQZ M3 mounting hole M2.5 mounting hole SQ VFS VFR VQ7 Residual pressure release manual override DIN rail clamp screw Residual

0.4

VQ7 DIN rail clamp screw Stations 1 2 3 n D side U side 2 x C3, C4, C6, M5 C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread 2n x C3, C4, C6, M5 C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread Dimensions Formula L1 = 11n + 20 n: Station (Maximum 24) n L 1 2 3 4 5 6 7 8 9 10 11 12 L1 L2 L3 75 64 53 97 130 152

Compact 5-Port Solenoid Valve

JSY1000 manifold pitch for C2 and C4 is 6.5 mm, and 9 mm for C6.

Valve Mounting Direction: S (Single Solenoid Coil on the Same Side as A,B Ports), Piping: 46 (5 Port/Base Mounted Common SUP Individual EXH), Stations: 20 Stations, A B Port Size: C4 (ø4 One-touch Fitting)

Valve Mounting Direction: S (Single Solenoid Coil on the Same Side as A,B Ports), Piping: 46 (5 Port/Base Mounted Common SUP Individual EXH), Stations: 7 Stations, A B Port Size: C4 (ø4 One-touch Fitting)

Valve Mounting Direction: S (Single Solenoid Coil on the Same Side as A,B Ports), Piping: 46 (5 Port/Base Mounted Common SUP Individual EXH), Stations: 13 Stations, A B Port Size: C4 (ø4 One-touch Fitting)

Valve Mounting Direction: S (Single Solenoid Coil on the Same Side as A,B Ports), Piping: 46 (5 Port/Base Mounted Common SUP Individual EXH), Stations: 15 Stations, A B Port Size: C4 (ø4 One-touch Fitting)

Valve Mounting Direction: S (Single Solenoid Coil on the Same Side as A,B Ports), Piping: 46 (5 Port/Base Mounted Common SUP Individual EXH), Stations: 5 Stations, A B Port Size: C4 (ø4 One-touch Fitting)

Valve Mounting Direction: S (Single Solenoid Coil on the Same Side as A,B Ports), Piping: 46 (5 Port/Base Mounted Common SUP Individual EXH), Stations: 14 Stations, A B Port Size: C4 (ø4 One-touch Fitting)