KJ

(inch) Connection thread M R Model H (Width across flats) L A M Min. port size KQ2H01-M5 KQ2H07-M5 KQ2H01-M5 M5> Weight (g) D Note) Applicable tubing KQ2H01-M5 2 9 16 6 11 12 3.3 10 15 M5 x 0.8 13.6 18 7 16.7 22 12.7 KQ2H01-01S 1 8 1 8 10 15.5 2.5 1 4 KQ2H01-02S 19.5 13.5 14 2.5 M5 x 0.8 KQ2H05-M5 10.3 20.5 18 15 15.3 18.5 17 10.7 11 14 11 24 22 21 18.4 22.5 23 16.5 1 8 3 16

VM

VM120-01-07 VM120-01-07S VM130-01-07 VM130-01-07S VM122-M5-07 VM122-M5-07S VM132-M5-07 VM132-M5-07S Cross roller plunger Toggle lever VM120-01-08 VM130-01-08 VM122-M5-08 VM132-M5-08 VM130-01-30R VM130-01-30B VM130-01-30G VM130-01-30Y VM132-M5-30R VM132-M5-30B VM132-M5-30G VM132-M5-30Y VM120-01-30R VM122-M5-30R VM122-M5-30B VM122-M5-30G VM122-M5-30Y VM-30AR Red Push button (Mushroom) VM-30AB

One-touch Fittings

Port size Symbol Size 01 1/8" 05 3/16" 07 1/4" 09 5/16" 11 3/8" 13 1/2" Symbol Size M5 M5 x 0.8 01 1/8 02 1/4 03 3/8 04 1/2 00*1 Same diameter tubing 1 Only for Bulkhead union. Spare Parts Use the part number below to order the gasket for M5 thread.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

B port size: M5, C4, C6, N3, N7.

F

2 7 21.5 18 14.5 2.5 2.9 3.2 M5x0.8 KJF23-M5 7 7 21 7.5 14.5 3/2.5 2.9 4 M3x0.5 KJS04-M3 1.5 8 18 15.5 14.5 1.4 1.5 4 M3x0.5 KJF04-M3 8 8 18 5.5 14.5 4 3.2 4 M5x0.8 KJS04-M5 2.5 8 20.5 17 14.5 4 2.6 4 M5x0.8 KJF04-M5 8 8 20.5 7.5 14.5 4 3.8 4 R(PT)1/8 KJS04-01S 3 9.8 21.5 17.5 14.5 4 5.3 6 M5x0.8 KJF06-M5 10 10 20 7 15.5 10 5.1 6 M5x0.8 KJS06-M5 2.5 10 21.5 18 15.5 4 3.2 6 R(PT)1/8 KJS06

Speed Controller with Indicator

[L/min (ANR)] 06, 07, 08, 09, 10 06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 400 200 06, 07 02 01, 23 300 50 03, 04 200 100 01, 23 100 0 0 0 5 0 10 5 0 10 5 0 10 Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

Proposals for Energy Saving

VM-07BS VM-07B VM-06BS VM-06B VM-05B Straight plunger VM130-01-05 VM132-M5-05 Polyacetal roller Hard steel roller Roller plunger VM130-01-06 VM130-01-06S VM132-M5-06 VM132-M5-06S Polyacetal roller Hard steel roller Cross roller plunger VM130-01-07 VM130-01-07S VM132-M5-07 VM132-M5-07S Toggle lever VM130-01-08 VM132-M5-08 VM-30AR Red Push button (Mushroom) VM130-01-30R VM130-01-30B VM130-

High Purity Chemical Valve

Port size 1/4 Symbol 02 Construction q e w Description Material Parts list R P No. 1 Actuator section PPS 2 Body PFA r 3 Diaphragm PTFE 4 End plate Stainless steel 479 Series LVA Dimensions P R 30 41 26 A M5 x 0.8 Pilot port (3 x NPT1/4) 3 x Rc1/4 Breathing port M3 x 0.5 PB 13 46 PA 72 41 22.5 30 6.5 52.5 2 x M5 x 0.8 Depth 6 20 480 Manually Operated Integral Fitting Type/Threaded Type Series

Prevents Micro-Bubbles

x 0.8 Pilot port Breathing port M3 x 0.5 PB 13 46 PA 72 41 22.5 30 6.5 52.5 2-M5 x 0.8 Depth 6 20 17-5-26 24 Manually Operated Series LVH How to Order Valve (Single Type) VC Applicable tubing size Body class Body class 2 3 4 Connecting tubing O.D.

AC Servo Motor Driver (Pulse input type/Positioning type ）

DOCOM 46 DOCOM 46 OPC 12 20 47 OPC 12 20 47 24 V DC 24 V DC DICOM DICOM DOCOM DOCOM PP 10 PP 10 PP2 37 PP2 37 PG 11 PG 11 NP 35 NP 35 NP2 38 NP2 38 NG 36 NG 36 For sink input interface For source input interface 3. This diagram shows sink I/O interface. For source I/O interface, refer to section 3.9.3. 4. CN2L can not be used. Connect the encoder cable to CN2. 5.

Speed Controller with One-touch Fitting

as M5.

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

/ Elbow type Seal method: Gasket seal For M5, 10-32UNF D3 Applicable tubing O.D. d D1 A L4 L3 M T H (Width across flats) L1 L2 Metric Size [mm] Model d T H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M Weight [g] Unlocked Locked Unlocked Locked AS12l1FG-M5-02A 2 5.8 15.8 20.3 11.9 AS12l1FG-U10/32-02A AS12l1FG-M5-23A 3.2 7.2 16.9 5 AS12l1FG-U10/32-23A AS12l1FG-M5-04A 4 8.2 AS12l1FG-U10/32-04A AS12l1FG-M5

Vacuum

Port srze M5 ( 10 32 nom.)

Vacuum

Port srze M5 ( 10 32 nom.)

Table of Contents

0.8 VEX NPT 1/8 NPT 1/8, M5 x 0.8 4 One-touch fitting AMR R 1/8, M5 x 0.8 6 One-touch fitting 5/32" One-touch fitting NPT 1/8, M5 x 0.8 ITV 1/4" One-touch fitting JIS Symbol M5 x 0.8 female thread is cut inside the pipe.

AC Servo Motor Driver

44 140 70 M5 M4 12 33 12.

reduces flow setting time

ANR)] 06, 07, 08, 09, 10 06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 400 200 06, 07 TMH 02 01, 23 300 50 03, 04 ASD 200 100 01, 23 AS 100 AS-FE 0 0 0 5 0 10 5 0 10 5 0 10 KE Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

V100

+ M5 x 0.8 (X port) VP 35.6 28.5 26.1 X R P S070 13 5 5 10 M5 x 0.8 (P, R port) 10 8.6 7.5 VQ 17.5 23 VKF VQZ L plug connector (L): SYJ34-L-M5 M plug connector (M): SYJ34-M-M5 M8 connector (WO): SYJ34-WO-M5 VZ VS VFN Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 M8 x 1 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 58.5 [60.7] 48.7 [50.9] 57.6 50.2 43.7 R P R P R P 10 8.6 10 8.6 10

Vacuum System Peripherals:

Air operated Nil M6 x 1 (Option) M5 x 0.8 PV/V port size Applicable to only plug connector.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

PL_ _ ]) . 5-46 6.