0.4

SUP/EXH block SSQ1000-PR-3-C8(-S) SUP block plate SSQ1000-B-P Blanking plug KQ2P-23/04/06/08 Dual flow fitting SSQ1000-52AC8 N9 P.44 P.45 P.46 P.42 P R D side U side Silencer (For EXH port) Individual SUP spacer SSQ1000-P-3EXH block plate SSQ1000-B-R Port plug VVQZ100-CP C6 L6 P.42 P.44 P.45 P.46 P R D side U side Individual EXH spacer SSQ1000-R-3Back pressure check valve (-B) SSQ1000-BP

Table of Contents

03 04 q Description No.

SX

One-touch fitting for 4 C4 02 2 stations 02 2 stations One-touch fitting for 6 C6 SX3000 (1) One-touch fitting for 6 C6 Double wiring specifications SX3000 (1) Double wiring specifications Mixed M Mixed M 08 8 stations 04 4 stations One-touch fitting for 4 C4 One-touch fitting for 4 C4 02 2 stations 02 2 stations One-touch fitting for 6 C6 One-touch fitting for 8 C8 Mixed M (2) One-touch

SQ1000/2000

(-S) P. 45 P. 46 P. 47 P. 49 C8 L8 Terminal number SOL.

Modular F.R.L. Units

)-A Y610-(03)-A 04-A 02A VHS40-03A 04A VHS40-06A VHS50-06A 10A Pressure relief 3 port valve 6 VHS20-01A 02A VHS30-02A 03A Attachment 02-A E400-03-A 04-A 06-A Piping adapter 6 E100-M5-A 01-A E200-02-A 03-A 02-A E300-03-A 04-A E500-06-A E600-06-A 10-A 02-A IS10E-4003-A 04-A 06-A Pressure switch with piping adapter 6 01-A IS10E-2002-A 03-A 02-A IS10E-3003-A 04-A Cross spacer 6 Y14-M5-A Y24

Series SV

For "M" (mixed ports), indicate the port size, such as C3 or C4, instead of a "" in the a section of the station table.

Series VQ Metal Seal/Rubber Seal Body Ported

VQ0140-5MO-C4 4 sets (Single solenoid No.) VQ0240-5MO-C4 4 sets (Double solenoid No.) The mark is an assembling mark. Prefix to parts nos. of solenoid valves, etc. VVQ0-R-4-C4 Individual EXH spacer VVQ0-57A-4 DIN rail mounting bracket KQP-X19 Blank plug 23 04 06 Specify valve and option nos. below the manifold base No.

5 Port Solenoid Valve Series SV1000/2000/3000/4000

C4: 4 (SMC) N3: 5/32" (SMC) One-touch fitting [X: External pilot port] Applicable tube O.D. C4: 4 (SMC) N3: 5/32" (SMC) (9.5) (43.9) One-touch fitting [1(P), 3/5(E) port] Applicable tube O.D.

SYJ300/500/700

C4 Type SS3YJ3-S42-M5 Type SS3YJ3-S42-C4 M5 x 0.8 C4 SYJ34 1/8 Body ported for external pilot Type SS3YJ3-20R 0.9 SYJ32R 1/8 M3 x 0.5 Type SS3YJ3-42R-M5 Type SS3YJ3-42R-C4 Type SS3YJ3-S42R-M5 Type SS3YJ3-S42R-C4 0.17 0.36 0.30 0.17 0.31 0.33 0.32 0.35 0.075 0.086 0.079 0.082 0.32 0.33 0.33 0.35 0.11 0.20 0.35 0.26 0.072 0.082 0.086 0.086 M5 x 0.8 C4 SYJ34R 1/8 Base mounted for external

VQZ1000/2000/3000

VQZ2 20 1(R)-G-C4/C6/M5 3 4 5 300 (Lead wire length) 122 54.5 17.3 6 6 R2.5 3.4 B 4 11 15 SMC SMC 2 A Cover diameter 1.6 Cross section 0.34 mm2 24 22.7 mounting hole 66.5 2-C4, C6, M5 Manual override C4: One-touch fitting for 4 C6: One-touch fitting for 6 M3 x 0.5 external pilot port (Only external pilot type (R)) M5: M5 thread 25 10 (For C4, C6) Courtesy of Steven Engineering, Inc.-230

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

C4: 4 (SMC) N3: 5/32" (SMC) One-touch fitting [X: External pilot port] Applicable tubing O.D. C4: 4 (SMC) N3: 5/32" (SMC) (9.5) (43.9) One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.

smcmaintenancepartslist

) 04 T-interface Note 6) Note 7) Y110-M5 VHS20-01 02 VHS50-06 10 3-port valve for residual pressure release Note 7) VHS30-02 03 VHS40-06 01 E200-02 03 02 E300-03 04 E600-06 10 Piping adapter Note 7) E500-06 E100-M5 01 IS1000E-2002 03 02 IS1000E-3003 04 Pressure switch with piping adapter Note 7) Y24-01 02 Y34-01 02 Y54-03 04 Cross spacer Note 7) Y14-M5 Note 1) in part numbers for a round

Table of Contents

VQ0140-5MO-C4 4 sets (Single solenoid part no.) VQ0240-5MO-C4 4 sets (Double solenoid part no.) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc. VVQ0-R-4-C4 Individual EXH spacer VVQ0-57A-4 DIN rail mounting bracket KQ2PBlanking plug 23 04 06 Please indicate manifold base type, corresponding valve, and option parts.

Proposals for Energy Saving

06 08 10 12 16 Symbol 01 02 03 04 06 Tubing O.D. mm 4 6 8 10 12 16 Hose O.D.

5 Port Solenoid Valve Series VQZ1000/2000/3000

Entry is the same as standard products. 966 Series VQZ Replacement Parts Base Mounted One-touch Fitting Assembly (for Cylinder port) Fitting size C3 C4 C6 C8 C10 Model VQZ1000 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VQZ2000 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 VQZ3000 VVQ2000-51A-C6 VVQ2000-51A-C8 VVQ2000-51A-C10 Note) Purchasing order is available in units of 10 pieces

5 Port Solenoid Valve

Dimensions Single unit Manifold 2 x C4, C6 C4: 4 one-touch fitting C6: 6 one-touch fitting 2 x C4, C6 C4: 4 one-touch fitting C6: 6 one-touch fitting Mounting hole for M3 Mounting hole for M2.5 Manual override for residual pressure exhaust Manual override for residual pressure exhaust DIN rail clamping screw Stations12 3 D side U side 2 x C3, C4, C6, M5 C3: 3.2 one-touch fitting C4: 4 one-touch

Table of Contents

A White Normally Open B Red Normally Closed Mounting & Wiring ZSE ISE IFW50--01 to 04/11 to 14/21 to 24 Caution PSE 1. Mount a switch, so that the liquid flow is in the same direction as that of the arrow on the body. 2. The flow switch can be installed either horizontally or vertically. 3.

Valve Single Unit

How to Order Port Block Assembly Only replacement of the fittings assembly is possible. 000 6A SY Metric size One-touch fitting for 6 One-touch fitting for 4 VVQ1000-51A-C4 VVQ1000-50A-C6 SX3000 VVQ1000-50A-C4 Series Thread type One-touch fitting for 4 One-touch fitting for 6 One-touch fitting for 8 Symbol Series Nil Rc 3 SX3000 SX5000 VVQ1000-51A-C6 VVQ1000-51A-C8 G F 5 SX5000 N NPT 7 SX7000

Intrinsically Safe Valve

-LLL (Lead wire length) 148.3 Insulator: Red (+) Insulator: Black () 0.3 mm2 4.1 5.9 51.2 03 04 Terminal type (TT) 53-SY9140-TTMax. 10 L (Lead wire length) 165.1 Lead wire marking No. 1 (+), No. 2 () 0.75 mm2 48.5 29 Base Mounted Series 53-SY5000/7000/9000 Dimensions: 53-SY9000 2-position double L-type plug connector (L) 53-SY9240-L03 04 29 30 17.5 106 86.5 51.2 2 x 5.4 (For mounting) 25

Vacuum System Peripherals:

(When port sizes for A, B ports are mixed, indicate C4 or C6 in cell .)