SQ1000/2000

B 4 16 () 17 5 SOL. A 4 () 18 6 Station 6 SOL. B 19 17 () 7 20 SOL. A 8 5 () Station 7 21 SOL. B 9 18 () 22 10 SOL. A 23 6 () 11 Station 8 SOL.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

1/8 1/8 M5 x 0.8 1/8 Type 10-SS3YJ5-41-M5 10-SYJ54M Type 10-SS3YJ5-41-01 Type 10-SS3YJ5-41-C4 Type 10-SS3YJ5-41-C6 C6 1/8 Note) The values are for individually operated 2 position type manifold bases.

V

Y P E 41 S I D E P O R T E D M A N I F O L D.

Compact 5-Port Solenoid Valve

COM. 41 Red Red COM.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

12 248 237.5 224.3 12 13 260.5 250 234.8 13 14 273 262.5 245.3 14 15 285.5 275 255.8 15 16 298 287.5 266.3 16 17 310.5 300 276.8 17 18 310.5 300 287.3 11.5 L1 L2 L3 L4 234 Circular Connector 10-SV Dimensions: Series 10-SV2000 for Circular Connector U D B C4, N3 C6, N7 C8, N9 (R) Stations Cassette base manifold: 10-SS5V2-W16CDWhen P, E port outlets are indicated on the U side or D side,

Table of Contents

19.95 99.5 54 39 14 4.2 17 19.95 116.5 58.5 41 17 4.2 19 ZH15DS-02-03-03 22.45 116.5 58.5 41 17 4.2 19 ZH15DL-02-03-03 22.45 (Mounting hole) Model I J K L M N O P Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Rc 3 8 ZH05DS-01-01-01 ZH05DL-01-01-01 ZH07DS-01-01-01 ZH07DL-01-01-01 ZH10DS-01-01-01 ZH10DL-01-01-01 ZH13DS-01-02-02 ZH13DL-01-

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting P = 16 41 23 C10 [1(P) SUP port] C10: 10 One-touch fitting Formula L1 = 16n + 36.5 L2 = 16n + 186 (In case of 1 pc.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting P = 16 41 23 C10 [1(P) SUP port] C10: 10 One-touch fitting Formula L1 = 16n + 36.5 L2 = 16n + 186 (In case of 1 pc.

SYJA3000

Refer to p.0-33 to 0-36 for Safety Instructions and common precautions. 0.2 SS5YJA3-41-03-M51 pc. SYJA3140 1 pc. SYJA3240 1 pc.

Table of Contents

0.36 4.7 18 0.40 5.0 20 0.28 5.2 23 0.32 6.2 23 0.27 5.8 25 0.21 6.2 16 0.37 4.6 18 0.41 5.1 20 0.27 5.2 23 0.32 6.1 23 0.26 5.8 25 0.20 6.1 15 0.38 4.1 16 0.31 4.3 17 18 0.31 0.28 4.6 4.7 20 21 0.33 0.30 5.4 5.4 14 0.38 3.6 17 [16] 0.39 [0.35] 4.8 [4.3] 17 0.29 4.6 18 0.29 4.6 21 [18] 23 [20] 0.31 [0.34] 5.6 [5.0] 0.27 [0.33] 5.9 [5.2] 16 [9.4] 0.39 [0.40] 4.2 [2.6] 17 0.36 4.5 20 0.31

VQZ1000/2000/3000

seal) (Lead wire length) 23.5 mounting hole 47.5 5.5 (M5: 6) 5.5 (M5: 6) 22.2 mounting hole VQC 0.8 4 SQ 8.6 17 10 24 SMC SMC 2 R2 25.8 Cover diameter 1.6 Cross section 0.34 mm2 VQ0 2-C3, C4, C6, M5 16.6 23.6 60.3 C3: One-touch fitting for 3.2 VQ4 C4: One-touch fitting for 4 Manual override C6: One-touch fitting for 6 M5 : M5 thread VQ5 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

Series SV

12 248 237.5 224.3 12 13 260.5 250 234.8 13 14 273 262.5 245.3 14 15 285.5 275 255.8 15 16 298 287.5 266.3 16 17 310.5 300 276.8 17 18 310.5 300 287.3 11.5 L1 L2 L3 L4 47 47 Series SV Circular Connector Dimensions: Series SV2000 for Circular Connector 1in = 25.4mm U D B Cassette base manifold: SS5V2-W16CDStations (S, R, RS) C4, N3 C6, N7 C8, N9 When P, E port outlets are indicated on

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

1/8 1/8 M5 x 0.8 Base mounted for internal pilot Type SS3YJ5-41-M5 SYJ54 1/8 Type SS3YJ5-41-01 Type SS3YJ5-41-C4 Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5 M5 x 0.8 1/8 SYJ54R Type SS3YJ5-41R-01 Type SS3YJ5-41R-C4 C4

Modular F.R.L. Units

1/4 Width across flats 17 1/4 Width across flats 17 1/4 Standard specifications Model P1 P2 A B C E F G J K Bracket mount M N Q1 Q2 R S U V AC20C-B 1/8, 1/4 1/8 126.4 87.6 26.5 41.6 40 28.5 2 1 30 43.2 24 33 5.5 12 3.5 29 AC25C-B 1/4, 3/8 1/8 167.4 115.1 28 30 55.1 50 27.5 0 41 57.2 35 7 14 4 41 AC30C-B 1/4, 3/8 1/8 167.4 115.1 30.7 30 55.1 50 29.4 3.5 41 57.2 35 7 14 4 41 AC40C-B 1/4

VZ100/300/500

Manifold base VV3Z5-20 VV3Z5-21(R) VV3Z5-40 VV3Z5-41(R) Applicable base Sub-plate VV3Z5-40-2 VV3Z5-41-2 VV3Z5-41-1 VV3Z5-41R-2 VV3Z5-41R-1 DXT201-15-6A Applicable base VV3Z5-20-1 VV3Z5-21-1 VV3Z5-21R-1 Manifold base Manifold base DXT201-15-4A Note) Only in the case of assembled with manifold base at the time of shipment.

SV

L Dimension n: Stations L n 2 148 137.5 119.3 14.5 3 160.5 150 129.8 15.5 4 173 162.5 140.3 16.5 5 185.5 175 150.8 17.5 6 185.5 175 161.3 12 7 198 187.5 171.8 13 8 210.5 200 182.3 14 9 223 212.5 192.8 15 10 235.5 225 203.3 16 11 248 237.5 213.8 17 12 248 237.5 224.3 12 13 260.5 250 234.8 13 14 273 262.5 245.3 14 15 285.5 275 255.8 15 16 298 287.5 266.3 16 17 310.5 300 276.8 17 18 310.5 300

0.4

, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting P = 16 41 23 C10 [1(P) SUP port] C10: 10 One-touch fitting 2 L n Dimensions Formula L1 = 16n + 53, L2 = 16n + 73 n: Station (Maximum 24 stations) 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 L1 L2 (L3) (L4) 85 101 117 133 149 165 181 197 213 229 245 261 277 293 309 325 341 357

High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

3 Port Solenoid Valve Series SYJ300/500/700

C4 Type SS3YJ3-S42-M5 Type SS3YJ3-S42-C4 M5 x 0.8 C4 SYJ34 1/8 Body ported for external pilot Type SS3YJ3-20R 0.9 SYJ32R 1/8 M3 x 0.5 Type SS3YJ3-42R-M5 Type SS3YJ3-42R-C4 Type SS3YJ3-S42R-M5 Type SS3YJ3-S42R-C4 0.17 0.36 0.30 0.17 0.31 0.33 0.32 0.35 0.075 0.086 0.079 0.082 0.32 0.33 0.33 0.35 0.11 0.20 0.35 0.26 0.072 0.082 0.086 0.086 M5 x 0.8 C4 SYJ34R 1/8 Base mounted for external

smcmaintenancepartslist

6 17 !8 19 Rod seal NBR Component part numbers: !4, !5, !6, !8. Cushion seal Urethane 17 and 19 are non-replaceable parts, so they are not included in the seal kit. Piston seal NBR Seal kit includes a grease pack (40 g). Order with the following part number when only the grease pack is needed.