Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

Manual override (Non-locking) 67 25.5 4-Rc (PT)1/8 25.5 C4: MAX. 5 C6: MAX. 6 (Lead wire length) C4: MAX. 5 C6: MAX. 6 (P/R port) 300 55.5[62] 66.6 [73.1] 43.1 49 25.5 36.5 300 8.5 (Lead wire length) A A 43.1 (Pitch) n-M5 X 0.8 P=16 14.5 (A port) [ ] for AC Other dimensions are the same as the grommet

V

S I D E P O R T E D D I M E N S I O N S M A N I F O L D T Y P E 41 S I D E P O R T E D G R O M M E T T Y P E (N)VV3Z5 41 01T 1 N U M B E R O F S TAT I O N S 02 2 stations to 20 20 stations S I Z E O F A, B P O R T 01T 1/8 NPTF B7T One Touch Fitting 1/4 B9T One Touch Fitting 5/16 ACCESSORIES M A N I F O L D T Y P E 41 S I D E P O R T E D DXT201-15-1A Blanking Plate Pit Stations (n) 2 3 4

SQ1000/2000

The maximum number of stations is 10 (16 optional). Configuration Maximum number of stations Series Port position Port size P, R A, B C10 C4, C6, C8 10 stations (16 stations optional) SQ2000 Side, Top D side U side 1 2 3 . stations 2-G3/4" Electrical entry Valves are numbered from the D side.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

1/8 1/8 M5 x 0.8 1/8 Type 10-SS3YJ5-41-M5 10-SYJ54M Type 10-SS3YJ5-41-01 Type 10-SS3YJ5-41-C4 Type 10-SS3YJ5-41-C6 C6 1/8 Note) The values are for individually operated 2 position type manifold bases.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

1 D side Stations U side C10 [3(R) EXH port] C10: 10 One-touch fitting Flat ribbon cable connector assembly (26P) AXT100-FC26-1: 1.5 m AXT100-FC26-2: 3 m AXT100-FC26-3: 5 m DIN rail clamp screw EXH R EXH R B B B B B B B B P X X P 49 31.6 24.5 9.5 16 A A A A A A A A (7.5) (12) C4, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting P = 16 41 23

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

1 D side Stations U side C10 [3(R) EXH port] C10: 10 One-touch fitting Flat ribbon cable connector assembly (26P) AXT100-FC26-1: 1.5 m AXT100-FC26-2: 3 m AXT100-FC26-3: 5 m DIN rail clamp screw EXH R EXH R B B B B B B B B P X X P 49 31.6 24.5 9.5 16 A A A A A A A A (7.5) (12) C4, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting P = 16 41 23

Compact 5-Port Solenoid Valve

COM. 41 Red Red COM.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

02 16 stations y SUP/EXH block assembly 2 stations Symbol Communication connector Number of outputs Specified layout Note 2) (Available up to 32 solenoids) Protocol Nil R Internal pilot External pilot 20 0 QA QB NA NB NC ND VA VB DA DB FA FB EA EB 20 stations Without SI unit 32 16 32 16 32 16 32 16 32 16 32 16 32 16 For 16-output SI unit DeviceNet M12 i Mounting Symbol 02 Stations Note 2

VQZ1000/2000/3000

L2 L3 L4 2-7-50 Base Mounted 51 51 Series VQZ1000/2000/3000 Plug Lead Unit: Manifold VQZ2000 VV5QZ25Stations Port size C Grommet (G) 36.5 (12) (35) (5.5) 44.5 mounting hole DIN rail clamp screw 33 (7.5) 2n-C4, C6, C8 C4: One-touch fitting for 4 15 7.7 (2) C8: One-touch fitting for 8 C6: One-touch fitting for 6 U side n A 4 B 2 VQC Manual override 5 4 SQ P = 16 23.9 P = 16 (L4) (L3) L1 L2

Table of Contents

Model A B C D E Y Y B C D A E Flat Model ZPY10D--A10 10 12 15 25 41 6 Flat with ribs U C ZPY16D--A10 ZPY10 -A10 16 18 16 26 42 7 15 12 22 1.7 10 12 1.8 3 38 ZPY13 -A10 U C 13 Dimensions by Stroke ZPY16 -A10 U C 38.5 16 18 12.5 22.5 1.2 3.5 10 16 H Model Dimensions by Stroke F G F G 10, 13 16 ZPYD10--A10 52 23 86 53 87 H Model F G F G ZPYD20--A10 62 124 63 125 51 U C U C U C U C U C ZPYD30

Table of Contents

1 D side VS4 16 stations 16 Max. 16 stations.

Series SV

Flat Ribbon Cable 1in = 25.4mm C3, N1 C4, N3 C6, N7 Stations Cassette base manifold: SS5V1-16 D (S, R, RS) P PG PH U D B 1 2 When P, E port outlets are indicated on the U side or D side, the P, E ports on the opposite side are plugged.

VZ100/300/500

Manifold base VV3Z5-20 VV3Z5-21(R) VV3Z5-40 VV3Z5-41(R) Applicable base Sub-plate VV3Z5-40-2 VV3Z5-41-2 VV3Z5-41-1 VV3Z5-41R-2 VV3Z5-41R-1 DXT201-15-6A Applicable base VV3Z5-20-1 VV3Z5-21-1 VV3Z5-21R-1 Manifold base Manifold base DXT201-15-4A Note) Only in the case of assembled with manifold base at the time of shipment.

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

1/8 1/8 M5 x 0.8 Base mounted for internal pilot Type SS3YJ5-41-M5 SYJ54 1/8 Type SS3YJ5-41-01 Type SS3YJ5-41-C4 Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5 M5 x 0.8 1/8 SYJ54R Type SS3YJ5-41R-01 Type SS3YJ5-41R-C4 C4

0.4

fitting DIN rail clamp screw R EXH EXH R B B B B B B B B X P X P 49 31.6 24.5 9.5 16 A A A A A A A A (7.5) (12) C4, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting P = 16 41 23 C10 [1(P) SUP port] C10: 10 One-touch fitting 2 L n Dimensions Formula L1 = 16n + 53, L2 = 16n + 73 n: Station (Maximum 24 stations) 3 4 5 6 7 8 9 10 11 12 13 14 15

Modular F.R.L. Units

*16 *16 *16 *16 *16 *16 *16 *8 The only difference from the standard specifications is the adjusting spring for the regulator.

SV

to 16 solenoids possible.)

High Vacuum Angle Valve

C B L (mm) Grommet (G) A B C D E F G J K L M Model XLS-16-G XLS-16-C XLS-16-D XLS-16-T XLS-25-G XLS-25-C XLS-25-D XLS-25-T XLS-16-PG XLS-25-PG 104 25.5 113 41 40 38 30 35 17 23 Cabtire cable VCTF2 x 0.75, O.D.: 2.3 mm, Sheath O.D.: 6.6 mm 96 60 48 129 95 62 28 128.5 121.5 138.5 43 50 48 40 40 26 25.5 63 51 120.5 121.5 154.5 97 66 40 38 30 35 17 23 96 113 87 66.5 50 48 40 40 26

3 Port Solenoid Valve Series SYJ300/500/700

C4 Type SS3YJ3-S42-M5 Type SS3YJ3-S42-C4 M5 x 0.8 C4 SYJ34 1/8 Body ported for external pilot Type SS3YJ3-20R 0.9 SYJ32R 1/8 M3 x 0.5 Type SS3YJ3-42R-M5 Type SS3YJ3-42R-C4 Type SS3YJ3-S42R-M5 Type SS3YJ3-S42R-C4 0.17 0.36 0.30 0.17 0.31 0.33 0.32 0.35 0.075 0.086 0.079 0.082 0.32 0.33 0.33 0.35 0.11 0.20 0.35 0.26 0.072 0.082 0.086 0.086 M5 x 0.8 C4 SYJ34R 1/8 Base mounted for external

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VQZ115-M VQ110-L 4-14-41