Vacuum System Peripherals:

(When port sizes for A, B ports are mixed, indicate C4 or C6 in cell .)

5-Port Solenoid Valve

p. 141 p. 133 p. 149 p. 41 p. 41 p. 59 p. 67 p. 77 p. 87 p. 97 p. 113 p. 103 p. 125 p. 124-1 p. 156-1 SY7 0 Type 11 SY5 0 Manifold Top ported Bottom ported Top ported From p. 41 p. 141 p. 133 p. 124-1 p. 156-1 p. 149 p. 41 p. 41 p. 59 p. 67 p. 77 p. 87 p. 97 p. 103 p. 113 p. 125 SY7 0 SY3 3 Type 12 SY5 3 From p. 53 p. 124-5 p. 156-7 p. 111 p. 131 p. 139 p. 147 p. 155 p. 64 p. 53 p.

0.4

, C6, C8 [4(A), 2(B) port] C4: 4 one-touch fitting C6: 6 one-touch fitting C8: 8 one-touch fitting P = 16 41 23 C10 [1(P) SUP port] C10: 10 one-touch fitting Formula L1 = 16n + 36.5 L2 = 16n + 186 (In case of 1 pc.

VZ3000

(Example) VV5Z3-20P-07. 1 pc. (Manifold base) VZ3123-5MOZ-C4. 3 pcs. (Valve) VZ3223-5MOZ-C4. 3 pcs. (Valve) DXT192-13-3A. 1 pc. (Blanking plate assembly) DXT192-52-1-4A. 3 pcs. (Connector assembly) DXT192-52-2-4A. 3 pcs. (Connector assembly) The asterisk denotes the symbol for assembly.

Manifold Specifications

(Example) VV5Z3-20P-07. 1 pc. (Manifold base) VZ3123-5MOZ-C4. 3 pcs. (Valve) VZ3223-5MOZ-C4. 3 pcs. (Valve) DXT192-13-3A. 1 pc. (Blanking plate assembly) DXT192-52-1-4A. 3 pcs. (Connector assembly) DXT192-52-2-4A. 3 pcs. (Connector assembly) The asterisk denotes the symbol for assembly.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting P = 16 41 23 C10 [1(P) SUP port] C10: 10 One-touch fitting Formula L1 = 16n + 36.5 L2 = 16n + 186 (In case of 1 pc.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting P = 16 41 23 C10 [1(P) SUP port] C10: 10 One-touch fitting Formula L1 = 16n + 36.5 L2 = 16n + 186 (In case of 1 pc.

Compact 5-Port Solenoid Valve

COM. 41 Red Red COM.

4/5 Port Air Operated Valve Series SYJA3000 1

(A) 4 (A) 4 (B) 2 (B) 2 (Example) SS5YJA7-41-03-01 1 pc. SYJA7140 1 pc. SYJA7240 1 pc. SYJ7000-21-1A 1 pc. 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 position exhaust center 3 position closed center (A) 4 (A) 4 (B) 2 (B) 2 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) The asterisk denotes the symbol for assembly.

0.4

Note) Based on JIS B 8375-1981 (Supply pressure: 0.5 MPa) Dimensions Single unit Manifold 2n x C4, C6 C4: 4 one-touch fitting C6: 6 one-touch fitting 2 x C4, C6 C4: 4 one-touch fitting C6: 6 one-touch fitting M3 mounting hole P = 11 M2.5 mounting hole Residual pressure release manual override DIN rail clamp screw Residual pressure release manual override Stations 1 2 3 n D side U side

Compact Manifold Regulator Series ARM5

ARM10-07 (One-touch fittings: IN 6, OUT 4) ARM10F-07-1 ARM10-07-1 (One-touch fittings: IN 6, OUT 4) Condition: Inlet pressure 0.5 MPa Condition: Inlet pressure 0.7 MPa 0.35 0.7 0.6 0.30 Outlet pressure (MPa) Outlet pressure (MPa) 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0.0 0.00 0 50 100 150 0 20 40 60 80 100 Flow rate l/min (ANR) Flow rate l/min (ANR) ARM10F-08 ARM10-08 (One-touch fittings

0.4

Note) Based on JIS B 8375-1981 (Supply pressure: 0.5 MPa) To CYL port VP4 VQ 1/2 VQ 1/2 Dimensions VQ 4/5 Single unit Manifold VQC 1/2 2n x C4, C6 C4: 4 One-touch fitting C6: 6 One-touch fitting 2 x C4, C6 C4: 4 One-touch fitting C6: 6 One-touch fitting VQC 4/5 VQZ M3 mounting hole M2.5 mounting hole SQ VFS VFR VQ7 Residual pressure release manual override DIN rail clamp screw Residual

smcmaintenancepartslist

Contents Bore size (mm) 40 50 63 80 100 MB40-PS MB50-PS MB63-PS MB80-PS MB100-PS #9 $0 41 Piston seal NBR Rod seal A NBR Set of left nos. #9, $0, $3, $5 Rod seal B NBR 42 $3 44 $5 46 Release piston seal NBR 41, 42, 44 and 46 to 49 are non-replaceable parts, so they are not included in the seal kit.

ARM10/11

/min(ANR) ARM10F-07 ARM10-07 (One-touch fittings: IN 6, OUT 4) ARM10F-07-1 ARM10-07-1 (One-touch fittings: IN 6, OUT 4) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Condition: Inlet pressure 0.7MPa Condition: Inlet pressure 0.5MPa 0.30 0.35 0.7 0.6 Outlet pressure

ARM10/11

/min(ANR) ARM10F-07 ARM10-07 (One-touch fittings: IN 6, OUT 4) ARM10F-07-1 ARM10-07-1 (One-touch fittings: IN 6, OUT 4) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Condition: Inlet pressure 0.7MPa Condition: Inlet pressure 0.5MPa 0.30 0.35 0.7 0.6 Outlet pressure

Proposals for Energy Saving

Box Type (with Built-in Silencer) B S 07 ZH 06 06 Body Ported Type (without Silencer) D S 07 ZH 01 01 01 EXH port size Note) Nozzle diameter Symbol Size Type One-touch One-touch One-touch One-touch One-touch Threaded Threaded Threaded Threaded 05 07 0.5mm 0.7mm 6 8 10 12 16 06 08 10 12 16 01 02 03 04 10 1.0mm 13 1.3mm 15 1.5mm 18 1.8mm Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 20 2.0mm Maximum

5 Port Solenoid Valve Series SV1000/2000/3000/4000

C4: 4 (SMC) N3: 5/32" (SMC) One-touch fitting [X: External pilot port] Applicable tube O.D. C4: 4 (SMC) N3: 5/32" (SMC) (9.5) (43.9) One-touch fitting [1(P), 3/5(E) port] Applicable tube O.D.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

C4: 4 (SMC) N3: 5/32" (SMC) One-touch fitting [X: External pilot port] Applicable tubing O.D. C4: 4 (SMC) N3: 5/32" (SMC) (9.5) (43.9) One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.

Table of Contents

Passage Porting specifications Symbol 4(A), 2(B) Side 5(R1), 3(R2) 1(P) Common Common 1 Non Plug-in Type: Stacking Type Manifold Base Wiring for every valve VV5ZS2 C4 06 51 1 Thread type Series VZS2000 Manifold Standard Nil NPT Rc N T F Non plug-in type Stacking type manifold base NPTF G Option Port size Rc 1 8 01 Embedded type One-touch fitting Applicable tubing O.D.: 4 Stations C4 02 2

Series SV

For "M" (mixed ports), indicate the port size, such as C3 or C4, instead of a "" in the a section of the station table.