2

AS-FS 7.2 5 AS12l1FG-U10/32-01A AS12l1FG-M5-03A 5/32" 8.2 AS12l1FG-U10/32-03A AS12l1FG-M5-07A 1/4" 11.2 18.6 23.1 16.5 6 AS12l1FG-U10/32-07A 17.2 21.7 16.9 M5 x 0.8 10/32UNF 8 9.4 26.5 25.4 23.5 22.4 13.3 Note 1) Reference dimensions Note 2) Reference dimensions of threads after installation INDEX 478 Series AS-FG For M5, 10-32UNF Dimensions/ Universal type Seal method: Gasket seal For M5

Table of Contents

25.5 33 26 32 32.5 32 34 36 37.5 37 39 41 42 43 44.5 46.5 46.5 48 50 4 9 4 9 10 8 10 19 32 11 19 32 25 25 32 58 27 35 61 15 22.5 14.5 20.5 20.5 18 20.5 24.5 26.5 22 26 28 24 27 29 33 27.5 29.5 33.5 2.3 2.5 2.3 2.8 3.6 2.3 15.5 15.5 8 10 8 10 10 16.5 16.5 9.6 1 8 1 8 10-32 UNF 5 32 10.4 16 17 1 8 3 16 1 8 11.4 16.5 18 10-32 UNF 11.11 Connection thread 1 8 K 1 4 13.2 17 10 19 1 4 14.29

CATALOG

Bore size A B C DA DB E F G GA GB H J K L MM ML NN P PW 12 39 39 29 6 8 0 8 29 11 7.5 58 16 13 18 M4 x 0.7 10 M4 x 0.7 M5 7 16 43 43 33 8 10 0 8 33 11 8 64 18 15 22 M5 x 0.8 13 M5 x 0.8 M5 5 20 47 47 37 10 12 0 8 36 10.5 8.5 74 19 17 26 M5 x 0.8 13 M5 x 0.8 1/8 7 S L I D E B E A R I N G 25 47.5 47.5 37.5 12 16 0 8 42 11.5 9 88 21 21 32 M6 x 1.0 15 M6 x 1.0 1/8 8 32 71.5 47.5 37.5 16 20 24

Table of Contents

(Except D-P5DW) Cylinder stroke (mm) Bore size Refer to Standard Stroke on page 8-19-9. 40 50 63 80 100 12 16 20 25 32 40 mm 50 mm 63 mm 80 mm 100 mm 12 mm 16 mm 20 mm 25 mm 32 mm Thread type M5 x 0.8 Rc NPT G N TF Nil For bore sizes 12 and 16, M5 x 0.8 is only available. Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

Compact Cylinder

1.0 52 10 10 5 5.5 15 M5 x 0.8 5 to 50 0.043 M5 x 0.8 5 53.5 39.5 32 34 12.5 M8 x 1.25 21.5 49.5 13 16 45 2 4.5 14 14 7 14 0 0.052 5.5 21 10 to 50 1/8 63.5 49.5 75, 100 For details about the rod end nut and accessory brackets, refer to page 19.

5-Port Solenoid Valve

Port size M5 One-touch fitting (Replaceable) Port size 01 D-sub, Flat Ribbon EX510 Manifold Exploded View 32 32 32 ( ) C6: 12.8 N7: 16.6 Fitting, Plug Part Nos.

Table of Contents

NBR (50), Conductive silicon rubber (50) Durometer Weight/Male Thread (Female thread) (g) Pad form Flat Flat with ribs Deep Bellows Connection M5 M6 M8 M5 M6 M8 M5 M6 M8 M5 M6 M8 Model ZPY02 to 08 2004 3507 4010 10 to 16 (Thin section series) 15 (11) except 2, 4 15 (11) except 2, 4 15 (11) 15 33 (26) 31 (27) ZPY10 33 (25) 32 (25) 33 (25) 32 (25) 33 (25) 33 () (25) ZPY13 38 (27) 32 (27

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x 0.8 83 25 CC Up to 400 22 19.5 17 8 M5 x 0.8 9.5 18.5 10 17 3 18 12 40 6 33 M5 x 0.8 depth 8 5.5 8 3.5 M10 x 1.25 29 M5 x 0.8 83 32 Up to 450 22 19.5 17 8 M5 x 0.8 9.5 20 12 19 3 18 12 40 6 38 M5 x 0.8 depth 8 5.5 10 3.5 M10 x 1.25 35.5 Rc 1/8 85 40 RB Up to 800 30 27 19 10 M6 x 1.0 12 26 16 23 3 19 13 50 8 47 M6 x 1.0 depth 12 6 14 4 M14 x 1.5 44 Rc 1/8 93 50 Up to 1200 35 32 27 13 M8

5 Port Solenoid Valve Series SY3000/5000/7000/9000

" 6, 1/4" 69.4 [71.6] (35) (27) (3.2) (For mounting) 2 x 3.2 (Light/surge voltage suppressor) C6:33.6 N7:37.4 7.5 (3.2) N7: 37.4 C6: 33.6 (35.5) (32) + 25 18.5 10 0.8 16.9 13.1 SY3120-M5(-F2) G H 22.5 28.5 [35.5] A, B port M5 x 0.8 28.5 [35.5] 2 23.5 25 18.5 P 16.9 (15) EA EB M5 x 0.8 (P, EA, EB port) For manifold gasket positioning 2 x 1.5 die-cast hole 19 22.5 L plug connector (L): SY3120

Table of Contents

-04 AS121F-M5-03 5/32" M5 x 0.8 M5 x 0.8 8 17.3 22.2 7 9.3 22.1 9.6 4 25 25.8 22.1 28.6 9.3 17.3 AS121F-U10/32-04 AS121F-U10/32-03 5/32" 10-32UNF 10-32UNF AS121F-M5-06 AS121F-M5-05 3/16" M5 x 0.8 M5 x 0.8 11.4 21.3 26.1 7 16.5 13.5 11.7 22.9 11.6 18.1 6 AS121F-U10/32-06 AS121F-U10/32-05 3/16" 10-32UNF 10-32UNF 8 11.7 28.6 25.8 22.2 25 9.6 AS221F-01-23 AS2 1F-M5-07 20.4 16 9.3 27.5 3.2 1/4

NCQ2/CQ2

8 43 34 9.5 M5 x 0.8 7 10 #10-32UNF 4.5 13 0 0.043 M5 x 0.8 M5 x 0.8 25 5 to 50 19 5.5 28 40 2 10 52 10 10 1/4-28UNF 47 37 11 5 12 12 M6 x 1.0 15 0 0.043 M5 x 0.8 M5 x 0.8 5 M5 x 0.8 M5 x 0.8 13.3 5/16-24UNF 39.5 53.5 32 10 to 50 21.5 34 5.5 45 2 4.5 60 14 14 12.5 13 16 M8 x 1.25 7 14 49.5 21 NPT 1/8 0 0.052 RC 1/8 Note 1) 63.5 49.5 75, 100 For details about the rod end nut and accessory

V100

M5 x 0.8 1(P) port M5 x 0.8 3(R) port R 3 P 1 10.7 9 M5 X 0.8 external pilot port 32 (Only external pilot type (R)) For the One-touch fittings for P/R port and silencer model no., refer to page 4-14-3.

ZP

(mm) Vacuum entry (Female thread) Vertical Vacuum entry direction M8 x 1.25 M5 x 0.8 Rc 1/8 Connection/Vacuum entry Connection 10 Female thread 10 to 16 17 14 19 M5 x 0.8 20 to 32 10 to 16 47 46 M5 x 0.8 40, 50 M8 x 1.25 20 to 32 Pad dia.

One-touch Fittings

KQ2 Series Model Applicable tubing Connection thread Part number 3.2 M3 x 0.5 KQ2H23-M3G1 3.2 M5 x 0.8 KQ2H23-M51 4 M3 x 0.5 KQ2H04-M3G1 4 M5 x 0.8 KQ2H04-M51 4 M6 x 1.0 KQ2H04-M61 6 M5 x 0.8 KQ2H06-M51 6 M6 x 1.0 KQ2H06-M61 6 R1/8 KQ2H06-01S1 1/8 10-32UNF KQ2H01-321 5/32 10-32UNF KQ2H03-321 3/16 10-32UNF KQ2H05-321 5/32 NPT1/16 KQ2H03-33S1 1/8 M5 x 0.8 KQ2H01-M51 3/16 M5 x 0.8 KQ2H05-M51

KJ

(mm) (2) Connection thread R <M5> <M5> D1 (1) A Weight (g) L1 L2 M L1 D2 Model Applicable tubing Nylon Urethane KQ2W23-M5 30 8 31 10 M5 x 0.8 8 9.6 37 43 10 17.5 15.5 38 42 19 2.8 2.4 41 D1 D1 1 8 KQ2W23-01S KQ2W23-02S 10 14 3.2 1 4 D2 KQ2W04-M5 KQ2W04-01S 8 32 38.5 18 30 37.5 M5 x 0.8 11 3.0 3.0 8 10.4 L2 1 8 16 4 23 14 10 10 4.0 4.0 1 4 KQ2W04-02S 43.5 42.5 38 11 26 KQ2W06-M5 KQ2W06-01S

Air Fittings & Tubing

D L M Effective area (mm2) Weight (g) <M5, M6> <M5, M6> A Nylon Urethane 3 2.5 12.7 M5 X 0.8 2.1 9 16 2.4 2.5 9 16 3.3 3.4 16 14 27 21 19 26 19 30 30 53 42 34 51 61 47 7 7 16.7 22 19.5 17 18 22 19.5 17.8 19 22.5 23 22 28 26.5 22 30 33.5 29 27 34.5 13.6 18 13.5 KQ2H23-M5 KQ2H23-01S KQ2H23-02S KQ2H04-M5 KQ2H04-M6 KQ2H04-01S KQ2H04-02S KQ2H06-M5 KQ2H06-M6 KQ2H06-01S KQ2H06-02S KQ2H06-03S KQ2H08

Table of Contents

(mm) WC 20 24 32 42 52 BF VA 4H9 4H9 5H9 6H9 6H9 UC M5 x 0.8 M5 x 0.8 M6 x 1 M8 x 1.25 M8 x 1.25 ZD 6 10 12 16 20 VB 4 4 5 6 6 BG UE 5.5 5.5 6.6 8.6 8.6 AJ 9 9 11 13 13 UD 10 10 12 16 16 AG 19 22 35 AH 9 12 15 18 20 FX 22 26 32 40 50 AF 18 21 30 35 48 BE 48 58 68 WD 1.5 1.5 1.5 2 2 ZG 15 16 18 22 26 ZF 20 21 28 32 41 ZE 5 8 10 14 17 Model MHSH3-32DB MHSH3-40DB MHSH3-50DB MHSH3-63DB MHSH3

KQ2

(mm) Model Connection thread L1 M5 x 0.8 KQ2ZF04-M5 19.5 9.8 21 11 20 16.5 M5 x 0.8 8 21 21 47 32 49 54 4 16 10.4 1 8 1 8 1 4 1 8 1 4 1 4 3 8 3 8 1 2 KQ2ZF04-01S 13.4 14.6 28.6 25.5 14 KQ2ZF06-01S 14.6 28.6 25.5 35 27 35 35 39 39 42 13.4 22 14 6 12.8 17 12.8 KQ2ZF06-02S 21.5 40.5 20.6 25.5 19 D1 L3 L2 KQ2ZF08-01S 16.1 30.1 17 17.6 25.5 8 15.2 15.2 18.5 KQ2ZF08-02S 21.5 40.5 19 19 22 22

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

E E1 E2 F H K L M N I W O 5 st 25.5 27 29 32.5 10 st 30.5 32 34 37.5 5 st 22 23.5 24.5 27.5 10 st 27 28.5 29.5 32.5 6 8 7 12 6 8 10 12 23 26 30 33 13 15 17 19.5 14 17 19 22 7 8.5 10.5 12 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 5 6 8 10 3.5 3.5 4.5 5 22 28 36 40 3.5 3.5 5.5 5.5 32 38 47 52 27 32 36 41.5 6.5 depth 3.5 6.5 depth 3.5 9 depth 7 9 depth 7 32 to 50 H thread effective depth C Plug 4

AS

7 12.7 12.3 28.6 25.8 25 22.2 9.6 8 AS121F-M5-23 AS121F-M5-03 5/32" M5 x 0.8 M5 x 0.8 3.2 9.3 22.1 17.3 8.4 22.1 17.3 AS121F-U10/32-23 AS121F-U10/32-03 10-32UNF 5/32" 10-32UNF 12.7 12.3 AS121F-M5-04 AS121F-M5-05 M5 x 0.8 M5 x 0.8 3/16" 4 7 16.5 7 8 11.4 21.3 26.1 9.3 22.2 9.6 25 25.8 28.6 22.1 17.3 AS121F-U10/32-04 AS121F-U10/32-05 10-32UNF 3/16" 10-32UNF 11.7 28.6 25.8 25 22.2 9.6 8 AS121F-M5