Table of Contents head set screw) M8 x 1.25 x 7.5l (Bolt holder) CX 0.5 D-X 25 0.2 25 0.2 5.3 5.3 16 32 31 20Data 2-M3 x 0.5 through 3.4 through 6.5 counterbore with depth 5 (Opposite side: Same) 5.5 2-M3 x 0.5 through M2.5 x 0.45 x 6l (Hexagon socket head cap screw) M3 x 0.5 x 12.5l (Hexagon head bolt) M3 x 0.5 (Hexagon nut) (12) (5 + Stroke) 2.75 2-M3 x 0.5 through 25 0.2 4 8-28-23 23 Series CXSJ Dimensions
D(mm) 20BF VA 4H9 4H9 5H9 6H9 6H9 ZD 6 10 12 16 20 ZH M3 x 0.5 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 UC M5 x 0.8 M5 x 0.8 M6 x 1 M8 x 1.25 M8 x 1.25 ZJ 3.5 4.5 5 7 8 ZI ZG 9 10 11 14 16 ZF 14 15 21 24 31 ZE 5 8 10 14 17 BG VB 4 4 5 6 6 AJ 9 9 11 13 13 UD 10 10 12 16 16 AH 9 12 15 18 20 FX 22 26 32 40 50 AG 26 27 33 35 45 BE 30 38 48 58 68 AF 35 36 44 48 58 CC 9.5 13.5 17.5 20 25 Model MHSHJ3
Inlet 5 3 2 14 2 3 14 3 2 7 M3 x 0.5 7 M3 x 0.5 3 3 3 M3 x 0.5 14 Vertical 3 3 3 7 0.3 With Buffer: Vacuum Inlet 0.3 0.3 0.8 0.8 0.8 2 3.5 1.5 Lateral 2.5 4 2 With Adapter: Vacuum Inlet 5 5 5 5 5 Lateral Vacuum Inlet Dimensions With Buffer: Vacuum Inlet Construction Adapter Applicable Pad List ZP3-Y015U;-B3-U4 ZP3-Y02U;-B3-U4 ZP3-Y035U;-B3-U4 ZP3-Y015U;-B3-U2 ZP3-Y02U;-B3-U2 ZP3-Y035U;-B3
Port size ASV Model M3 x 0.5 ASV120F-M3 0.3 0.3 AK M5 x 0.8 ASV220F-M5 1.3 1.3 R 1/8 ASV310F-01 8 7 ASS R 1/4 ASV310F-02 8 7 R 1/8 ASV410F-01 14 13.5 ASR R 1/4 ASV410F-02 14 13.5 R 3/8 ASV410F-03 14 13.5 ASF R 1/4 ASV510F-02 27 23 R 3/8 ASV510F-03 29 27 R 1/2 ASV510F-04 29 27 10-32 UNF ASV220F-U10/32 1.3 1.3 NPT 1/8 ASV310F-N01 8 7 NPT 1/4 ASV310F-N02 8 7 NPT 1/8 ASV410F-N01 14 13.5 NPT 1
A 10 12 16 20 22 28 38 44 10 6 8 8.5 10.5 14 18 21 21 16 25 25 30 30 40 50 55 M5 x 0.8 M6 x 1 M8 x 1.25 6.3 8.1 10.3 12.8 12 16 21 24 7 14 11.5 14 14 20 27 31 21.5 6 16 21 25 30 30 40 50 55 M5 x 0.8 M6 x 1 M8 x 1.25 6.3 7 14.6 21.5 32 34 41 42 56 71 79 10 I-G012 I-Z015A I-G02 I-G03 I-G04 I-G05 I-G08 I-G10 Y-G012 Y-Z015A Y-G02 Y-G03 Y-G04 Y-G05 Y-G08 Y-G10 5 5 8 10 10 14 18 22 +0.048 0 5 6.4
SY11 A 3 4 M3 x 0.5 M3 x 0.5 100 kPA to 0 0.22 100 kPA to 0.6 Large flow 0 to 0.7 N.C. SY13(A): 15 SY14(A): 26 (14) SY13(A): 13 SY14(A): 24 (12) (1) SY12 3 4 M3 x 0.5 M3 x 0.5 100 kPA to 0.6 0.14 100 kPA to 0 Standard 0 to 0.7 N.O. (1) SY12 A 3 4 M3 x 0.5 M3 x 0.5 100 kPA to 0.6 100 kPA to 0 0.22 Large flow 0 to 0.7 N.O.
D A A MXQ16B 57 31 17 30 16 13 MXQ20B 64 32 14 31 13 18 The MXQ6(A, B) is not available.
22 30 20 8 14 44 8 80 43.5 M12 X 1.75 18 28 38 27 10 18 56 10 100 43.5 M12 X 1.75 22 32 45 31 13 22 64 12 Refer to p.2.3-18 for rod nut and optional bracket.
13.3 14 12.4 4.5 7.3 1/4 KQ2Y07-35lS 14.29 11.1 10 16.5 23.1 16.5 35.2 13.3 14 12.4 4.5 16.9 3/8 KQ2Y07-36lS 17.46 11.1 10 16.5 24.5 16.5 36.3 13.3 14 12.4 4.5 29.2 1/4 D2 5/16 1/8 KQ2Y09-34lS 11.11 13.2 10 18.2 18.7 18.2 33.7 14.2 14 14 4.5 8.8 2 KQ2Y09-34QS 12.7 13.2 12 18.2 23.5 18.2 38.6 14.2 25.6 17.7 6 11.7 H 1/4 KQ2Y09-35lS 14.29 13.2 12 18.2 24.1 18.2 37.9 14.2 25.6 17.7 6 16 3/8
25 25 30 30 40 50 55 M5 x 0.8 M6 x 1 6.3 8.1 10.3 12.8 12 16 21 24 7 14 11.5 14 14 20 27 31 5 6.4 8 10 18 22 28 32 21.5 28 34 41 42 56 71 79 6 11 8.5 16 21 25 30 30 40 50 55 M5 x 0.8 M6 x 1 6.3 8.1 7 10 5 5 8 5 14.6 IY-G012 5 5 8 10 10 14 18 22 +0.048 0 +0.4 +0.2 l12 +0.048 0 12 6.5 8 10 18 22 28 32 IY-J015 16.6 +0.2 +0 +0.048 0 l16 +0.058 0 16 M8 x 1.25 M8 x 1.25 10.3 11.5 14 14 20 27 31
A 10 12 16 20 22 28 38 44 10 6 8 8.5 10.5 14 18 21 21 16 25 25 30 30 40 50 55 M5 x 0.8 M6 x 1 M8 x 1.25 6.3 8.1 10.3 12.8 12 16 21 24 7 14 11.5 14 14 20 27 31 21.5 6 16 21 25 30 30 40 50 55 M5 x 0.8 M6 x 1 M8 x 1.25 6.3 7 14.6 21.5 32 34 41 42 56 71 79 10 I-G012 I-Z015A I-G02 I-G03 I-G04 I-G05 I-G08 I-G10 Y-G012 Y-Z015A Y-G02 Y-G03 Y-G04 Y-G05 Y-G08 Y-G10 5 5 8 10 10 14 18 22 +0.048 0 5 6.4
Construction Refer to pages 14-19-30 to 31.
of graph MY1H/M3) = 38.7 (Nm) MY1B M3 = m3 x g x X = 6.525 x 9.8 x 138.5 x 103 = 8.86 (Nm) m3 M3 MY1M Load factor 3 = M3/M3 max = 8.86/38.7 = 0.23 MY1C 5.
Size: 10 31 2 x M3 x 0.5 through 2 x 3.5 through 25 Chamfer (Rotation range is stated on page 70.) 25 31 41 B port A port 29 9h9 0 0.036 17 4g70.004 0.016 0.5 2 x 3.5 through 9 14 31 29 1 3 10.6 7 16.5 9.5 2 x M3 x 0.5 1 18.5 35 19.8 67 2 15 When D-M9m is used *1.
x 0.35 x 19 M3 x 0.35 x 23 M3 x 0.35 x 24 M3 x 0.35 x 28 M3 x 0.35 x 68 M3 x 0.35 x 72 M3 x 0.35 x 73 M3 x 0.35 x 77 y u Components Ejector unit + Vacuum switch/Filter unit i o For nozzle size 10, 13, 15 M3 x 0.35 x 84 4 [For ZSE4 spec.]
Mount of single unit 24 or more 0 -0.4 31 31 x n pcs. + 3.5 x (n pcs. 1) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 31 0 -0.4 0 -0.4 31 Vertical stacking mount of multiple units (n pcs.) 0 0.4 31 24 or more 31 x n pcs. + 3.5 x (n pcs. 1) 16-3-40 9 Series PSE300
(mm) With rod boot Stroke range (mm) Bore size (mm) e CD J l B BB C F GA GB M NA NB P R S LH LT LW LX X Y Z SS f Q B-rod C-rod B-rod C-rod 32 34.5 15 M10 x 1.25 58 109 38 14 21 15 11 37 31 3/8 39 130 11 35 13 13 88 29 14 98 57 52 25 to 1400 40 23 15 M10 x 1.25 65 118 45 10 21 15 11 36 30 3/8 42 130 11 37.5 14 13 95 29 14 98 57 52 52 25 to 1400 1/3.5 stroke 50 28 15 M10 x 1.25 76 145 52
[mm] Bore size A B C D F FB FC FT FX FY FZ GB H MM NA NB NN 6 15 8 9 3 8 11 4.5 1.6 24 14 32 5 28 M3 x 0.5 3 9.5 M6 x 1.0 10 15 12 14 4 8 13 4.5 1.6 24 14 32 5 28 M4 x 0.7 4.8 9.5 M8 x 1.0 16 15 18.3 20 5 8 19 5.5 2.3 33 20 42 5 28 M5 x 0.8 4.8 9.5 M10 x 1.0 S Z 5 to 15 st 16 to 30 st 31 to 45 st 46 to 60 st 61 to 75 st 76 to 100 st 101 to 125 st 126 to 150 st 5 to 15 st 16 to 30 st 31 to
Overall manifold length Overall manifold length Approx. 29% reduction SY5000 manifold SY5000: 3 stations SY3000 manifold SY3000: 4 stations Mixed manifold SY5000: 3 stations, SY3000: 4 stations For serial transmission EX260 A B A B A B A B A B A B A B A B A B A 14 A B A 14 A B A 14 A B A 14 A B A 14 A B A 14 Installation space A 14 A 14 A 14 A 14 A 14 A 14 A 14 A 14 B 12 B 12 B 12 B 12 B