ZP

across flat 6 5 Width across flat 8 Width across flat 10 Width across flat 8 Width across flat 10 Vertical 2 2 2 2 3 13 A D B 3 13 A D B With Adapter: Vacuum Inlet 2 2 2 2 13 A D B B D A M6 x 0.75 M6 x 0.75 M3 x 0.5 7 0.3 M3 x 0.5 7 0.3 M8 x 0.75 M8 x 0.75 M3 x 0.5 M3 x 0.5 7 Vertical 3 3 13 With Buffer: Vacuum Inlet 3 3 7 0.3 0.8 2 1.5 0.8 3 3 2 2.5 0.8 2 2.5 0.8 1.5 2 0.3 Lateral With

Air Slide Table

D A A MXQ16B 57 31 17 30 16 13 MXQ20B 64 32 14 31 13 18 The MXQ6(A, B) is not available.

Table of Contents

head set screw) M8 x 1.25 x 7.5l (Bolt holder) CX 0.5 D-X 25 0.2 25 0.2 5.3 5.3 16 32 31 20Data 2-M3 x 0.5 through 3.4 through 6.5 counterbore with depth 5 (Opposite side: Same) 5.5 2-M3 x 0.5 through M2.5 x 0.45 x 6l (Hexagon socket head cap screw) M3 x 0.5 x 12.5l (Hexagon head bolt) M3 x 0.5 (Hexagon nut) (12) (5 + Stroke) 2.75 2-M3 x 0.5 through 25 0.2 4 8-28-23 23 Series CXSJ Dimensions

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

For Safety Instructions and Actuator Precautions, refer to pages 7-13-3 to 7-13-6.

V100

SY11 A 3 4 M3 x 0.5 M3 x 0.5 100 kPA to 0 0.22 100 kPA to 0.6 Large flow 0 to 0.7 N.C. SY13(A): 15 SY14(A): 26 (14) SY13(A): 13 SY14(A): 24 (12) (1) SY12 3 4 M3 x 0.5 M3 x 0.5 100 kPA to 0.6 0.14 100 kPA to 0 Standard 0 to 0.7 N.O. (1) SY12 A 3 4 M3 x 0.5 M3 x 0.5 100 kPA to 0.6 100 kPA to 0 0.22 Large flow 0 to 0.7 N.O.

KJ

(mm) <M3, M5> <M3, M5> Weight (g) Note) Model L1 L2 L3 A M D 2-applicable tubing M3 x 0.5 KJY23-M3 KJY23-M5 KJY23-01S KJY04-M3 KJY04-M5 KJY04-01S KJY06-M5 KJY06-01S 2.8 3.2 7.4 3.1 3.5 7.7 4.5 7.5 Reference dimensions after R thread installation.

Table of Contents

Series AS-FG Speed Controller with One-touch Fittin Stainless Series . 5 5 6 7 9 11 11 11 11 12 13 13 13 15 15 16 16 16 17 17 18 19 21 22 22 23 24 25 27 27 27 29 30 31 31 31 32 34 35 35 35 36 36 37 37 37 38 38 39 39 39 41 42 43 43 43 44 45 46 46 Specifications. How to Order . Construction. Dimensions . Series AS-FG Speed Controller with One-touch Fittings Stainless Series In-line Type.

One-touch Fittings

11.5 4.6 14.2 1/4 KQ2F07-35l 17.46 10.9 29.2 13.3 13.3 13 11.5 4.6 25.1 3/8 KQ2F07-36l 22.23 10.9 30.5 13.2 13.3 13 11.5 4.6 38.7 D 1/4 M L1 L2 5/16 1/8 KQ2F09-34l 14.29 13 24.8 9.2 14.2 26.1 18 6 15.2 1/4 KQ2F09-35l 17.46 13 29.7 11.8 14.2 26.1 18 6 26.2 3/8 KQ2F09-36l 22.23 13 31 12.4 14.2 26.1 18 6 39.8 3/8 1/4 KQ2F11-35l 17.46 15.1 30.5 11.8 15.6 35.3 29.1 8 27.2 3/8 KQ2F11-36l 22.23

CQ2

Bolt M3 X 40 l 2 pcs.

Compact Cylinder

x 1.25 9 25 35 6 17 MA 75, 100 46.5 88.5 ML L MT Stroke B + Stroke MH + Stroke 5 to 50 46 (56) 27 88 (98) 40 M10 x 1.25 7 46 10 25 35 6 19 75, 100 56 98 A + 2 x (Stroke) 10 to 50 100.5 (110.5) 48.5 (58.5) 50 M14 x 1.5 31 8 57 13 35 44 8 24 75, 100 110.5 58.5 MM 10 to 50 102 52 (112) (62) 63 M14 x 1.5 31 8 68 13 35 42 10 24 MI 75, 100 112 62 10 to 50 125 63 (135) (73) 80 M20 x 1.5 40 10 90

Table of Contents

unit (digit) T 16-13-4 Temperature characteristics The amount of leakage TSJ 16-13-5 E N Ejector 16-13-3 U Noise resistance Non reversed output mode Normal mode NPN output 16-13-4 F Unit conversion URJ 16-13-5 F.S.

NCQ2/CQ2

25 38 M8 x 1.25 9 28.5 7 MA 75, 100 88.5 46.5 ML L MT Stroke B + Stroke MH + Stroke 5 to 50 88 (98) 46 (56) 40 19 6 35 25 46 7 M10 x 1.25 10 27 75, 100 98 56 A + 2 x (Stroke) 10 to 50 100.5 (110.5) 48.5 (58.5) 50 8 24 44 35 8 57 M14 x 1.5 13 31 75, 100 58.5 110.5 MM 10 to 50 102 (112) 52 (62) 63 24 10 42 35 8 68 M14 x 1.5 13 31 MI 75, 100 112 62 10 to 50 125 (135) 63 (73) 80 32 12 10 90 16

Table of Contents

size 10, 13, 15 + with function plate For nozzle size 10, 13, 15 + with function plate M2.5 x 0.45 x 35 M2.5 x 0.45 x 39 M2.5 x 0.45 x 5 M2.5 x 0.45 x 8 M3 x 0.35 x 19 M3 x 0.35 x 23 M3 x 0.35 x 24 M3 x 0.35 x 28 M3 x 0.35 x 68 M3 x 0.35 x 72 M3 x 0.35 x 73 M3 x 0.35 x 77 y u Components Ejector unit + Vacuum switch/Filter unit i o For nozzle size 10, 13, 15 M3 x 0.35 x 84 4 [For ZSE4 spec

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

For Safety Instructions and Actuator Precautions, refer to pages 7-13-3 to 7-13-6.

Compact Hydraulic Cylinder

35.5 30 M27 x 3 33 9 69 13 100 1/4 27.5 10 27.5 20 depth 13 80 105 88 17 45 41 M30 x 3.5 36 14 86 15 121 3/8 31 15 31 23 depth 15.2 100 132 106 26 56 50 M39 x 4 45 21 106 17 146 3/8 36 15 36 26 depth 17.5 Note 1) Body dimensions are the same with or without auto switches.

Mechanically Jointed Rodless Cylinder Series MY1

of graph MY1H/M3) = 38.7 (Nm) MY1B M3 = m3 x g x X = 6.525 x 9.8 x 138.5 x 103 = 8.86 (Nm) m3 M3 MY1M Load factor 3 = M3/M3 max = 8.86/38.7 = 0.23 MY1C 5.

ZP

-11-57 Series ZP Vacuum Pad/Components Refer to page 13-11-62 to 13-11-64 for part numbers of e to y.

5-Port Solenoid Valve

or less 15 or less With Residual Pressure Release Valve SY3000 Vacuum Release Valve with Restrictor Rubber seal SY51l0 2-position single 24 or less 31 or less 24 or less 18 or less 25 or less 18 or less Metal seal SY51l1 24 or less 31 or less 24 or less 18 or less 25 or less 18 or less Rubber seal SY52l0 2-position double 12 or less 15 or less 12 or less 10 or less 13 or less 10 or less Metal

AS

AS121F-M3-02 AS121F-M3-01 2.4 1/8" 7.2 19.7 26.6 24.1 24 21.5 4 8.4 10.5 M3 x 0.5 5.5 5.2 6 11 24.3 26.8 2 11.4 8.8 M3 x 0.5 16.1 10 12.7 5.5 7.5 6 24.3 21.8 AS121F-M5-02 AS121F-M3-03 3 7 M5 x 0.8 5/32" 9.3 11.5 24.8 27.3 AS121F-M3-23 AS121F-M5-01 3.2 8.4 M5 x 0.8 1/8" 10.5 5.5 7.2 16.1 26.6 24.1 24 21.5 4 19.7 12.7 M3 x 0.5 8.4 22.1 17.3 AS121F-M3-04 AS121F-U10/32-01 4 9.3 1/8" 10 10-32UNF

Air Cylinder

[mm] Bore size A B C D F FB FC FT FX FY FZ GB H MM NA NB NN 6 15 8 9 3 8 11 4.5 1.6 24 14 32 5 28 M3 x 0.5 3 9.5 M6 x 1.0 10 15 12 14 4 8 13 4.5 1.6 24 14 32 5 28 M4 x 0.7 4.8 9.5 M8 x 1.0 16 15 18.3 20 5 8 19 5.5 2.3 33 20 42 5 28 M5 x 0.8 4.8 9.5 M10 x 1.0 S Z 5 to 15 st 16 to 30 st 31 to 45 st 46 to 60 st 61 to 75 st 76 to 100 st 101 to 125 st 126 to 150 st 5 to 15 st 16 to 30 st 31 to