Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

plate (Filter, Regulator) 03R VZS 02L 2 1 2 2 2 2 2 2 No. of stations for mounting 03L VFS 02Y 03Y VS4 1(P), 3(R2), 5(R1) port size C6R 1/4 (Down side) 1/4 (Up side) 1/4 (Both sides) 3/8 (Down side) 3/8 (Up side) 3/8 (Both sides) 12 One-touch fitting (Down side) 12 One-touch fitting (Up side) 12 One-touch fitting (Both sides) Mixed 02D C8R VQ7 02U C10R 02B C6L EVS 03D C8L 03U C10L VFN 03B

Table of Contents

Cooling water (l/min) 180C Inlet air temperature Correction factor Air flow (l/min (ANR)) Model 50C 70C 100C 41.5 43 45.5 37 43 49.5 37 43 45.5 37 42 43.5 40 44 46 39.5 43 44.5 41 43 45.5 A B C A B C A B C A B C A B C A B C A B C 35.5 36 36.5 33.5 36 38 33.5 36 36.5 33.5 35 36 34.5 36 37 34.5 35.5 36 34.5 35.5 36 38.5 40 42 36 40 45.5 36 40 42.5 36 40 41 38 40 42.5 38

Membrane Air Dryer

O S O S Drain Drain 115 (Maintenance space 100 mm or more) O S M5 x 0.8 With fitting for purge air discharge (Option: P) Purge air discharge tubing port for dew point indicator Applicable tubing O.D.: 8 SMC SMC SMC 54 Port size in the case of 1/8: (203) Port size in the case of 1/4: (199) 30 43 41.5 Dew point indicator (Option: PS) 5.5 29 24 10 OUT IN 67 9 24 (177) 5.5 134 115 118 3.2 12

IDG

Example Inlet air pressure 0.5 MPa Model selection IDG30 In the case of IDG3056 l/min (ANR) IDG50H In the case of IDG50H 45 l/min (ANR) IDG60 In the case of IDG6094 l/min (ANR) Model selected IDG30-03B IDG30M-03D 14-19-11 8 Series IDG Flow Characteristics IDG3 (Standard dew point: 20C), IDG3H (Standard dew point: 15C) IDG1 (Standard

1

P.43 P.43 P.43 P.71 SY70 SY30 Manifold Top ported Bottom ported Top ported Type 51 SY50 From page 43 P.43 P.43 P.71 P.43 SY70 SY33 Type 52 SY53 From page 63 P.63 P.63 P.81 P.63 SY73 SY30 Type 10 SY50 From page 95 P.95 P.95 P.113 P.143 P.163 P.171 P.179 P.187 P.95 P.123 P.133 P.151 SY70 Type 11 SY50 From page 95 P.95 P.95 P.143 P.163 P.171 P.179 P.187 P.95 P.113 P.123 P.133 P.151 SY70 SY33

4/5 Port Solenoid Valve

0.32 0.24 0.57 0.37 0.45 0.55 0.36 0.50 0.51 0.50 0.38 0.46 2.3 2.0 2.1 2.3 2.1 2.1 2.5 2.2 2.2 2.2 0.26 0.25 0.25 0.26 0.24 0.20 0.23 0.30 0.23 0.26 0.55 0.49 0.51 0.54 0.50 0.50 0.59 0.55 0.52 0.53 1/8 C6 C8 1/8 C6 C8 1/8 1/8 C6 C8 Body ported for internal pilot Base mounted for internal pilot 10-SS5YJ7-20 10-SYJ723 10-SS5YJ7-21 10-SS5YJ7-40 10-SS5YJ7-41 10-SS5YJ7-42-C6 10-SS5YJ7-42-C8

CATALOG

Oil Air 0.1 0.07 0.1 0.07 0.1 0.08 0.07 VX2360-03 10 2.4 43 1 3 1/2 (15A) 0.08 0.03 0.08 0.03 0.08 0.05 0.03 10 VX2260-04 2.4 43 Steam 0.1 0.07 0.1 0.07 0.1 0.08 0.07 VX2360-04 10 2.4 43 0.5 H O W T O O R D E R S E E N E X T P A G E Courtesy of Steven Engineering, Inc. !

VFR

VFS C8, C10 2-Rc 1/8 (PE port) VS4 VQ7 EVS C8: Max. 6.5 C10: Max. 7 6-Rc 1/2 (P, EA, EB port) For wiring specifications, refer to page 3-5-8.

V100

Applicable valve model Piping P, E port Port size Symbol VV3Z4-S50: only C6 & C8.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

C8, C10 S0700 (PE port) VQ VQ4 C8: Max. 6.5 C10: Max. 7 For wiring specifications, refer to page 1326.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

0.32 0.24 0.57 0.37 0.45 0.55 0.36 0.50 0.51 0.50 0.38 0.46 2.3 2.0 2.1 2.3 2.1 2.1 2.5 2.2 2.2 2.2 0.26 0.25 0.25 0.26 0.24 0.20 0.23 0.30 0.23 0.26 0.55 0.49 0.51 0.54 0.50 0.50 0.59 0.55 0.52 0.53 1/8 C6 C8 1/8 C6 C8 1/8 1/8 C6 C8 Body ported for internal pilot Base mounted for internal pilot 10-SS5YJ7-20 10-SYJ723 10-SS5YJ7-21 10-SS5YJ7-40 10-SS5YJ7-41 10-SS5YJ7-42-C6 10-SS5YJ7-42-C8

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

0.50 0.51 0.50 0.38 0.46 2.3 2.0 2.1 2.3 2.1 2.1 2.5 2.2 2.2 2.2 0.26 0.25 0.25 0.26 0.24 0.20 0.23 0.30 0.23 0.26 0.55 0.49 0.51 0.54 0.50 0.50 0.59 0.55 0.52 0.53 1/8 1/8 1/8 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/8 C6 C8 1/8 C6 C8 1/8 1/8 C6 C8 Type 10-SS5YJ7-20 Body ported Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors 10-SYJ723

SX

C8 1 4 1 4 Rc Rc C10 Note) The value is for manifold base with 5 stations and individually operated 2 position type.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

-43 (5(R1), 3(R2) port) Before using, refer to page 3-3-8.

CG1

Grommet (2 colour, Water resistant) Auto Switch Mounting Position and Mounting Height D-B5/B6 D-C7/C8 D-H7C D-G5/K5/G5DW/G5BAL D-K59W/G59F/G5NT D-C73C D-H7/H7W/H7F/H7BAL ( ): D-H7LF Auto Switch Mounting Height (mm) D-C7/D-C8 A 30 30 31 35.5 43 43 D-C73C/D-C80C D-B5/D-B6 D-B59W Bore (mm) B 28.5 28.5 29.5 33 40.5 40.5 Hs 24.5 27 30.5 35 40.5 47.5 A 30 30 31 35.5 43 43 B 28.5 28.5 29.5

Compact 5-Port Solenoid Valve

C6: 6 (SMC) C8: 8 (SMC) 63.6 57.2 * These figures show the JJ5SY3-10PC2-05D-C8. * Refer to page 98 for dimensions of external pilot (Made to Order) and silencer. * Only connectors are different for 10PGC and 10PHC. L1 to L5 dimensions are the same as 10PC type.

Valve Single Unit

C8 1 4 1 4 Rc Rc C10 Note) The value is for manifold base with 5 stations and individually operated 2 position type.

5-Port Solenoid Valve

C4, C6 : 14.8 C8 : 17.2 1/4 [1(P), 5(EA), 3(EB) port] L3 These figures show the SS5Y5-51S5-05D-C8.

Table of Contents

BBA3: For D-B5/B6/G5 BBA4: For D-C7/C8/H7 D-G5BAL and D-H7BAL switches are set on the cylinder with the stainless steel screws above when shipped.

Table of Contents

BBA4: For D-C7/C8/H7 D-H7BAL switch is set on the cylinder with the stainless steel screws above when shipped.