Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

65 70 75 80 85 90 115 140 55 60 65 70 75 80 85 90 95 120 145 60 65 70 75 80 85 90 95 100 125 150 D 35 40 45 50 55 60 40 45 50 55 60 65 40 45 50 55 60 65 70 75 80 85 40 45 50 55 60 65 70 75 80 85 50 55 60 65 70 75 80 D' 85 90 95 120 145 45 50 55 60 65 70 75 80 85 90 115 140 55 60 65 70 75 80 85 90 95 120 145 60 65 70 75 80 85 90 95 100 125 150 D' 40 45 50 55 60 65 45 50 55 60 65 70 45 50

Modular F.R.L. Unit

AL30 to 60 AL30 to 60 AL10 to 60 AL10 to 60 AL10 to 60 AL30 to 60 AL20 AL10 to 60 AL30 to 60 AL10 to 60 10 20 30 40 50 60 M5 1/8 3/8 1/2 3/4 1 Thread type AL20 Port size Metric thread (M5) Rc NPT G Symbol Nil Nil M5 01 02 03 04 06 10 M5 x 0.8 1/8 1/4 3/8 1/2 3/4 1 Note) N F Accessory When more than one specification is required, order in alphanumeric order.

Modular F.R.L. Unit

Description Symbol Description Applicable model Model combination AC20 to 60 AC20 to 60 AC20 to 60 AC20 to 60 AC25 to 60 AC20 AC25 to 60 AC20 to 60 AC20 to 60 1 Note 8) 0.02 to 0.2MPa setting Combination 2 3 6 8 C J Note 9) Metal bowl Symbol Filter Regulator Mist Separator Regulator Air filter Lubricator Lubricator with drain cock Nil A B C D w q e Nylon bowl (including sight dome) w q

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com F S + Stroke F CX ZZ + Stroke D-X H 20B E G Mounting nut Data NN NA F N CY3B15 (mm) B 35 36 46 60 70 NA 17 24 30 36 46 R 28 34 40 50 S 83 106 111 124 150 W 35 50 50 50 60 X 19 25 30 40 40 D 16.6 21.6 26.4 33.6 41.6 ZZ 103 132 137 156 182 E 3 2 2 2 3

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

bolt DA port 20B port 2-M3 x 0.5 (Port location: Side ported type only) 24 1 60 (69) 2 D-97/93A 30 1 If the adjustment bolt is removed, rotation will be approximately 270 for the single vane type and 100 for the double vane type.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

60 1.

Vacuum Regulator

140 100 95 90 85 80 75 70 65 60 Flow rate (l/min (ANR)) VAC side pressure (kPa) IRV20-C10 (One-touch fitting 10) IRV20 53.0 0 10 53.5 SET side pressure (kPa) 20 54.0 Set pressure (kPa) 30 54.5 40 55.0 50 55.5 60 56.0 70 Set point 56.5 80 90 57.0 100 95 90 85 80 75 70 65 60 0 50 100 150 200 250 Flow rate (l/min (ANR)) VAC side pressure (kPa) 2 Vacuum Regulator Series IRV10/20 Construction

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Guide for Using MY3B Side Support Guide for Using MY3A Side Support 100 100 90 90 (1800) (1900) 80 80 m 70 70 MY3A63 Weight w (kg) 60 60 MY3B63 Weight w (kg) l 50 50 (1300) (1400) 40 40 MY3B40 MY3A40 30 30 m 20 20 (1000) (1100) l MY3B25 MY3A25 10 m 10 (900) (1000) MY3A16 MY3B16 0 0 4000 3000 2000 1000 0 4000 3000 2000 1000 0 Support spacing l1 (mm) Support spacing l1 (mm) Note) A side support

RSQ

QA F Q QB QU QW DBore size (mm) QW QU 29 " 32 40 50 13 13 16 38 42 50 20 24.5 26 7.5 8 9.5 6 6 8 60.5 68 82 -X 20 32 to 50 20B 41.5 45 48 52.5 54 D 10 12 20 25 25 E 29 36 45 52 64 F 6 8 7.5 8 8 G 3 4 8 10 10 H 26.5 33 39 53 53 I 60 69 86 J 4.5 5 7 L 2 2 3 4 4 M 28 36 34 40 50 N 3.5 5.5 5.5 5.5 6.6 O counterbore P M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 Q 17 20 20 24.5 24.5 S 8 10 18 24

5 Port Solenoid Valve Series SY3000/5000/7000/9000

(-Q) C8 VQ4 SS5Y5-60(-Q) C10 VQ5 SS5Y7-60(-Q) C12 VQC Note) The value is for manifold base with 5 stations and individually operated 2 position type.

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

U-Q, SV SS5Y5-45TDStations U-Q, and SY SY SS5Y5-45TDStations D-Q are the same as SS5Y5-45TUStations D-Q.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

(-Q) C8 10-SS5Y5-60(-Q) C10 10-SS5Y7-60(-Q) C12 Note) The values are for individually operated 2 position type manifold bases with 5 stations. 105 Body Ported 10-SY3000/5000/7000 Type 60 How to Order Valve Note) AC-type models that are CE-compliant have DIN terminals only.

SY

C4 C6 C8 SY5000: SS5Y5-45Stations DRSC4 C6 C8 SS5Y5-45Stations DRC4 C6 C8 Note) Dimensions L1 to L4 are the same as SS5Y5-45Stations (pages starting with 103).

ISG

Contacts/Bulb gland Pressure Source Nil W Nil B C 1a1b (Standard) 2ab Contact Warning Enclosure Type A 20a (Standard) Type A 20b Type A 20c Bulb gland 1.

ISG

Contacts/Bulb gland Pressure Source Nil W Nil B C 1a1b (Standard) 2ab Contact Warning Enclosure Type A 20a (Standard) Type A 20b Type A 20c Bulb gland 1.

5 Port Solenoid Valve

Manifold base (5 stations) SS5Y5-M10F1-05D-C86 Refer to the page on the right for u,i,o !

0.4

Manifold base (5 stations) SS5Y5-M10F1-05D-C86 Refer to the page on the right for u,i,o !

5 Port Solenoid Valve Series SV1000/2000/3000/4000

Manifold base (5 stations) SS5Y5-M10F1-05D-C86 Refer to the page on the right for u,i,o !

Intrinsically Safe Valve

53-SY5000/7000 Dimensions: 53-SY5000 L-type plug connector (L) 53-SS5Y5-20Stations L1 71 (E-type) 59.5 10 L2 Manual override {1/8"} 16.5 11.5 4 x 4.5 (Mounting hole) 32.7 45.3 EA EB P EA EB P A B A B A B B A 32.7 76.8 32.3 30 L 166.2 21 21 153.6 60 16.2 20 6 x 1/4" {P(1), EA(5), EB(3) port} (Pitch) P = 16 1/8" {A(4), B(2) port} 22 (Lead wire length) Stations n 2 1 67 41.7 36.2 26.5 L-type

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

Manifold Specifications SS5Y5-60 SY560 SS5Y3-60 SY360 Model SS5Y7-60 SY760 Applicable valve Manifold type Stacking DIN rail mounted type P (SUP)/R (EXH) type Common SUP/Common EXH Valve stations 2 to 20 stations Note 1) Ports A, B location Valve C10 (10 One-touch fitting) C8 (8 One-touch fitting) C12 (12 One-touch fitting) Ports P, R Rc(PT) 1/8 C4 (4 One-touch fitting) C6 (6 One-touch fitting