Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

65 70 75 80 85 90 115 140 55 60 65 70 75 80 85 90 95 120 145 60 65 70 75 80 85 90 95 100 125 150 D 35 40 45 50 55 60 40 45 50 55 60 65 40 45 50 55 60 65 70 75 80 85 40 45 50 55 60 65 70 75 80 85 50 55 60 65 70 75 80 D' 85 90 95 120 145 45 50 55 60 65 70 75 80 85 90 115 140 55 60 65 70 75 80 85 90 95 120 145 60 65 70 75 80 85 90 95 100 125 150 D' 40 45 50 55 60 65 45 50 55 60 65 70 45 50

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

65 70 75 80 85 90 115 140 55 60 65 70 75 80 85 90 95 120 145 60 65 70 75 80 85 90 95 100 125 150 D 35 40 45 50 55 60 40 45 50 55 60 65 40 45 50 55 60 65 70 75 80 85 40 45 50 55 60 65 70 75 80 85 50 55 60 65 70 75 80 D' 85 90 95 120 145 45 50 55 60 65 70 75 80 85 90 115 140 55 60 65 70 75 80 85 90 95 120 145 60 65 70 75 80 85 90 95 100 125 150 D' 40 45 50 55 60 65 45 50 55 60 65 70 45 50

Modular F.R.L. Unit

AL30 to 60 AL30 to 60 AL10 to 60 AL10 to 60 AL10 to 60 AL30 to 60 AL20 AL10 to 60 AL30 to 60 AL10 to 60 10 20 30 40 50 60 M5 1/8 3/8 1/2 3/4 1 Thread type AL20 Port size Metric thread (M5) Rc NPT G Symbol Nil Nil M5 01 02 03 04 06 10 M5 x 0.8 1/8 1/4 3/8 1/2 3/4 1 Note) N F Accessory When more than one specification is required, order in alphanumeric order.

Modular F.R.L. Unit

Description Symbol Description Applicable model Model combination AC20 to 60 AC20 to 60 AC20 to 60 AC20 to 60 AC25 to 60 AC20 AC25 to 60 AC20 to 60 AC20 to 60 1 Note 8) 0.02 to 0.2MPa setting Combination 2 3 6 8 C J Note 9) Metal bowl Symbol Filter Regulator Mist Separator Regulator Air filter Lubricator Lubricator with drain cock Nil A B C D w q e Nylon bowl (including sight dome) w q

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com F S + Stroke F CX ZZ + Stroke D-X H 20B E G Mounting nut Data NN NA F N CY3B15 (mm) B 35 36 46 60 70 NA 17 24 30 36 46 R 28 34 40 50 S 83 106 111 124 150 W 35 50 50 50 60 X 19 25 30 40 40 D 16.6 21.6 26.4 33.6 41.6 ZZ 103 132 137 156 182 E 3 2 2 2 3

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

bolt DA port 20B port 2-M3 x 0.5 (Port location: Side ported type only) 24 1 60 (69) 2 D-97/93A 30 1 If the adjustment bolt is removed, rotation will be approximately 270 for the single vane type and 100 for the double vane type.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

60 1.

Vacuum Regulator

140 100 95 90 85 80 75 70 65 60 Flow rate (l/min (ANR)) VAC side pressure (kPa) IRV20-C10 (One-touch fitting 10) IRV20 53.0 0 10 53.5 SET side pressure (kPa) 20 54.0 Set pressure (kPa) 30 54.5 40 55.0 50 55.5 60 56.0 70 Set point 56.5 80 90 57.0 100 95 90 85 80 75 70 65 60 0 50 100 150 200 250 Flow rate (l/min (ANR)) VAC side pressure (kPa) 2 Vacuum Regulator Series IRV10/20 Construction

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Guide for Using MY3B Side Support Guide for Using MY3A Side Support 100 100 90 90 (1800) (1900) 80 80 m 70 70 MY3A63 Weight w (kg) 60 60 MY3B63 Weight w (kg) l 50 50 (1300) (1400) 40 40 MY3B40 MY3A40 30 30 m 20 20 (1000) (1100) l MY3B25 MY3A25 10 m 10 (900) (1000) MY3A16 MY3B16 0 0 4000 3000 2000 1000 0 4000 3000 2000 1000 0 Support spacing l1 (mm) Support spacing l1 (mm) Note) A side support

RSQ

QA F Q QB QU QW DBore size (mm) QW QU 29 " 32 40 50 13 13 16 38 42 50 20 24.5 26 7.5 8 9.5 6 6 8 60.5 68 82 -X 20 32 to 50 20B 41.5 45 48 52.5 54 D 10 12 20 25 25 E 29 36 45 52 64 F 6 8 7.5 8 8 G 3 4 8 10 10 H 26.5 33 39 53 53 I 60 69 86 J 4.5 5 7 L 2 2 3 4 4 M 28 36 34 40 50 N 3.5 5.5 5.5 5.5 6.6 O counterbore P M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 Q 17 20 20 24.5 24.5 S 8 10 18 24

ISG

Contacts/Bulb gland Pressure Source Nil W Nil B C 1a1b (Standard) 2ab Contact Warning Enclosure Type A 20a (Standard) Type A 20b Type A 20c Bulb gland 1.

ISG

Contacts/Bulb gland Pressure Source Nil W Nil B C 1a1b (Standard) 2ab Contact Warning Enclosure Type A 20a (Standard) Type A 20b Type A 20c Bulb gland 1.

ISG

Contacts/Bulb gland Pressure Source Nil W Nil B C 1a1b (Standard) 2ab Contact Warning Enclosure Type A 20a (Standard) Type A 20b Type A 20c Bulb gland 1.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

for 8 SS5Y3-60-04U 1 set (Type 60, 4-station manifold base part no.)

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Spool valve assembly 111 Body Ported 10-SY3000/5000/7000 Type 60 Dimensions [ ]: AC 10-SS5Y3-60Stations U Directional Control Valves Air Grippers Modular F. R.

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

L1 to L4 of C4 C6 SS5Y3-45S2DStations D-Q, C4 C6 C4 C6 SS5Y3-45S2UStations D-Q, and SS5Y3-45S2UStations U-Q are the same as SV C4 C6 SS5Y3-45S2DStations U-Q.

SY

A A A Manual override 15 77.5 SS5Y3-45-D .

5 Port Solenoid Valve

NAS11-103)). 7 Plug-in Connector Connecting Base Series SY3000/5000 How to Order Manifold Assembly Example (SS5Y3-10SNAN-l) SS5Y3-10SNAN-04D-C6 1 set (Type 10 4-station manifold base part no.) SY3100-5U1 2 sets (2-position single part no.) SY3200-5U1 1 set (2-position double part no.)

0.4

NAS11-103)). 7 Plug-in Connector Connecting Base Series SY3000/5000 How to Order Manifold Assembly Example (SS5Y3-10SNAN-l) SS5Y3-10SNAN-04D-C6 1 set (Type 10 4-station manifold base part no.) SY3100-5U1 2 sets (2-position single part no.) SY3200-5U1 1 set (2-position double part no.)

5 Port Solenoid Valve Series SV1000/2000/3000/4000

NAS11-103)). 7 Plug-in Connector Connecting Base Series SY3000/5000 How to Order Manifold Assembly Example (SS5Y3-10SNAN-l) SS5Y3-10SNAN-04D-C6 1 set (Type 10 4-station manifold base part no.) SY3100-5U1 2 sets (2-position single part no.) SY3200-5U1 1 set (2-position double part no.)