Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com F S + Stroke F CX ZZ + Stroke D-X H 20B E G Mounting nut Data NN NA F N CY3B15 (mm) B 35 36 46 60 70 NA 17 24 30 36 46 R 28 34 40 50 S 83 106 111 124 150 W 35 50 50 50 60 X 19 25 30 40 40 D 16.6 21.6 26.4 33.6 41.6 ZZ 103 132 137 156 182 E 3 2 2 2 3

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

bolt DA port 20B port 2-M3 x 0.5 (Port location: Side ported type only) 24 1 60 (69) 2 D-97/93A 30 1 If the adjustment bolt is removed, rotation will be approximately 270 for the single vane type and 100 for the double vane type.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

60 1.

Vacuum Regulator

140 100 95 90 85 80 75 70 65 60 Flow rate (l/min (ANR)) VAC side pressure (kPa) IRV20-C10 (One-touch fitting 10) IRV20 53.0 0 10 53.5 SET side pressure (kPa) 20 54.0 Set pressure (kPa) 30 54.5 40 55.0 50 55.5 60 56.0 70 Set point 56.5 80 90 57.0 100 95 90 85 80 75 70 65 60 0 50 100 150 200 250 Flow rate (l/min (ANR)) VAC side pressure (kPa) 2 Vacuum Regulator Series IRV10/20 Construction

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Guide for Using MY3B Side Support Guide for Using MY3A Side Support 100 100 90 90 (1800) (1900) 80 80 m 70 70 MY3A63 Weight w (kg) 60 60 MY3B63 Weight w (kg) l 50 50 (1300) (1400) 40 40 MY3B40 MY3A40 30 30 m 20 20 (1000) (1100) l MY3B25 MY3A25 10 m 10 (900) (1000) MY3A16 MY3B16 0 0 4000 3000 2000 1000 0 4000 3000 2000 1000 0 Support spacing l1 (mm) Support spacing l1 (mm) Note) A side support

RSQ

QA F Q QB QU QW DBore size (mm) QW QU 29 " 32 40 50 13 13 16 38 42 50 20 24.5 26 7.5 8 9.5 6 6 8 60.5 68 82 -X 20 32 to 50 20B 41.5 45 48 52.5 54 D 10 12 20 25 25 E 29 36 45 52 64 F 6 8 7.5 8 8 G 3 4 8 10 10 H 26.5 33 39 53 53 I 60 69 86 J 4.5 5 7 L 2 2 3 4 4 M 28 36 34 40 50 N 3.5 5.5 5.5 5.5 6.6 O counterbore P M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 Q 17 20 20 24.5 24.5 S 8 10 18 24

Connector Type: FD (D-sub Connector, 25 Pins), Connector Entry: 1 (Upward), Stations: 20 Stations, SUP, EXH Block Mounting: B (Both Sides 1~24 Stations)

Connector Type: D-sub Connector, 25 Pins, Connector Entry: Upward, Stations: 20 Stations, SUP, EXH Block Mounting: Both Sides 1~24 Stations, Pilot Specification: -, SUP, EXH Block Fitting Spec: -, DIN Rail Length Specified: -

ISG

Contacts/Bulb gland Pressure Source Nil W Nil B C 1a1b (Standard) 2ab Contact Warning Enclosure Type A 20a (Standard) Type A 20b Type A 20c Bulb gland 1.

ISG

Contacts/Bulb gland Pressure Source Nil W Nil B C 1a1b (Standard) 2ab Contact Warning Enclosure Type A 20a (Standard) Type A 20b Type A 20c Bulb gland 1.

ISG

Contacts/Bulb gland Pressure Source Nil W Nil B C 1a1b (Standard) 2ab Contact Warning Enclosure Type A 20a (Standard) Type A 20b Type A 20c Bulb gland 1.

Stations: 4 Stations, SUP, EXH Block Mounting: D (D Side 1~10 Stations), Pilot Specification: S (Internal Pilot w/Built-in Silencer)

Stations: 7 Stations, SUP, EXH Block Mounting: U (U Side 1~10 Stations), Pilot Specification: Internal Pilot, SUP, EXH Block Fitting Spec: Straight Fitting, DIN Rail Length Specified: 8 Stations

Stations: 2 Stations, SUP, EXH Block Mounting: D (D Side 1~10 Stations)

Stations: 2 Stations, SUP, EXH Block Mounting: U (U Side 1~10 Stations), Pilot Specification: S (Internal Pilot w/Built-in Silencer), SUP, EXH Block Fitting Spec: Straight Fitting, DIN Rail Length Specified: 4 Stations

Stations: 3 Stations, SUP, EXH Block Mounting: D (D Side 1~10 Stations), Pilot Specification: S (Internal Pilot w/Built-in Silencer)

Stations: 3 Stations, SUP, EXH Block Mounting: U (U Side 1~10 Stations), Pilot Specification: S (Internal Pilot w/Built-in Silencer), SUP, EXH Block Fitting Spec: Straight Fitting, DIN Rail Length Specified: 4 Stations

Stations: 4 Stations, SUP, EXH Block Mounting: D (D Side 1~10 Stations), Pilot Specification: Internal Pilot, SUP, EXH Block Fitting Spec: Straight Fitting, DIN Rail Length Specified: 5 Stations

Stations: 4 Stations, SUP, EXH Block Mounting: U (U Side 1~10 Stations), Pilot Specification: S (Internal Pilot w/Built-in Silencer), SUP, EXH Block Fitting Spec: Straight Fitting, DIN Rail Length Specified: 5 Stations

Stations: 5 Stations, SUP, EXH Block Mounting: U (U Side 1~10 Stations)