VS 8-2/VS 8-4

SOL.A 3A SOL.B 3B Station 3 SOL.A 4A SOL.B 4B Station 4 SOL.A 5A 10A COM 10B SOL.B 5B Station 5 SOL.A 6A SOL.B 6B Station 6 SOL.A 7A 1A COM 2A 3A 4A 5A 6A 7A 8A 9A 10A 1B 1A 2B 2A 3B 3A 4B 4A 5B 5A 6B 6A 7B 7A 8B 8A 9B 9A 10B 10A COM 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B SOL.B 7B Station 7 Double wiring (connected to SOL. A and SOL.

0.4

SOL.A 8A () (+) Station 8 SOL.B 1A COM 2A 3A 4A 5A 6A 7A 8A 9A 10A 8B () (+) 1B 1A 2B 2A 3B 3A 4B 4A 5B 5A 6B 6A 7B 7A 8B 8A 9B 9A 10B 10A COM 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B SOL.A 9A () (+) Station 9 SOL.B 9B () (+) SOL.A 10A () (+) Station 10 SOL.B 10B () (+) Note) When using the negative COM specification, use valves for negative COM. (+) () COM Note) Negative COM spec.

VQC

A 9A () (+) 1B 1A 2B 2A 3B 3A 4B 4A 5B 5A 6B 6A 7B 7A 8B 8A 9B 9A 10B 10A COM 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B SOL. B 9B () (+) Station 9 SOL. A 10A () (+) Note) There is no polarity. This device can also be used as a negative common. SOL.

5 Port Solenoid Valve, Series VQC

B 8B () (+) Station 8 1A COM 2A 3A 4A 5A 6A 7A 8A 9A 10A 1B 1A 2B 2A 3B 3A 4B 4A 5B 5A 6B 6A 7B 7A 8B 8A 9B 9A 10B 10A COM 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B SOL. A 9A () (+) SOL. B 9B () (+) Station 9 SOL. A 10A () (+) Note) There is no polarity. This device can also be used as a negative common. SOL.

Plug-in Unit

B 8B () (+) Station 8 1A COM 2A 3A 4A 5A 6A 7A 8A 9A 10A 1B 1A 2B 2A 3B 3A 4B 4A 5B 5A 6B 6A 7B 7A 8B 8A 9B 9A 10B 10A COM 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B SOL. A 9A () (+) SOL. B 9B () (+) Station 9 SOL. A 10A () (+) SOL. B 10B () (+) Station 10 Note) When using the negative COM. specification for VQC1000/2000, use valves for negative COM. (+) () COM. Positive COM.

VQ5000

SOL.B 7B ( ) ( + ) 7 stations SOL.A 8A ( ) ( + ) SOL.B 8B ( ) ( + ) 8 stations 1A COM 2A 3A 4A 5A 6A 7A 8A 9A 10A 1B 1A 2B 2A 3B 3A 4B 4A 5B 5A 6B 6A 7B 7A 8B 8A 9B 9A 10B 10A COM 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B SOL.A 9A ( ) ( + ) SOL.B 9B ( ) ( + ) 9 stations SOL.A 10A ( ) ( + ) SOL.B 10B ( ) ( + ) 10 stations ( + ) ( ) COM Note) There is no polarity.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

SOL.B 7B ( ) ( + ) 7 stations SOL.A 8A ( ) ( + ) SOL.B 8B ( ) ( + ) 8 stations 1A COM 2A 3A 4A 5A 6A 7A 8A 9A 10A 1B 1A 2B 2A 3B 3A 4B 4A 5B 5A 6B 6A 7B 7A 8B 8A 9B 9A 10B 10A COM 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B SOL.A 9A ( ) ( + ) SOL.B 9B ( ) ( + ) 9 stations SOL.A 10A ( ) ( + ) SOL.B 10B ( ) ( + ) 10 stations ( + ) ( ) COM Note) There is no polarity.

Pulse Valve

Specifications Series JSXFAE/F 06 10 14 Orifice diameter [mm] 32 40 50 Port size 3/4 1 1 1/2 Fluid Air Pilot valve Exhaust Pilot piping Orifice diameter: 5 mm or larger Min. operating pressure differential [MPa] 0.1 JSXFA Pilot port Max. operating pressure differential [MPa] 0.9 Max. system pressure [MPa] 0.9 Fluid temperature [C] 40*1 to 60 Ambient temperature [C] 40 to 60 Weight [g] Compression

SI Unit for Vacuum Manifold

0 (4) (Device) (Application) Firmware error Occur 0xF4 11b(3)(appears) 0x1805 Release 0xB4 10b(2)(disappears) Occur 0xE4 11b(3)(appears) Voltage drop of power supply for logic/input 0x5111 Release 0xA4 10b(2)(disappears) Occur 0xE4 11b(3)(appears) 0x1850 Release 0xA4 10b(2)(disappears) Supply valve type parameter mismatch 10b (2) Occur 0xE4 11b(3)(appears) 0x1851 Release 0xA4 10b(2)(disappears

2

, 400, 415 VAC (50 Hz) 380 to 420 VAC (60 Hz) 420, 440, 480 VAC (50 Hz) 420 to 520 VAC (60 Hz) 220 VAC (50 Hz) 220 to 240 VAC (60 Hz) 380, 400, 415 VAC (50 Hz) 380 to 400, 400 to 415, 415 to 440 VAC (60 Hz) 440, 460 VAC (50 Hz) 440 to 460, 460 to 500 VAC (60 Hz) Outlet voltage Symbol 500 1 500 VA 100 VAC (50 Hz) 100, 110 VAC (60 Hz) 1000 2 1 kVA Singlephase 2000 2 kVA 3 4 9 200 VAC (50 Hz

Air Slide Table Series MXP

Load (N) 20 40 60 Load (N) 20 40 60 Load (N) 10 10 10 L = 100 mm L = 100 mm L = 100 mm Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) MXP10-10 MXP10-20 MXP10-10 MXP10-20 0.04 0.03 0.08 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10-10 MXP10-20 MXP10-10 MXP10-20 0.06 0.03 0.02 0.04 0.02 0.01 0.02 0.01 0 0 0 20 40 60 80 Load (N) 20 40 60 80 Load (N)

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

80 Load (N) 20 40 60 80 Load (N) 20 40 60 100 Load (N) 12 12 12 L = 100 mm L = 100 mm L = 100 mm MXP12-15 MXP12-25 MXP12-15 MXP12-25 0.05 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) 0.04 0.08 MXP12-15 MXP12-25 MXP12-15 MXP12-25 MXP12-15 MXP12-25 MXP12-15 MXP12-25 0.04 0.03 0.06 0.03 0.04 0.02 0.02 0.01 0.02 0.01 0 50 100 150 Load (N) 0 50

Compact Hydraulic Cylinder

CH2E/CH2F/CH2G/CH2H JIS Standard Hydraulic Cylinder Double Acting/Single Rod Accessories (Optional) Single knuckle joint Material: Cast iron Bore size (mm) 32 40 50 63 80 100 40 50 63 80 100 Rod series H A B C D E F J K d Part no. +0.07 0 IH2-03B IH2-04B IH2-05B IH2-06B IH2-08B IH2-10B IH2-03B IH2-05C IH2-06C IH2-06B IH2-10C 25 16 76 60 25 32 M16 x 1.5 26 M5 x 0.8 16 +0.07 0 25 16 76 60 25

Hydraulic

(optional) Single knuckle joint Material: Cast iron Bore size (mm) Rod series Part no. d H A B C D E F J K 32 40 50 63 80 100 40 50 63 80 100 +0.07 0 IH2-03B IH2-04B IH2-05B IH2-06B IH2-08B IH2-10B IH2-03B IH2-05C IH2-06C IH2-06B IH2-10C 25 16 76 60 25 32 M16 x 1.5 26 M5 x 0.8 16 +0.07 0 25 16 76 60 25 32 M20 x 1.5 31 M5 x 0.8 16 +0.084 0 31.5 20 90 70 30 40 M24 x 1.5 36 M5 x 0.8 20 F J

JIS Standard Hydraulic Cylinder

/CH2G/CH2H Series JIS Standard Hydraulic Cylinder Double Acting/Single Rod Accessories (Optional) Single knuckle joint Material: Cast iron Bore size (mm) 32 40 50 63 80 100 40 50 63 80 100 Rod series H A B C D E F J K d Part no. +0.07 0 IH2-03B IH2-04B IH2-05B IH2-06B IH2-08B IH2-10B IH2-03B IH2-05C IH2-06C IH2-06B IH2-10C 25 16 76 60 25 32 M16 x 1.5 26 M5 x 0.8 16 CHQ +0.07 0 25 16 76 60

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

0 + 0.1 0 32 40 50 63 80 100 40 50 63 80 100 YH2-03B YH2-04B YH2-05B YH2-06B YH2-08B YH2-10B YH2-03B YH2-05C YH2-06C YH2-06B YH2-10C M5 x 0.8 M6 x 1.0 76 60 41 32 25 16 12.5 20 M16 x 1.5 16 M5 x 0.8 M6 x 1.0 76 60 41 32 25 16 12.5 20 M20 x 1.5 16 l M5 x 0.8 M6 x 1.0 90 70 50 40 31.5 20 16 20 M24 x 1.5 20 C B series rod M6 x 1.0 M8 x 1.25 145 115 75 60 E 40 30 20 24 M30 x 1.5 31.5 dH10 L L

Base Mounted Metal Seal/Rubber Seal Series VQ

Coil rated voltage 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Wiring Specifications The lead wires are connected to the valve as shown below. Connect each to the power supply side.

0.4

Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Note 1) Refer to page 16 for power consumption of AC type.

0.4

K Note 2) Negative common N Note 3) Coil voltage CE-compliant External pilot R Note 3) Note 5) 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Note 1) Refer to page 381 for power consumption of AC type.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Note 1) Refer to page 522 for power consumption of AC type.