16 14 16 17 14 16 17 9.0 9.0 9.0 VFS600 0.30 0.15 0.15 0.30 0.15 0.15 0.25 0.25 0.25 0.32 0.17 0.20 0.30 0.23 0.25 15 16 17 15 16 17 14 16 16 14 16 17 14 16 18 9.0 9.0 9.0 3.7 3.7 3.9 3.7 3.7 3.9 4.0 4.1 4.1 3.8 3.8 4.2 3.7 3.9 4.6 0.30 0.15 0.13 0.30 0.15 0.13 0.24 0.24 0.23 0.25 0.18 0.13 0.31 0.22 0.22 3 8 4.1 4.5 4.7 4.1 4.5 4.7 4.1 4.1 4.1 3.5 4.1 4.1 3.8 4.1 4.3 Single 1 2 3 4 VFS5100
, 42, 43): DXT192-40-1TA Interface regulator (only for type 41, 42, 43): NARBZ3000-00-P Typ 20 NVV5Z3-2O-@1-OOr Stations a otl?
ASV Inch size M1 L3 L2 AK Applicable tubing O.D. d D1 ASS L6 D2 L1 ASR D4 L4 H ASF (Hexagon width across flats) (Hexagon width across flats) D4 D3 A1 L5 A2 L6 T Inch Size Model H D1 D2 D3 D4 L1 L2 L3 L4 L5 L6 A1 A2 M1 T d 1/8" 5/32" 3/16" 1/4" 3/16" 1/4" 5/16" 1/4" 5/16" 3/8" 1/4" 5/16" 3/8" 1/4" 5/16" 3/8" 3/8" ASD230F-U10/32-01T ASD230F-U10/32-03T ASD230F-U10/32-05T ASD230F-U10/32-07T
3/16" 1/4" 1/8", 5/32" 3/8" 1/2" 5/32" 3/16" 1/4" 5/16" 3/8" Inch size 3/16", 1/4" 1/4" 5/16" ASF Flow rate (l/min (ANR)) 1050 100 130 290 660 1390 420 920 230 460 Controlled flow (Free flow) Effective area (mm 2) 16 1.5 2 4.5 10 21 6.5 14 3.5 7 Note) Flow rate values are measured at 0.5 MPa and 20C.
(Example) SS3YJA3-41-03-M3 . 1 set SYJA314. 1 set SYJA324. 1 set SYJ300-10-2A . 1 set The asterisk denotes the symbol for assembly.
(SYJA500) SS3YJA7 Specify the same manifold part number as SS3YJ7. (SYJA700) 1 (P) 3 (R) 1 (P) 3 (R) Specify the part numbers for the valve(s), blank plate assembly and manifold base. N.C. N.O.
A port Dimensions Formula: L1 = 10n + 21, L2 = 10n + 7, n: Station (Max. 20 stations) n L L1 L2 2 41 27 3 51 37 4 61 47 5 71 57 6 81 67 7 91 77 8 9 10 121 107 11 131 117 12 141 127 13 151 137 14 161 147 15 171 157 16 181 167 17 191 177 18 201 187 19 211 197 20 221 207 1 31 17 101 87 111 97 4-12-15
16 Series VQ100 Manifold Option Plug Assembly VV3Q11 for Manifold with Multi-connector
=10n+21 L2=10n+7 n: Station (Max. 20 stations) n L L1 L2 1 31 17 2 41 27 3 51 37 4 61 47 5 71 57 6 81 67 7 91 77 8 101 87 9 111 97 10 121 107 11 131 117 12 141 127 13 151 137 14 161 147 15 171 157 16 181 167 17 191 177 18 201 187 19 211 197 20 221 207 2.9-13 Series VQ100 Construction R A P (N.C. valve) Component Parts Description Material Resin Stainless steel Stainless steel, Resin Stainless
Nvv3zs-4lc-)-aF) 2-o1r irw3zs4rR-o2-o Applicau Yalng .NW3Z5-41-O2-e) NVzsl4-OOO NVZ5l4M-OOO .NW3Z5-4rR-O2-O NVz5:4R-OOO r{w3zs-41-o2-o ; -*o** E]2 stations :r{29.1 20 stations BLnk p|.le.3ty DXT201-15-1A lfthere are more lhan I siations, supply air and exhaust lrom bolh sides ol manitold, @ W,:f;::W#ffinaidvqhre' Blank PlateAss'g DXT20-1s-1A Apelic*b b..e . NW3Z'2GOI . NWSZ+2l-e)l .
Nvv3zs-4lc-)-aF) 2-o1r irw3zs4rR-o2-o Applicau Yalng .NW3Z5-41-O2-e) NVzsl4-OOO NVZ5l4M-OOO .NW3Z5-4rR-O2-O NVz5:4R-OOO r{w3zs-41-o2-o ; -*o** E]2 stations :r{29.1 20 stations BLnk p|.le.3ty DXT201-15-1A lfthere are more lhan I siations, supply air and exhaust lrom bolh sides ol manitold, @ W,:f;::W#ffinaidvqhre' Blank PlateAss'g DXT20-1s-1A Apelic*b b..e . NW3Z'2GOI . NWSZ+2l-e)l .
Piping: 41 (Base Mounted), Stations: 16 Stations, A, B Port: 01T (NPTF1/8)
Manifold Type: 41 (Base Mounted, Bar Manifold, Compact, Individual Wiring), Valve Stations: 16 Stations, A, B Port: 01T (NPTF1/8)
Piping: 41 (Base Mounted Common SUP Common EXH), Stations: 16 Stations, A B Port Size: 01T (NPTF 1/8)
Manifold Type: 41 (Base Mounted), Valve Stations: 16 Stations, A, B Port: 01T (NPTF1/8)
Piping: Base Mounted, Stations: 16 Stations, A, B Port: NPT1/8
Piping: 41 (Base Mounted), Stations: 16 Stations, A, B Port: 01N (NPT1/8)
Piping: Base Mounted, Stations: 7 Stations, A, B Port: NPTF1/8
Piping: Base Mounted, Stations: 3 Stations, A, B Port: NPTF1/8
Piping: Base Mounted, Stations: 5 Stations, A, B Port: NPTF1/8
Piping: Base Mounted, Stations: 4 Stations, A, B Port: NPTF1/8