Piping: 40R (Base Mounted), Stations: 19 Stations, A, B Port: M5T (M5X0.8 NPTF)

Piping: 40R (Base Mounted), Stations: 6 Stations, A, B Port: M5T (M5X0.8 NPTF)

Piping: 40R (Base Mounted), Stations: 9 Stations, A, B Port: M5T (M5X0.8 NPTF)

Piping: 40R (Base Mounted), Stations: 17 Stations, A, B Port: M5T (M5X0.8 NPTF)

Vacuum System Peripherals:

SX3 LOZ 40R Type of actuation Rated voltage Common specifications Manual override Nil Positive common Negative common 2 position single solenoid 2 position double solenoid 3 position closed center 3 position exhaust center 3 position pressure center Indicate it with the following stations table.

VZ100/300/500

-2 VV3Z3-40R-1 Gasket VZ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Manifold base Applicable base Sub-plate VV3Z3-40-2 VV3Z3-40-1 VV3Z3-40R-2 VV3Z3-40R-1 VT Applicable base VV3Z3-20-1 VV3Z3-21R-1 Manifold base VP Manifold base Part no.: DXT200-8-6A Round head

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

-20 10-SS3YJ5-40-M5 10-SS3YJ5-40-01 10-SS3YJ5-41-M5 10-SS3YJ5-41-01 10-SS3YJ5-41-C4 10-SS3YJ5-41-C6 M5 x 0.8 0.47 0.71 0.98 0.71 1.0 0.68 1.0 0.43 0.52 0.36 0.49 0.37 0.35 0.27 0.13 0.21 0.25 0.20 0.26 0.17 0.25 0.74 0.81 0.92 0.80 0.96 1.0 1.0 0.32 0.28 0.24 0.23 0.25 0.25 0.30 0.19 0.20 0.22 0.19 0.24 0.24 0.26 M5 x 0.8 1/8 1/8 1/8 1/8 1/8 10-SYJ52M Body ported for internal pilot Base mounted

Piping: Base Mounted, Stations: 3 Stations, A, B Port: M5X0.8 NPTF

Piping: Base Mounted, Stations: 5 Stations, A, B Port: M5X0.8 NPTF

Piping: Base Mounted, Stations: 7 Stations, A, B Port: M5X0.8 NPTF

Piping: Base Mounted, Stations: 13 Stations, A, B Port: M5X0.8 NPTF

Piping: Base Mounted, Stations: 14 Stations, A, B Port: M5X0.8 NPTF

Piping: Base Mounted, Stations: 16 Stations, A, B Port: M5X0.8 NPTF

Piping: Base Mounted, Stations: 18 Stations, A, B Port: M5X0.8 NPTF

Piping: Base Mounted, Stations: 20 Stations, A, B Port: M5X0.8 NPTF

Piping: Base Mounted, Stations: 10 Stations, A, B Port: M5X0.8 NPTF

Piping: Base Mounted, Stations: 12 Stations, A, B Port: M5X0.8 NPTF

Piping: Base Mounted, Stations: 19 Stations, A, B Port: M5X0.8 NPTF

Piping: Base Mounted, Stations: 6 Stations, A, B Port: M5X0.8 NPTF

Piping: Base Mounted, Stations: 9 Stations, A, B Port: M5X0.8 NPTF