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-12S 90 12 9 11 9 20 105 Normally open Normally closed MHKL2-16S 16 17 14 14.6 28.6 165 MHKL2-20S 20 32 18 16 34 314 MHKL2-25S 25 53 22 19 41 565 MHKL2-12C 12 11 11 9 20 105 L1 MHKL2-16C 16 22 14 14.6 28.6 166 L2 MHKL2-20C 20 40 18 16 34 314 MHKL2-25C 25 63 22 19 41 565 Note) At the pressure of 0.5 MPa, when gripping point L is 20 mm.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

How to Order Applicable solenoid valve 10-SYJ323--M3(-Q) 20 05 10 SS5YJ3 A, B port M3 x 0.5 Applicable blanking plate assembly Number of stations CE-compliant Clean series + + + + Refer to page 302.

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50 40 1001 2 3 4 5 10 20 30 4050 30 Air Cushion Stroke (mm) m3 max. m1 max. m2, m3 max.

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For nozzle size 10, 13, 15 + with function plate M3 x 0.35 x 93 4 6 6 6 6 For nozzle size 10, 13, 15 For nozzle size 18, 20 For nozzle size 10, 13, 15 + with function plate For nozzle size 10, 13, 15 + with function plate M3 x 0.35 x 37 M3 x 0.35 x 41 M3 x 0.35 x 42 M3 x 0.35 x 46 !0 Precautions Components Ejector unit Be sure to read before handling.

SYJ3000/5000/7000

Type 20 (5 Port/Body ported) How to Order Applicable solenoid valve SYJ320--M3 SYJ323--M3 SS5YJ320 05 A, B port M3 x 0.5 Applicable blanking plate assembly SYJ3000-21-1A Number of stations + + + + 02 2 stations R P R R P R : : P port M5 x 0.8 R port M5 x 0.8 20 20 stations Type 31 (4 Port/Base mounted) How to Order SS5YJ3 31 05 M3 Type 31 Type S31 ( ) Type 31 Type S31 Single solenoid

SY

SS5Y5 20 Top ported (type 20) SS5Y5 Side ported (type 41, 42) Base type Stations A/B port size 01 Rc 1/8 Type 41 02 2 stations 41 Type 41 02 Rc 1/4 Type 42 42 Type 42 ... ... 20 20 stations C6 6 One-touch fitting Type 41, 42 C8 8 One-touch fitting Type 41, 42 2 Valve Type Note) SY320-is for type 20 manifolds. SY340is for type 41 and 42 manifolds. SY340Ris for type 42 manifolds.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

G: 300 H: 600 2-3.2 eauivalent Bracket (Lead wire length) (Mounting holes) 18.5 (Non-locking) Manual override 28 [34.5] 15.6 18.5 20 13.5 9 46.5 35.5 40.4 (GZ, GS: 41.1) [42.1] 91.7 (GZ, GS: 93.1) [95.1] R R P 11 0.5 10 5-M3 X 0.5 (Piping port) 7 7 [ ] for AC M plug connector (M): SYJ3 20-lMll-M3 3 4 5 3 4 5 L plug connector (L): SYJ3 20-lLll-M3 30.5 19.5 30.5 19.5 300 5.3 1.8 1.8 5.3

Fluoropolymer Piping Equipment

LQ1T3A-ST2-R5 Body size 3 3/8 1/4 5 15 20 9 18 17 14 17 37.6 31.6 36.5 23 16.5 23 3.6 LQ1T4A-ST1-R1 1/2 Body size 3 1/2 24 24 21 17 21 34 41.5 34 28 23 28 5.8 LQ1T4A-ST1-R7 3/8 Body size 3 1/2 20 17 38.5 41.5 34 23 LQ1T4A-ST1-R37 1/2 Body size 5 1/2 24 21 26 39.5 52.5 39.5 28 39 9 LQ1T5A-ST1-R1 3/4 Body size 4 3/4 29 29 9 LQ1T5A-ST1-R2 3/4 Body size 3 3/4 17 41 48 41 23 5.8 LQ1T5A-ST1

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

DL DM HR K Q Q M 20 20 21 28.5 40 B + Stroke L 25 21 21 29.5 41 E A + Stroke With rod end lock DM End lock mechanism Manual release Non-lock type ) ( 24 11 2-M5 x 0.8 4-N through D 1 Flat washer F Q B + Stroke L A + Stroke Rod end male thread H1 Bore size (mm) L1 H1 C1 X Standard stroke 18.5 10, 15, 20, 25 14 12 M8 x 1.25 28.5 20 50, 75, 100 32.5 M10 x 1.25 22.5 10, 15, 20, 25 C1 17.5 15

KJ

(mm) <M3, M5> <M3, M5> Weight (g) Note) Model M L A D KJS23-M3 KJS23-M5 KJS04-M3 KJS04-M5 KJS04-01S KJS06-M5 KJS06-01S M3 x 0.5 M5 x 0.8 M3 x 0.5 M5 x 0.8 16.3 19.7 16.3 18.7 19.7 19.5 20 1.4 1.3 2.8 1.6 2.7 5.4 3.3 5.2 13.7 16.6 13.7 15.6 15.7 1.5 2 1.5 2.5 3 2.5 4 12.7 3.2 7 2.5 1.4 8 Applicable tubing Applicable tubing 4 12.7 4 4 M5 x 0.8 R 1 8 9.8 16.4 16 4 10 4 10 13.5

CQ2

Bore (mm) S U 14 Z 13 C D E H I J K L M 5.5 N 9 Depth 7 O 16 M8 X 1.25 60 58.5 31.5 45 4.5 14 7 34 32 40 50 66 35 16 M8 X 1.25 69 14 52 5 14 7 40 5.5 9 Depth 7 13 Standard SCQ2 Bore size B, #9 80 41 20 M10 X 1.5 86 19 64 7 17 8 50 6.6 11 Depth 8 15 2.3-48 Compact Cylinder/Standard: Single Acting Spring Return/Extend Series CQ2 Foot (mm) 5st 10 20 5st 10 20 5st 10 20 5st 10 20 5st 10 20 5st

Air Slide Table

25 Double-ported type MXQA 10 10 10 10 10 10 20 20 20 20 20 20 30 30 30 30 30 30 40 40 40 40 40 40 Stroke 50 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 11 150 150 Low thrust with high rigidity type MXQB 10 10 10 10 10 20 20 20 20 20 30 30 30 30 30 40 40 40 40 40 Stroke 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 53 150 150 Single side-ported type MXQC

ZP

, M5 Male thread M3, M5 Female thread Without buffer (with adapter) P.3 Polyurethane tubing 2 Barb fitting Soft nylon/ Polyurethane tubing 4, 6 One-touch fitting 2, 4, 6 ZP3-T ;;Vertical M3, M5 Female thread Stroke with buffer 3 mm 6 mm 10 mm 15 mm 20 mm Polyurethane tubing 2 P.15 Barb fitting Soft nylon/ Polyurethane tubing 4, 6 2, 4, 6 One-touch fitting J JB K ZP3-T ; Lateral M3, M5 Female

ZP

1.8 ZPT50 50 53 7.5 19.5 25.5 51.5 12.5 16 18 17.5 38.5 43.5 3.5 1.2 Deep Deep H: M6 x 1 H: M8 x 1 Y B C F G C F G D E Model A H: M5 x 0.8 H: M6 x 1 Y Model A B E F E F C D ZPT40D 40 43 29 35.5 3 25 61 4.5 15 51 17 ZPT10D 16 18 16 20 42 25 47 7 21 ZPT16D 10 12 15 20 41 25 46 6 20 13-11-4 Series ZPT Vacuum Pad: Vertical Vacuum Entry without Buffer Connection Male thread Pad Form Bellows Vacuum

SX

02 G H 2 A COMB + P EA EB 20 (A, B port) 2-Rc 1/4 (P port) Rc 1/4 42.4 For manifold gasket positioning 2-2.2 die-cast holes 41 31.5 28 121.9 3 4 5 L plug connector (L): SX7 20-L3 4 5 M plug connector (M): SX7 20-MC8 C10 C8 C10 128.6 300 141.1 99.2 99.2 19 42.9 (Lead wire length) 19 42.9 Polarity indication 13.6 13.6 A B A B B A A COM B + A B A B A B A Manual override (Push and turn for locking

4/5 Port Air Operated Valve Series SYJA3000

Type 20 (5 Port/Body ported) How to Order Applicable solenoid valve SYJ320--M3 SYJ323--M3 SS5YJ320 05 A, B port M3 x 0.5 Applicable blanking plate assembly SYJ3000-21-1A Number of stations + + + + 02 2 stations R P R R P R : : P port M5 x 0.8 R port M5 x 0.8 20 20 stations Type 31 (4 Port/Base mounted) How to Order SS5YJ3 31 05 M3 Type 31 Type S31 ( ) Type 31 Type S31 Single solenoid

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5 (Z) 20 (20) 4-M3 x 0.5 thread depth 4.5 (Opposite side: Same) 5 7 8.5 (mm) 7 2-5.1 Z ZZ SS S Model CXSW10-10 CXSW10-20 CXSW10-30 CXSW10-40 CXSW10-50 CXSW10-75 CXSW10-100 CXSW10-125 CXSW10-150 30 30 92 136 52 10 4-M5 x 0.8 thread depth 4.5 (Piping port) (Opposite side: Same) Standard stroke Long stroke (-XB11) 102 20 156 62 112 176 30 72 (Z) 122 196 82 40 4-M3 x 0.5 thread depth 5 4 (20

ZP

With buffer 04 06 4 6 Vacuum inlet direction Direction Lateral Symbol Buffer stroke ( ) R Pad size Symbol Stroke Pad type Buffer specification 10 20 30 40 50 10 mm 20 mm 30 mm 40 mm 50 mm Symbol Size 3.5 x 7 4 x 10 5 x 10 6 x 10 4 x 20 5 x 20 Symbol Size 6 x 20 8 x 20 4 x 30 5 x 30 6 x 30 8 x 30 Symbol Specification 3507 4010 5010 6010 4020 5020 6020 8020 4030 5030 6030 8030 Symbol W Type

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Basic Style Bore size (mm) Stroke range (mm) Th9 Z U V S Q N A F M E J G H I K1 B C D K2 L P 0 0.043 12 5 to 30 19.5 25 35.5 15.5 3.5 22 32 1.5 44.4 37.4 10.5 M3 x 0.5 5.2 M5 x 0.8 6 6 5 3.5 15 0 0.052 16 5 to 30 22.5 29 41.5 15 3.5 28 38 1.5 48 41 10 M4 x 0.7 6 M5 x 0.8 8 8 6 3.5 20 0 0.043 20 5 to 50 24.5 36 48 18.5 5.5 36 47 2 55 46 10.5 M5 x 0.8 8 M5 x 0.8 7 10 8 4.5 13 0 0.043

42

or Restrictor (Bottom) 2 Valve + Restrictor (Top) + Double check spacer with residual pressure exhaust (Bottom) q AXT632-17-14 (M3 x 112) 3 For manifold w AXT632-41-2 (M3 x 78) 2 Valve + Double check spacer with residual pressure exhaust (Bottom) + Interface regulator (Top) q AXT632-17-16 (M3 x 137) 3 For manifold w AXT632-41-3 (M3 x 103) 2 q w Blanking plate q AXT632-17-17 (M3 x 66) 3 For