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AS2201F-01-06-X214 AS2301F-01-06-X214 RS H A AS2201F-01-06-X214 AS2301F-01-06-X214 AS2201F-02-06-X214 AS2301F-02-06-X214 RZQ 3. When disassembling to replace the seals and wear ring, refer to the separate disassembly instructions. AS3201F-02-08-X214 AS3301F-02-08-X214 AS3201F-02-08-X214 AS3301F-02-08-X214 MI W S 4.

ZP

Vacuum Inlet Dimensions ZP3-Y035U;J -B3 ZP3-Y035U;K -B3 Barb fitting One-touch fitting 7 5 Width across flat 6 Width across flat 4 ZP3-Y015U:J -02 ZP3-Y02U:J -02 ZP3-Y035U:J -02 ZP3-Y015U:J -U2 ZP3-Y02U:J -U2 ZP3-Y035U:J -U2 Width across flat 8 Width across flat 10 2 2 D Width across flat 5.5 2 2 13 A D B M6 x 0.75 M3 x 0.5 7 0.3 13 A B M8 x 0.75 7 M3 x 0.5 0.9 (13.9) Width across flat 4.5

ZP

Vacuum Inlet Dimensions ZP3-Y035U;J -B3 ZP3-Y035U;K -B3 Barb fitting One-touch fitting 7 5 Width across flat 6 Width across flat 4 ZP3-Y015U:J -02 ZP3-Y02U:J -02 ZP3-Y035U:J -02 ZP3-Y015U:J -U2 ZP3-Y02U:J -U2 ZP3-Y035U:J -U2 Width across flat 8 Width across flat 10 2 2 D Width across flat 5.5 2 2 13 A D B M6 x 0.75 M3 x 0.5 7 0.3 13 A B M8 x 0.75 7 M3 x 0.5 0.9 (13.9) Width across flat 4.5

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Except type 41. How to Order Applicable solenoid valve 10-SYJ323--M3(-Q) 20 05 10 SS5YJ3 A, B port M3 x 0.5 Applicable blanking plate assembly Number of stations CE-compliant Clean series + + + + Refer to page 302.

Table of Contents

For nozzle size 10, 13, 15 + with function plate M3 x 0.35 x 93 4 6 6 6 6 For nozzle size 10, 13, 15 For nozzle size 18, 20 For nozzle size 10, 13, 15 + with function plate For nozzle size 10, 13, 15 + with function plate M3 x 0.35 x 37 M3 x 0.35 x 41 M3 x 0.35 x 42 M3 x 0.35 x 46 !0 Precautions Components Ejector unit Be sure to read before handling.

SYJ3000/5000/7000

Type 20 (5 Port/Body ported) How to Order Applicable solenoid valve SYJ320--M3 SYJ323--M3 SS5YJ320 05 A, B port M3 x 0.5 Applicable blanking plate assembly SYJ3000-21-1A Number of stations + + + + 02 2 stations R P R R P R : : P port M5 x 0.8 R port M5 x 0.8 20 20 stations Type 31 (4 Port/Base mounted) How to Order SS5YJ3 31 05 M3 Type 31 Type S31 ( ) Type 31 Type S31 Single solenoid

SX

8 stations 4 stations 02 2 stations 02 2 stations 02 2 stations (2) (2) (2) Applicable up to 20 solenoids.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

(M): SYJ7140lMll01 02 01 02 VZS VFS 2-4.3 2-4.3 (Mounting holes) (Mounting holes) VS A B B A 34 27 34 27 B VS7 A A B R2 R1 P R2 R1 P 85.5 [86.8] 81.5 64.3 34 8.5 34 8.5 64.3 (Lead wire length) 300 (Lead wire length) 95.1 300 (P, A, B port) 3-Rc(PT)1/4, 1/8 3-Rc(PT)1/4, 1/8 (P, A, B port) 25.5 41 54 60 71.1 [77.6] 25.5 41 47.6 54 60 [66.5] 11.5 12 20 57.1 20 57.1 11.5 12 (R1, R2 port) 2

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35.4 29.4 40.4 25.2 34 17 60 39.3 13.2 18.5 34.4 1/4" AS221F-02-09 AS321F-02-08 21 8 15.2 36.4 20 41 27.2 36 18.5 63 15.2 29.5 5/16" 1/4 23 21.8 48.8 37.8 42.8 43.8 AS221F-02-11 AS321F-02-10 21 18.5 43.2 20 10 33.9 43.3 17.9 36 21 67 31.8 3/8" AS321F-02-07 AS321F-02-12 20.9 12 44.3 17 39.3 27.8 22 69 32.8 60 13.2 1/4" 19 AS321F-02-09 AS321F-03-06 12.8 6 39.3 18.5 63 15.2 41 29.5 17 55 27.8

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Round head combination screw ( ) M3 x 47 With spring washer Gasket Individual SUP spacer Applicable base VV5Z5-40 VV5Z5-41 VV5Z5-42 Before using, refer to page 3-3-8.

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VX2122-02 VX2-02 VX2322-02 VX2132-02 VX2232-02 VX2332-02 VX2242-02 VX2342-02 VX2-03 VX2322-03 VX2232-03 VX2332-03 VX2242-03 VX2342-03 VX2110-01 VX2120-01 VX2130-01 VX2110-02 VX2120-02 VX2220-02 VX2320-02 VX2130-02 VX2230-02 VX2330-02 VX2240-02 VX2340-02 VX2250-02 VX2350-02 VX2260-02 VX2360-02 VX2220-03 VX2320-03 VX2230-03 VX2330-03 VX2240-03 VX2340-03 VX2250-03 VX2350-03 VX2260-03 VX2360

42

Note Option mounting diagram Single valve AXT632-17-4 (M3 x 37) 3 Valve 0 Blanking plate (VVQ4000-10A1 5 ) AXT632-38-1 (M3 x 14) 4 For manifold Blanking plate Valve + Individual SUP spacer (VVQ4000-P1 5 02 03 ) q AXT632-17-10 (M3 x 62) 3 For manifold w AXT632-17-19 (M3 x 26) 2 Valve + Individual EXH spacer (VVQ4000-R1 5 -02 03) q AXT632-17-10 (M3 x 62) 3 For manifold w AXT632-17-19 (M3 x

4/5 Port Air Operated Valve Series SYJA3000

Type 20 (5 Port/Body ported) How to Order Applicable solenoid valve SYJ320--M3 SYJ323--M3 SS5YJ320 05 A, B port M3 x 0.5 Applicable blanking plate assembly SYJ3000-21-1A Number of stations + + + + 02 2 stations R P R R P R : : P port M5 x 0.8 R port M5 x 0.8 20 20 stations Type 31 (4 Port/Base mounted) How to Order SS5YJ3 31 05 M3 Type 31 Type S31 ( ) Type 31 Type S31 Single solenoid

Air Fittings & Tubing

D1 D2 L1 L2 M 15 23 15 22 25 17 24 24 27 30 36 31 52 59 58 KQ2F04-01 KQ2F04-02 KQ2F06-01 KQ2F06-02 KQ2F06-03 KQ2F08-01 KQ2F08-02 KQ2F08-03 KQ2F10-02 KQ2F10-03 KQ2F12-02 KQ2F12-03 KQ2F12-04 KQ2F16-03 KQ2F16-04 1 8 1 4 1 8 1 4 3 8 10 27 31 27.5 31 33.5 29 32.5 33.5 34.5 36.5 35 37 41 38 43 11 16 5.6 4 14 17 14 17 19 14 17 19 17 19 4 14 11 13 15 11 13 14 14 15 13.1 10.4 17 12 6 1 8 KQ2F16 26.1

ZP

01 ZPB-T1J75-01 18 28 With three M3 bolts Applicable pad part no.

ZP

Vacuum Inlet Dimensions ZP3-Y035U;J -B3 ZP3-Y035U;K -B3 Barb fitting One-touch fitting 7 5 Width across flat 6 Width across flat 4 ZP3-Y015U:J -02 ZP3-Y02U:J -02 ZP3-Y035U:J -02 ZP3-Y015U:J -U2 ZP3-Y02U:J -U2 ZP3-Y035U:J -U2 Width across flat 8 Width across flat 10 2 2 D Width across flat 5.5 2 2 13 A D B M6 x 0.75 M3 x 0.5 7 0.3 13 A B M8 x 0.75 7 M3 x 0.5 0.9 (13.9) Width across flat 4.5

Free Mount Cylinder

25 30 38 48 5 6 8 10 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 4 9 9 13.5 2 4.5 4.5 4.5 3.5 5 5 5 With auto switch S Without auto switch Bore size (mm) 5 st 38 41 45 41 45 47 S Z Z 10 st 43 46 50 46 50 52 15 st 48 56 60 56 60 62 5 st 56 62 66 65 73 79 10 st 66 72 76 75 83 89 15 st 76 87 91 90 98 104 5 st 38 41 45 51 55 57 10 st 43 46 50 56 60 62 15 st 48 56 60 66 70 72 5

A

16 6 16 34 10-32UNF 20 0~0.002 8 -0.4 ~ -0.2 5/16 25 11.5 10.3 RCS-02 6 16 34 10-32UNF 20 0~0.002 10 -0.4 ~ -0.2 3/8 25.6 30 14 18 RCD-025 20 8 20 41 1/4-28UNF 25 0~0.002 10 -0.4 ~ -0.2 3/8 30 14 18 RCS-025 8 20 41 1/4-28UNF 25 0~0.002 18 -0.5 ~ -03 3/8 41.6 30 14 12 RCD-03 36 16 22 42 5/16-24UNF 32 0~0.002 18 -0.5 ~ -03 3/8 30 14 12 RCS-03 16 22 42 5/16-24UNF 32 0~0.002 18 -0.5 ~ -03 3/

Vacuum Pad

Vacuum Inlet Dimensions ZP3-Y035U;J -B3 ZP3-Y035U;K -B3 Barb fitting One-touch fitting 7 5 Width across flat 6 Width across flat 4 ZP3-Y015U:J -02 ZP3-Y02U:J -02 ZP3-Y035U:J -02 ZP3-Y015U:J -U2 ZP3-Y02U:J -U2 ZP3-Y035U:J -U2 Width across flat 8 Width across flat 10 2 2 D Width across flat 5.5 2 2 13 A D B M6 x 0.75 M3 x 0.5 7 0.3 13 A B M8 x 0.75 7 M3 x 0.5 0.9 (13.9) Width across flat 4.5

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

[Option] How to Order Manifold Assembly (Example) How to Order Manifold Type 41/Compact type Example 41 SS5Y 05 5 10 C8 Single solenoid (24 VDC) 10-SY3140-5G (2 sets) Clean series Thread type Double solenoid (24 VDC) Manifold series Stations Rc Nil 10-SY3240-5G (2 sets) 3 2 1 Stations 02 3 10-SY3000 5 10-SY5000 2 stations G F ... ...