Table of Contents G H ZH05DS-06-06-06 ZH05DL-06-06-06 ZH07DS-06-06-06 ZH07DL-06-06-06 ZH10DS-06-06-08 ZH10DL-06-06-08 ZH13DS-08-10-10 ZH13DL-08-10-10 14.2 14.2 S type: White color L type: Black color 14.2 Applicable tubing diameter N 14.2 Applicable tubing diameter E 17.2 17.2 20 20 ZX 93.3 47 29.5 10 15.3 4.2 15.8 ZH15DS-10-12-12 22.45 93.3 47 29.5 10 15.3 4.2 15.8 ZH15DL-10-12-12 22.45 ZR (Mounting hole)
imperial units (PSI, F) N R Y Z (3) Port size Body size Port size Symbol 20 25 30 40 50 60 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 When more than one specification is required, indicate in ascending alphanumeric order.
(mm) Bore size B C GA GB LB NA NB WA WB S Z 10 15 17 7.5 6.5 16.5 21 20 14.4 13.4 65 93 16 18.3 20 7.5 6.5 23 21 20 14.4 13.4 66 94 INDEX 370 Series CJ2 Dimensions Rod flange (F) CJ2F6 Stroke R View E Rod end nut Mounting nut NN GA Piping port M5 x 0.8 Piping port M5 x 0.8 Cover surface C MM 9 D 0 0.3 0 0.3 FB FY B 8 0 0.3 0 0.3 2 x FC Mounting hole FX FZ FT A H F T NA 8 B NB View E Z +
/4 3/8 1/2 3/4 Size 20 V V Size 30 V V Size 40 V V V Size 40-06 V 3 Modular F.R.L.
imperial units (PSI, F) N R Y Z (3) Port size Body size Port size Symbol 20 25 30 40 50 60 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 When more than one specification is required, indicate in ascending alphanumeric order.
) T-interface Note 6) (02) 02 02 03 03 (04) 04 Y61004 02 VHS40-06 02 04 VHS50-(10) pressure release 02 02 06 3-port valve for residual Note 6) 03 VHS2001 VHS3003 VHS3003 VHS4002 03 01 02 02 06 06 06 Piping adapter Note 6) E200-02 E30003 E300-03 E40004 E500-06 E600-10 E60010 E60010 E100-M5 03 04 04 06 02 01 02 02 Pressure switch Note 6) 03 IS1000E-20 02 IS1000E-3003 IS1000E-3003 IS1000E
Example) AF30-03B-2R-A-X430 X430 Low temperature X440 High temperature Symbol Description Nq Body size 20 30 40 50 60 Symbol Description Nq Body size 30 40 50 60 Nil Rc N*1 NPT F*2 G + Nw Pipe thread type Nil Rc N*1 NPT F*2 G + Nw Pipe thread type 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + Ne Port size Ne Port size Nr Option (Mounting) Nil Without mounting
Note 3) ZP3-Y(04/06/08)UM;(J/K)3-@ ZP3-Y(04/06/08)B;(J/K)3-@ ZP3-Y(04/06/08)UM;(J/K)6-@ ZP3-Y(04/06/08)B;(J/K)6-@ ZP3-Y(04/06/08)UM;(J/K)10-@ ZP3-Y(04/06/08)B;(J/K)10-@ ZP3-Y(04/06/08)UM;(JB/K)15-@ ZP3-Y(04/06/08)B;(JB/K)15-@ ZP3-Y(04/06/08)UM;(JB/K)20-@ ZP3-Y(04/06/08)B;(JB/K)20-@ ZP3B-Y2B(J/K)6-B5 ZP3B-Y2B(J/K)10-B5 ZP3B-Y2B(JB/K)15-B5 ZP3B-Y2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08
Use Nil for Rc, N for NPT, and F for G. Note 2) A pressure switch cannot be mounted on AC40-06 and AW40-06. Separate interfaces are required for modular unit. The pressure switch on AC40-06 and above and AW40-06 can be mounted by screwing IS1000-01 into the piping adapter E500-06-X501 or E600-06-X501 to E600-10-X501 (with top-face thread Rc 1/8).
Description ARJM104, 6, 10 Manifold base How to Order ARJ1020F-M5-06 ARJ1020F-M5-04 M5 ARJ 20 10 F 04 1 Option Miniature regulator 1 Set at 0.2MPa Port size Only the adjusting spring is different from standard.
VFN Pilot type Nil R External pilot Internal pilot
Note 3) ZP3-Y(04/06/08)UM;(J/K)3-@ ZP3-Y(04/06/08)B;(J/K)3-@ ZP3-Y(04/06/08)UM;(J/K)6-@ ZP3-Y(04/06/08)B;(J/K)6-@ ZP3-Y(04/06/08)UM;(J/K)10-@ ZP3-Y(04/06/08)B;(J/K)10-@ ZP3-Y(04/06/08)UM;(JB/K)15-@ ZP3-Y(04/06/08)B;(JB/K)15-@ ZP3-Y(04/06/08)UM;(JB/K)20-@ ZP3-Y(04/06/08)B;(JB/K)20-@ ZP3B-Y2B(J/K)6-B5 ZP3B-Y2B(J/K)10-B5 ZP3B-Y2B(JB/K)15-B5 ZP3B-Y2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08
(per buffer stroke) C 30 31 G H: 4 H: 6 Stroke ( ) D E F G J J Dimensions 10 20 30 40 50 11.5 21.5 31.5 41.5 51.5 23 61.5 99.5 109.5 145.5 155.5 a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 Y Model 51 ZP2-T4030WK ZP2-T5030WK ZP2-T6030WK ZP2-T8030WK 04 06 13.9 8 14.7 10 04 06 04 06 04 06 0.5 77 2 x 2.5 0.8 20 Series ZP2 Male thread mounting Female thread mounting How to Order ZP2 R 3507 W N 04 A5 Without
Port size 04 06 10 12 14 20 LVH 1 2 3 4 Refer to page 17-3-16 for ordering coil only. 1 1 1 2 LVD 1 4 1 2 Thread type Nil T F N LVQ Rc NPTF G NPT Refer to the table (1) given below for availability.
AMH450-06 AMH550-06 AMH550-10 AMH650-14 AMH850-20 AMH850-20 IDG10-03 IDG20-03 IDG30-03 IDG50-03 IDG75-04 IDG100-04 AME150-03 AMF150-03 AME150-03 AMF150-03 AME250-03 AMF250-03 AME250-03 AMF250-03 AME350-04 AMF350-04 AME350-04 AMF350-04 AME450-06 AMF450-06 AME450-06 AMF450-06 AME550-10 AMF550-10 AME550-10 AMF550-10 AME650-14 AMF650-14 AME850-20 AME850-20 AMF850-20 AMF850-20 AMF900-30 AMF900
Bore size Applicable series 02 03 04 06 10 12 14 20 Note 1) AS800 is available as special.
Conductive fluoro rubber U: Flat 06: 6 08: 8 F Y Pad configuration Pad diameter 1.2 A B (for ZP06, 08U ) Pad material End pin material Gasket M5 x 0.8 Vacuum 10mm stroke dimensions NBR Silicon rubber Urethane rubber Fluoro rubber Conductive NBR Conductive silicon A 20 25 32 B 23 28 35 C D E F G H I Y 1.7 1.8 2.3 Model INO-3769-1964-20C10 INO-3769-1964-25C10 INO-3769-1964-32C10 Width
AMF150C AMF-EL150 AMF-EL150-F AMF250C AMF-EL250 AMF-EL250-F AMF350C AMF-EL350 AMF-EL350-F AMF550C AMF-EL550 AMF-EL550-F AMF650 AMF-EL650 AMF850 AMF-EL850 Except option F For option F Element assembly Glass fiber, others AMF-EL450 AMF-EL450-F 4 Industrial Filters Replacement Procedure Actuators Modular F.R.L.
Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet M5 x 0.8 Effective thread depth 4 3 40 22.5 1.2 11 6 46 25 14.5 10 56 29 20.5 04 A J K 3 40 22.5 1.8 11 6 46 25 14.5 10 56 29 20.5 06 08 N S U F GN GS HS 18 11 15 59 42.5 1.2 10 20 66.5 50 06 08 15 59 42.5 1.8 20 66.5 50 04 JB K ZP3 Y UM B5 3 41 23.5 11 6 47 26 14.5 10 57 30 20.5 JB K 15 60 43.5 10 20 67.5 57 J K 4 10 13 16 D
No indication is necessary for Rc; however, indicate N for NPT, and F for G. Note 2) A pressure switch cannot be mounted on AC40-06 and AW40-06. Separate interfaces are required for modular unit.