High Vacuum Angle Valve

CYV Chemraz VMQ FKM for Plasma ULTIC ARMOR Example) XLCV-16-M9NA-1G-XAN1A UA4640 Note 1) Option specifications/Combinations This model has auto switch and K(DN) flange options, but high temperature/heater options are not available.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Flow Rate Characteristics JSX Series G Grommet GS Grommet with PCB DN DIN terminal without connector WN M12 connector/ Without connector cable Recognized Series/Valve type Body material Seal material Orifice diameter/Port size Thread type Rated voltage Electrical entry Option JSX11 S N 101 R 1 G1 * F 201 N 2 GS E F 3 DN 4 WN 5 6 7 8 B J JSX11 Table of UL-compliant Products JSXD Series

Aluminum High Vacuum Angle Valve

CYV Chemraz Example) XLCV-16-M9NA-1G-XAN1A VMQ FKM for Plasma ULTIC ARMOR Note 1) Option specifications/Combinations This model has auto switch and K(DN) flange options, but high temperature/heater options are not available.

High Vacuum Angle Valve, XL Series

Note 1) Option specifications/Combinations This model has auto switch and K(DN) flange options, but high temperature/heater options are not available.

XL

Note 1) Option specifications/Combinations This model has auto switch and K(DN) flange options, but high temperature/heater options are not available.

High Vacuum Angle Valve

Example) XLAV-16L-2M9NA-1G-XAN1A *1 Produced by Mitsubishi Cable Industries, Ltd. * With solenoid valve: Option specifications/Combinations This model has indicator, auto switch, and K (DN) flange options, but hightemperature/heater options are not available. * Solenoid valves XLAV-16, 25, 40, 50: SYJ319, XLAV-63, 80: SYJ519 Example) SYJ319-1GS, etc.

XM, XY

), CF KF (NW), K (DN) Flange type Body: SCS13 (Conforms to Stainless steel 304) Bellows: Stainless steel 316L Bellows holder: Stainless steel 304.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Flange size XMD Symbol Nil D C Type KF (NW) K (DN) CF Applicable flange size 25, 40, 50, 63, 80 63, 80 40 (070), 63 (114) XYD V V V V V XMD V V V V V Size 25 40 50 63 80 XYD Nil D KF (NW) K (DN) 25, 40, 50, 63, 80 63, 80 3.

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

(Cable length) PCA-1557633 PCA-1557646 EX500-AC010-DN (1 m) EX500-AC050-DN (5 m) PCA-1557659 PCA-1557662 PCA-1557675 i o !0 !1 !2 !

SV

How to Order EX500 G DN 1 Communication protocol Applicable GW unit DN PR AB DeviceNet PROFIBUS-DP Remote I/O (RIO) DeviceNet PROFIBUS-DP Remote I/O (RIO) Nil -X1 Dimensions 148 EX500-GAB1-X1 VOLTAGE 24 VDC/200 mA INPUT/OUTPUT 64/64 IP CODE IP65 SERIAL NO.

VQZ1000/2000/3000

-DN Manifold Drop prevention Stoppage in the middle Caution VVQ2000-FPG 06 2 (B) 4 (A) 2 (B) 4 (A) Since air leakage from the pipe between the valve and cylinder or the fittings will prevent the cylinder from stopping for a long time. Check for air leakage using neutral household detergent, such as dish washing soap.

Series SV

How to Order EX500 G DN 1 Applicable GW unit Communication protocol DeviceNet PROFIBUS-DP Remote I/O (RIO) DN PR AB DeviceNet PROFIBUS-DP Nil Remote I/O (RIO) -X1 Dimensions 148 E x 500-GAB1-X1 VOLTAGE 24VDC/200mA INPUT/OUTPUT 64/64 IP CODE IP65 SERIAL NO.

Series VQ Metal Seal/Rubber Seal Body Ported

How to order manifold VV5Q14 P, R port size 08FS0 DN 00T SY 1. How to Order VQ0 VQ1000 VQ2000 1/4 1/4 5/16 Indicate an option symbol, K, for the manifold No. and be sure to specify the mounting position and number of stations of the single and double wiring by means of a manifold specification form.

0.4

Example) -DN Caution Manifold (DIN rail mounting) 4(A) 2(B) 4(A) 2(B) VVQ2000-FPG06 Air leakage from the pipe between the valve and cylinder or from the fittings will prevent the cylinder from stopping for long periods of time. Check the leakage using neutral household detergent, such as dish washing soap.

0.4

Example) -DN 4(A) 2(B) 4(A) 2(B) Manifold (DIN rail mounting) Caution VVQ2000-FPG06 Air leakage from the pipe between the valve and cylinder or from the fittings will prevent the cylinder from stopping for long periods of time. Check the leakage using neutral household detergent, such as dish washing soap.

CM2

No. of auto switches mounted 2 Different sides C85 Auto switch model Same side n Different sides 1 Same side C95 D-C7 D-C80 D-H7 D-H7W D-H7BAL D-H7NF D-C73C D-C80C D-H7C 10 50 15 50 + 45 (n 2) n 2 2 15 + 45 ( ) (n = 2, 4, 6) CP95 10 60 15 60 + 45 (n 2) NCM NCA n 2 2 15 + 50 ( ) (n = 2, 4, 6) 10 65 15 65 + 50 (n 2) Dn 2 2 D-B5/B6 D-G5NTL 15 + 50 ( ) (n = 2, 4, 6) 75 10 15 -X 75 + 55

Compact 5-Port Solenoid Valve

(Wireless compatible) ZK2 Combination Manifold PR S 1 EX600 EX600 1 EN W Version Protocol Protocol Fittings, Replacement Parts, Tools Symbol Description Symbol Description PR PROFIBUS DP DN DeviceNet Symbol SI unit type Description EN Wireless base module EtherNet/IP*1 Nil When MJ, EN, EC, or PN is selected A When PR or DN is selected PN Wireless base module PROFINET*1 SV Wireless remote

2–4

Printed in Japan. 1st printing September, 2003 D-DN P-120 (DN) Printed in Japan. This catalog is printed on recycled paper with concern for the global environment.

Compact Type

Printed in Japan. 1st printing June, 2003 D-DN P-120 (DN) Printed in Japan. This catalog is printed on recycled paper with concern for the global environment.

Electric Actuator with Integrated Guide

Printed in Japan. 1st printing November, 2002 D-DN P-80 (DN) This catalog is printed on recycled paper with concern for the global environment.