SMC Corporation of America
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Model Model Model Port size Effective area Weight Dimensions (mm) R(PT) (mm2) (g) Model Port size Effective area Weight Dimensions (mm) R(PT) (mm2) (g) AN103-01 10 1 23.5 11 3 36 16 14 17 66 22 19 A B D A B D 1 8 1 4 2504-002 33.9 111 62 30 24 106 64 30 24 113 68 30 24 AN203-02 15 1 4 AN303-03 35 3 8 25 84 25 22 AN403-04 60 1 2 2505-003 45.9 3 8 2506-004 50.0 1 2 310 88.5 48 35 2507-006

Symbol x 50 001 005 010 020 050 075 100 002 004 006 013 q q w w 0.01 0.01 e r e 0.005 0.005 r 0.002 5 10 50 100 0.002 10 50 100 Flow rate l/min (ANR) Flow rate l/min (ANR) Note) The recommended flow rate is the rate for an initial pressure drop of 0.01 to 0.02 MPa. 2 Series FQ1 How to Order Filters Element and Seal Part Numbers 1.

AXT628-6-1A AXT628-6-2 AS568-006 AS568-010 AS568-013 AS568-022 AS568-026 AXT628-5-1A VVFS5000-4AAZ738-31AAXT336-9 Material Steel plate Steel plate NBR NBR NBR NBR NBR For 01T For 01SU NBR For increasing the manifold bases, please order the manifold block assembly number of the principal part assembly !0.

AXT628-6-1A AXT628-6-2 AS568-006 AS568-010 AS568-013 AS568-022 AS568-026 VFR5000-21-1A VVFS5000-4AAXT336-9 When requiring replacement manifold stations, order replacement parts assembly no. !0: manifold block assembly part. For plug-in type: The manifold base with terminal stand (integrated with a junction cover) is required with the o junction cover assembly.

Manifold Specifications Manifold Manifold base Number of valves Blanking plate (With O rings, screws) B Mount Common pressure supply, Individual pressure supply (1) 2 to10 stations VVX21VX011-001, VVX22/23VX011-006 Individual SUP Note 1) Common port is placed on vacuum side.

Auto switch mounting band D-H7l/H7lW D-H7BA/H7NF D-C7l/C80 D-C73C/C80C BJ2-006 (A set of band and screw) BJ2-010 (A set of band and screw) BJ2-016 (A set of band and screw) Band mounting BQ2-012 (S) (A set of a and b) BQ2-012 (S) (A set of a and b) a Auto switch mounting bracket D-M9l D-M9lV D-M9lW D-M9lWV D-M9lA Note 4) D-M9lAV Note 4) D-A9l D-A9lV Set screw (Accessory) Note 4) Rail mounting

Note 3) The flow rate over or below the set range may deteriorate performance or generate noise. 146 Series HEC-W Peltier-Type Chiller Thermo-con (Water-cooled) How to Order 012 B HEC W 2 600 W, 1200 W Cooling capacity 006 012 600 W 1200 W HRG HRS HRZ HRZD HRW HEC HEB HED Technical Data Related Products Radiating method Option Nil W Water-cooled N None NPT thread 2 200 to 220 VAC Power supply

Thermo-con/ Rack Mount Type HECR Series Air-cooled (UL Standards) How to Order HECR 002 5 A Option Cooling capacity 002 200 W 004 400 W 006 510 W 008 800 W 010 1 kW Nil None E With feet and no rack mounting brackets F With ow switch P High-pressure pump mounted When multiple options are combined, indicate symbols in alphabetical order.

Description BA-01, BA-02, BA-32, BA-04, BA-05, BA-06, BA-08, BA-10 BA2-020, BA2-025, BA2-032, BA2-040 BA5-050, BHN2-025, BSG1-032 BH2-040, BH2-050, BH2-080, BH2-100 BAF-32, BAF-04, BAF-05, BAF-06, BAF-08, BAF-10 BJ2-006, BJ2-010, BJ2-016 BM2-020, BM2-025, BM2-032, BM2-040 D-B5, B6 D-G5, K5 M4 x 0.7 x 22L 1 BBA3 Auto switch mounting screws D-C7, C8 D-H7 M3 x 0.5 x 14L 1 BBA4 BMA2-020, BMA2

How to Order Elements EJ T S 701 002 Element seal T PTFE Element classification EJ HEPO2 Filtration accuracy (Filtration efficiency 99%) Element size symbol 002 004 006 013 701 801 901 2 m 4 m 6 m 13 m For FGH100 For FGH200 For FGH300 Specifications Membrane Element for Series FGH Series ED EDS-X40 Model EDS-X20 Filtration accuracy(Filtration efficiency 99.9%) Note 1) 0.4 0.2 6,200 4,000

Symbol x 50 001 005 010 020 050 075 100 002 004 006 013 q q w w 0.01 0.01 e r e 0.005 0.005 r 0.002 5 10 50 100 0.002 10 50 100 Flow rate l/min (ANR) Flow rate l/min (ANR) Note) The recommended flow rate is the rate for an initial pressure drop of 0.01 to 0.02 MPa. 2 Series FQ1 How to Order Filters Element and Seal Part Numbers 1.

Symbol x 50 001 005 010 020 050 075 100 002 004 006 013 0.01 0.01 0.005 0.005 0.002 5 10 50 100 0.002 10 50 100 Flow rate l/min (ANR) Flow rate l/min (ANR) Note) The recommended flow rate is the rate for an initial pressure drop of 0.01 to 0.02 MPa. 2 Series FQ1 How to Order Filters Element and Seal Part Numbers 1.

detected +/L) 1.0 or less Ammonium ion (mgNH4 Residual chlorine (mgCl/L) 0.3 or less Free carbon (mgCO2/L) 4.0 or less Filtration (m) 5 or less 3-4 Unit Overview 4 Unit overview 4.1 Method of displaying model HEC 012 W 2 B N Piping Port Nil: Rc (Standard) -N: NPT Communication A: RS-485 B: RS-232C Power supply specification 2: AC200-220V Cooling method W: Water-cooled Cooling capacity 006

How to order 002 FGH 100 03 T Element seal aterial PTFE Nominal filtration accuracy Nominal filtration Applicable Applicable Symbol accuracy Element model Element length 002 2m Filtration Element Applicable 004 4m HEPO FGH100 Symbol efficiency length Element 300 006 6m 99% 100 L117 EJ701S 013 13m 200 L246 EJ801S,ED801S X20 0.2m Filtration FGH200 300 L496 EJ901S,ED901S efficiency Membrane

HEC002-A/HEC006-A 3-3 Caution on Installation HEC002-A/HEC006-A 3-4 Unit Overview 4 Unit Overview 4.1 Method of identifying model HEC002 A 5 B * Option Cooling capacity Nil With no option 002 230W -F With flow switch 006 600W -N NPT fitting Radiating method A Air-cooled Serial communication A RS-485 Power supply B RS-232C 5 AC100-240V 4.2 Manufacturing years method of display SERIAL No.

No dew condensation is allowed on the unit. 006 510W F With flow switch 1) Install an external temperature sensor to the room. 2) Select 4 in control operation. 3) Thermo-con controls the fluid temperature to the ambient temperature. 4) When the temperature is not stable, then set the sampling interval larger. 008 800W P High head pump Do not mount the product in a location exposed to radiant

AXT628-6-1A AXT628-6-2 AS568-006 AS568-010 AS568-013 AS568-022 AS568-026 VFR5000-21-1A VVFS5000-4AAZ738-31AAXT336-9 No. q w e r t y u i Description Material Connection fitting A Connection fitting B O-ring O-ring O-ring O-ring O-ring Terminal block assembly Steel plate Steel plate NBR NBR NBR NBR NBR For 01T For 01SU NBR When requiring replacement manifold stations, order replacement parts

AXT628-6-1A AXT628-6-2 AS568-006 AS568-010 AS568-013 AS568-022 AS568-026 AXT628-5-1A VVFS5000-4AAZ738-31AAXT336-9 Material Steel plate Steel plate NBR NBR NBR NBR NBR For 01T For 01SU NBR For increasing the manifold bases, please order the manifold block assembly number of the principal part assembly !0.