Size: 4 (400), Valve Type: 1 (N.C.), Seal Material: B (FKM), Pressure Range: 70 (0 to 7 MPa), Thread: Rc, Port Size: 25 (1, SGH400), Pilot Valve: Y (V116, for 7 MPa), Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal), Light/Surge Suppressor: Z (Light/Surge Suppressor, Non-polar), Manual Override: Non-locking Push Type, Bracket: B1 (Bracket on Left Side)

Size: 4 (400), Valve Type: 1 (N.C.), Seal Material: B (FKM), Pressure Range: 70 (0 to 7 MPa), Thread: Rc, Port Size: 25 (1, SGH400), Pilot Valve: Y (V116, for 7 MPa), Voltage: 5 (24VDC), Electrical Entry: T (Conduit Terminal), Light/Surge Suppressor: Z (Light/Surge Suppressor, Non-polar), Manual Override: Non-locking Push Type, Bracket: B1 (Bracket on Left Side)

Size: 400, Valve Type: N.C., Seal Material: FKM, Pressure Range: 0 to 7 MPa, Thread: Rc, Port Size: 1, SGH400, Pilot Valve: V116, for 7 MPa, Voltage: 24VDC, Electrical Entry: DIN Terminal, Light/Surge Suppressor: Light/Surge Suppressor, Non-polar, Manual Override: Non-locking Push Type, Bracket: Bracket on Left Side

Size: 400, Valve Type: N.C., Seal Material: FKM, Pressure Range: 0 to 7 MPa, Thread: Rc, Port Size: 1, SGH400, Pilot Valve: V116, for 7 MPa, Voltage: 24VDC, Electrical Entry: Conduit Terminal, Light/Surge Suppressor: Light/Surge Suppressor, Non-polar, Manual Override: Non-locking Push Type, Bracket: Bracket on Left Side

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Mounting bolt Model C Mounting bolt CDQP2B12-5D -10D -15D -20D -25D -30D CDQP2B16-5D -10D -15D -20D -25D -30D CDQP2B20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CDQP2B25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D Model C Mounting bolt CDQP2B32-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B40-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B50-

CQ2

Mounting bolt Mounting bolt CDQP2B32-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B40-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B50-10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D Mounting bolt CDQP2B12-5D -10D -15D -20D -25D -30D CDQP2B16-5D -10D -15D -20D -25D -30D CDQP2B20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CDQP2B25-5D -10D -

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Mounting bolt Model C Mounting bolt CDQP2B12-5D -10D -15D -20D -25D -30D CDQP2B16-5D -10D -15D -20D -25D -30D CDQP2B20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CDQP2B25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D Mounting bolt CDQP2B32-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B40-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D -75D -100D CDQP2B50-10D -15D

CQS

Mounting bolt Mounting bolt D 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 Model C Model C D 55 60 65 70 75 80 35 40 45 50 55 60 65 70 75 80 CQSWB12-5D -10D -15D -20D -25D -30D CQSWB16-5D -10D -15D -20D -25D -30D CQSWB20-5D -10D -15D -20D CQSWB20-25D -30D -35D -40D -45D -50D CQSWB25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D M3 x 30l x 35l x 40l x 45l x 50l x 55l M3 x 30l x 35l x

Table of Contents

VFR2110-5D 5 sets (2 position single part no.) VFR2410-5D 1 set (3 position exhaust part no.) VVFS2000-R-01-2 1 set (Individual EXH spacer part no.) VV5FR2-01T1-061-02 1 set (Manifold base part no.) VFR2100-5FZ 3 sets (2 position single part no.) VFR2200-5FZ 2 sets (2 position double part no.) VVFS2000-10A 1 set (Blanking plate assembly part no.)

Size: 4 (400), Valve Type: 1 (N.C.), Seal Material: A (NBR), Pressure Range: 70 (0 to 7 MPa), Thread: N (NPT), Port Size: 25 (1, SGH400), Pilot Valve: Y (V116, for 7 MPa), Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal), Light/Surge Suppressor: S (Surge Suppressor, Non-polar), Manual Override: Non-locking Push Type, Bracket: B1 (Bracket on Left Side)

Size: 4 (400), Valve Type: 2 (N.O.), Seal Material: A (NBR), Pressure Range: 70 (0 to 7 MPa), Thread: N (NPT), Port Size: 25 (1, SGH400), Pilot Valve: Y (V116, for 7 MPa), Voltage: 5 (24VDC), Electrical Entry: D (DIN Terminal), Light/Surge Suppressor: S (Surge Suppressor, Non-polar), Manual Override: Non-locking Push Type, Bracket: B1 (Bracket on Left Side)

Size: 400, Valve Type: N.C., Seal Material: NBR, Pressure Range: 0 to 7 MPa, Thread: NPT, Port Size: 1, SGH400, Pilot Valve: V116, for 7 MPa, Voltage: 24VDC, Electrical Entry: DIN Terminal, Light/Surge Suppressor: Surge Suppressor, Non-polar, Manual Override: Non-locking Push Type, Bracket: Bracket on Left Side

Size: 400, Valve Type: N.O., Seal Material: NBR, Pressure Range: 0 to 7 MPa, Thread: NPT, Port Size: 1, SGH400, Pilot Valve: V116, for 7 MPa, Voltage: 24VDC, Electrical Entry: DIN Terminal, Light/Surge Suppressor: Surge Suppressor, Non-polar, Manual Override: Non-locking Push Type, Bracket: Bracket on Left Side

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

Rod side mounting/Without auto switch Head side mounting/Without auto switch C D Mounting bolt Model C D Mounting bolt Model CQSB12-5D -10D -15D -20D -25D -30D CQSB16-5D -10D -15D -20D -25D -30D CQSB20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQSB25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQSB12-5D -10D -15D -20D -25D -30D CQSB16-5D -10D -15D -20D -25D -30D CQSB20-5D -10D -

VFS

Non plug-in type VV5FS3-10 VFS310-D VFS310-E Plug-in type with terminal block: 6 stations (Manifold base) VV5FS3-01T-061-02 1 (2 position single) VFS3100-5FZ 3 (2 position double) VFS3200-5FZ 2 (Blanking plate) VVFS3000-10A 1 Non plug-in type: 6 stations (Manifold base) VV5FS3-10-061-03 1 (2 position single) VFS3110-5D 5 (3 position exhaust center) VFS3410-5D

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

VFR2110-5D 5 sets (2 position single part no.) VFR2410-5D 1 set (3 position exhaust part no.) VVFS2000-R-01-2 1 set (Individual EXH spacer part no.) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc. The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

F 3 8 Option VV5FS4-10-061-03-A VFS4110-5D 1 4 The asterisk denotes the symbol for assembly.

VFR

VFR2110-5D 5 sets (2 position single part no.) VFR2410-5D 1 set (3 position exhaust part no.) VVFS2000-R-01-2 1 set (Individual EXH spacer part no.) VV5FR2-01T1-061-02 1 set (Manifold base part no.) VFR2100-5FZ 3 sets (2 position single part no.) VFR2200-5FZ 2 sets (2 position double part no.) VVFS2000-10A 1 set (Blanking plate assembly part no.)

Compact Hydraulic Cylinder

CHQ CHQ C D CHK Mounting Bolts CHQWB20-5D (M) C D C D Model Mounting bolt part no. Model Mounting bolt part no.

42

P U S H 4(A) 26.4 FREE LOCK 1(P) 2(B) VQZ SQ VFS 3(R2) 5(R1) Circuit diagram VFR Plug-in type Plug lead type VQ7 Release valve spacer: For D side mounting VVQ4000-24A-1D (Plug-in type) VVQ4000-24A-5D (Plug lead type) 149 (Plug-in type) 101.5 (Plug lead type) 59 Combination of VQ41ll (Single) and release valve spacer can be used as air release valve.