Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

L Dimension n: Stations L n 2 135.5 125 93.5 24.5 3 135.5 125 104 19 4 148 137.5 114.5 20 5 160.5 150 125 21 6 173 162.5 135.5 22 7 185.5 175 146 23 8 198 187.5 156.5 24 9 198 187.5 167 19 10 210.5 200 177.5 20 11 223 212.5 188 21 12 235.5 225 198.5 22 13 248 237.5 209 23 14 260.5 250 219.5 24 15 260.5 250 230 18.5 16 273 262.5 240.5 19.5 17 285.5 275 251 20.5 18 298 287.5 261.5 21.5 L1 L2

MGP

MGPM, MGPL Common dimensions (mm) Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB PA PB PW R Q GC JA JB 25, 50, 75, 100, 125, 150, 175, 200 250, 300, 350, 400 174 210 56.5 52 64 96.5 22 25 91.5 15.5 14.5 202 M12 45.5 55.5 46 56 54 62 7.5 M12 x 1.75 M14 x 2.0 25 31 M12 x 1.75 10.6 17.5 14.5 25.5 32.5 74 89 38 45 25 30 19 23 18 25 80 100 116 66 111.5 19 18

MGP

The intermediate strokes that do not use a spacer are made to order "XB10" shown on p.5.4-1. 125, 150, 175, 200, 250 MGP 10, 20, 30, 40, 50, 75, 100 12 16 M L MXS 20 25 MGP 20, 30, 40, 50, 75,100, 125, 150, 175, 200 M L 250, 300, 350, 400 MXQ 32 40 50 63 80 100 MXF MGP 25, 50, 75, 100, 125, 150, 175, 200 M L 250, 300, 350, 400 MXW OUT IN MXP Theoretical Force (N) MG Rod diameter (mm) Operating

MG

32.5 89 WA WB Bore size (mm) Standard stroke (mm) Q R S T U VA VB X YY YL Z 50, 75 st 100 to 175 st 200 to 250 st 300 to 400 st 50, 75 st 100 to 175 st 200 to 250 st 300 to 400 st 80 100 140 180 156 198 75 52 174 52 128 200 300 54 92 128 178 100 M12 x 1.75 24 28 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 166 210 188 236 90 64 210 72 148 220 320 47 85 121 171 124 M14 x 2.0 28 11

Compact

250, 300, 350, 400, 450, 500, 550, 600, 700, 800, 900, 1000, (1100), 1200, (1300), (1400), 1500, (1600), (1700), (1800), (1900), 2000 48 20 1000 Page 170 32 50, 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600, (700), (800), (900), (1000) Page 170 2000 10 25 LEMH Linear guide single axis type 48 50, 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600, (700), (800), (900), (1000),

4/5 Port Solenoid Valve

Station n L1 L2 Station 2 78 50 Station 20 438 410 3 98 70 4 118 90 5 138 110 6 158 130 7 178 150 8 198 170 9 218 190 10 238 210 11 258 230 12 278 250 13 298 270 14 318 290 15 338 310 16 358 330 17 378 350 18 398 370 19 418 390 65 Series SYJ7000 Type 42: Side Ported/SS5YJ7-42Stations C6,N7 C8,N9 [ ]: AC Grommet (G) 122 [126.4] Approx. 300 (Lead wire length) Manual override L1 14 L2 4-4.5

24

P PA PB PW Q R S T U VA VB WA WB X YY YL Z Nil N TF 50 st or less Over 50 st to 150 st Over 150 st to 250 st Over 250 st 50 st or less Over 50 st to 150 st Over 150 st to 250 st Over 250 st 80 Rc3/8 NPT3/8 G3/8 64.5 25.5 74 52 174 75 198 156 180 140 52 128 200 300 54 92 128 178 100 M12 x 1.75 24 28 100 Rc3/8 NPT3/8 G3/8 67.5 32.5 89 64 210 90 236 188 210 166 72 148 220 320 47 85 121 171

AC Servo Motor Driver (Pulse input type/Positioning type ）

Servo motor speed Electromagnetic brake 0 r/min Approx. 10 ms Approx. 210 ms ON Base circuit OFF Operation delay time of the electromagnetic brake Approx. 210 ms Operatin delay time of lock MBR (Electromagnetic brake interlock) (Note)ON OFF EM1 (Forced stop) ON (Disabled) OFF (Enabled) Note. ON: Electromagnetic brake is not activated.

Electric Actuator

5 Series LECP6 20 7.5 12 to 500 12 LEFS25 100 to 600 20 15 6 to 250 6 Step motor Series LECP1 (Servo/24 VDC) 40 10 16 to 500 16 Ball screw drive LEFS32 100 to 800 45 20 8 to 250 8 Series LECPA o0.02 Page 2 50 20 to 500 20 LEFS40 200 to 1000 Clean room compatible 60 23 10 to 250 10 7 2 10 to 500 10 LEFS16A 100 to 400 10 4 5 to 250 5 Servo motor (24 VDC) Series LECA6 11 2.5 12 to 500 12 LEFS25A

Refrigerated Air Dryers Series IDF/IDU

AM IDF370B Air outlet Air inlet AMD Port size (400) AMH (JIS 10K FF 150(6B)) (280) (310) AME Power cable outlet AMF SF 1670 Cooling water outlet (Rc 1 1/4) SFD (250) 100 (190) LLB Cooling water inlet (Rc 1 1/4) AD (90) (210) 1050 75 650 (390) GD Rc 3/8 Drain outlet (800) 1810 4 x 20 Power Transformer Integrated Type IDF370B The power transformer marked with the voltage symbol 9 is integrated

Table of Contents

81 90 4 101 110 5 121 130 6 141 150 7 161 170 8 181 190 9 201 210 10 221 230 11 241 250 12 261 270 13 281 290 14 301 310 15 321 330 L1 L2 3-7-33 34 Series VZS3000 Manifold Non plug-in type VV5ZS3-51Station 1Port size Grommet (G) 2-4.5 mounting hole 2n-Rc 1/8, 1/4 Manual override U side (n) (2) (1) Stations D side Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA

Table of Contents

220 250 260 2 67.5 77.5 107.5 117.5 IN port direction L1 Side ported L2 L1 Front ported L2 (When the electrical entry of a valve to be mounted is conduit terminal.)

Mechanically Jointed Rodless Cylinder Series MY1

Wn X-axis Xn Y-axis Yn Z-axis Zn Z X Wa 65 mm 0 mm 0.88 kg 5 mm 111 Wb 150 mm 0 mm 4.35 kg 42.5 mm 210 Y Y Wc 150 mm 111 mm 0.795 kg 42.5 mm Wd 150 mm 210 mm 0.5 kg 42.5 mm n = a, b, c, d 3.

Table of Contents

0 50 100 150 200 250 Supply pressure (kPa) Supply pressure (kPa) Detection side piping: 6 x 4 tubing 5 m Detection nozzle: 1.5 Detection side piping: 6 x 4 tubing 5 m Detection nozzle: 1.5 0.6 0.4 0.5 mm 0.25 mm 0.5 Detection distance (mm) Detection distance (mm) 0.3 0.4 0.3 0.2 0.15 mm 0.2 0.15 mm 0.1 0.1 0.03 mm 0.01 mm 0 0 0 50 100 150 200 250 0 50 100 150 200 250 Supply pressure (kPa

Battery-less

Lx = 400 mm, Ly = 250 mm, Lz = 1500 mm 4.

Refrigerated Air Dryers

IDF370D Compressed air inlet Compressed air outlet Port size (400) (JIS 10K FF 150 (6B)) (280) (310) Power cable outlet 1670 Cooling water outlet (Rc1 1/4) (250) 100 (190) Cooling water inlet (Rc1 1/4) (90) (210) 1050 75 650 (390) Rc3/8 Drain outlet (800) 1810 4 x 20 Power Transformer Integrated Type IDF370D The power transformer marked with the voltage symbol 9 is integrated into the refrigerated

IDU/IDF

Model IDU6D, IDF6D IDU8D, IDF8D IDU11C, IDF11C IDU15C, IDF15C B Breaker capacity Sensitivity current A 210 210 208 258 250 300 298 348 365 365 427 592 Model IDF6D IDF8D IDF11C IDF15C IDF22C1 IDF37C1 IDF55C IDF75C IDF120D IDF150D IDF190D IDF240D Model IDU6D IDU8D IDU11C IDU15C IDU22C1 IDU37C1 IDU55C IDU75C A 210 210 208 258 270 320 318 368 10A (100VAC) 5A (200VAC) 95 IDU22C1, IDF22C1 IDU37C1

e

(Wn) Mass (mn) Y-axis Yn Z-axis Zn X-axis Xn LXS LXS Z X Wa 5 mm 0 mm 0.88 kg 65 mm LC6m LC6m 111 Wb 42.5 mm 0 mm 4.35 kg 150 mm Y 210 Y Wc LZm LZm 42.5 mm 111 mm 0.795 kg 150 mm Wd 42.5 mm 210 mm 1.0 kg 150 mm LC3F2 LC3F2 n = a, b, c, d 3 Calculation of Composite Center of Gravity Xm Xm m3 = mn = 0.88 + 4.35 + 0.795 + 1.0 = 7.025 kg D-m D-m E-MY E-MY 1 m3 X = x (mn x xn) 1 7.025 = (0.88

smcmaintenancepartslist

JIS Standard Hydraulic Cylinder/Double Acting, Single Rod Cylinder with Lock/Double Acting, Single Rod CH2F CLS P.161 P.210 JIS Standard Hydraulic Cylinder/Double Acting, Single Rod Cylinder with Lock/Double Acting, Single Rod CH2G REAR P.162 P.210 JIS Standard Hydraulic Cylinder/Double Acting, Single Rod Sine Rodless Cylinder/Direct Mount Type CH2H REAS P.164 P.210 JIS Standard Hydraulic

LEC-OM02904

LE-CSB-SB 210 LE-CSB-RA 210 (5) AWG20 2 110/0.08 39.0 1.37 4.50.3 (4) RMFES-A(CL3X) AWG20 2 LE-CSB-RB 210 1. d d 2. 10% 3. 4.