Compact Hydraulic Cylinder

, 8 ) 80 + 30 (n 2) (n = 2, 4, 6, 8 ) 90 + 30 (n 2) (n = 2, 4, 6, 8 ) D-A3m D-G39 D-K39 Different surfaces 100 + 100 (n 2) (n = 2, 4, 6, 8 ) 100 + 100 (n 2) (n = 2, 3, 4 ) Same surface 75 1 pc. 90 10 80 35 75 80 90 Different surfaces 55 75 80 90 Same surface 35 + 30 (n 2) (n = 2, 3, 4 ) 75 + 30 (n 2) (n = 2, 4, 6, 8 ) 90 + 30 (n 2) (n = 2, 4, 6, 8 ) 90 + 50 (n 2) (n = 2, 4, 6, 8 )

High Vacuum Angle Valve

1 XGT 16 SYJ319XLAV16-90-2 SYJ519XLAV63-90-1 SYJ519XLAV63-90-1 25 40 50 63 80 100 160 XLAV CYV SYJ319XLAV16-90-2 SYJ3190(single) SYJ3290(double) XLCV16-90-1 XLFV SY3120--C4 (single) SY3220--C4 (double) XLCV XLGV Solenoid valve i Plate assembly o V114Initial exhaust solenoid valve !1 XLDV V114XLDV25-90-2 SYJ314XLDV40-90-2 Main exhaust solenoid valve !2 Plate assembly !

NCQ2/CQ2

70 75 80 85 90 95 100 55 60 65 70 75 80 85 90 95 100 125 150 D' Bolt part no.

Table of Contents

RS Q G Theoretical Output Rotary Angle (N) RS H A Operating pressure (MPa) Piston area (cm2) Bore size (mm) Rod size (mm) Operating direction 1.0 0.7 0.5 0.3 RZQ Release (Extended stroke end) 80 to 100 (90 10) Counterclockwise (L) Release (Extended stroke end) 80 to 100 (90 10) Clockwise (R) 80 56 40 24 0.8 R 12 6 110 77 55 33 1.1 H MI W S 150 105 75 45 1.5 R 16 8 200 140 100 60 2 H CEP1

Mounting: F (Front Flange), Bore Size: 50mm, Thread: Rc, Full Stroke: 100mm, First Stroke: 90mm, Auto Switch: M9P--Solid State , Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: SAPC (0.5m Cord Length, M8-3 Pin Connector), Number: 3 pcs.

Mounting: Front Flange, Bore Size: 50mm, Thread: Rc, Full Stroke: 100mm, First Stroke: 90mm, Auto Switch: M9P--Solid State , Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 0.5m Cord Length, M8-3 Pin Connector, Number: 3 pcs.

Air Cylinder Series CM2

+ 100 (n-2) 10 35 100 35 + 30(n-2) Note) When 2 D-A93/M9/M9W auto switches are included.

Free Mount Cylinder

, 100 Weight/( ): Denotes the values with D-A93.

5

+ 30 (n 2) (n = 2, 4, 6, 8) Note 1) 90 + 30 (n 2) (n = 2, 4, 6, 8) Note 1) Same surface 100 + 100 (n 2) (n = 2, 3, 4) 100 + 100 (n 2) (n = 2, 4, 6, 8) Note 1) 1 10 75 80 90 2 Different surfaces 35 75 80 90 Same surface 55 n Different surfaces 35 + 3 (n 2) (n = 2, 3, 4) 75 + 30 (n 2) (n = 2, 4, 6, 8) Note 1) 80 + 30 (n 2) (n = 2, 4, 6, 8) Note 1) 90 + 30 (n 2) (n = 2, 4, 6, 8) Note

ISO Cylinder

101 to 150 1 to 50 51 to 100 101 to 150 1 to 50 51 to 100 101 to 150 1 to 50 51 to 100 101 to 150 8 56 (62) 74 (80) 86 (92) 96 (102) 10 56 (60) 74 (78) 86 (90) 96 (100) 12 60 (63.5) 85 (88.5) 101 (104.5) 115 (118.5) 16 66 (69.5) 92 (95.5) 118 (121.5) 92 (95.5) 118 (121.5) 144 (147.5) 108 (111.5) 134 (137.5) 160 (163.5) 121 (124.5) 147 (150.5) 173 (176.5) 20 87 112

Free Mount Cylinder Series CU

, 100 Mass/( ): Denotes the values with D-A93.

Smooth Cylinder/Low Speed Cylinder

x 110L x 115L x 140L x 165L CQ-M10 x 85L x 90L x 95L x 100L x 105L x 110L x 115L x 120L x 125L x 150L x 175L 70 75 80 85 90 95 100 105 110 135 160 75 80 85 90 95 100 105 110 115 140 165 85 90 95 100 105 110 115 120 125 150 175 50 55 60 65 70 75 80 85 90 95 120 145 55 60 65 70 75 80 85 90 95 100 125 150 65 70 75 80 85 90 95 100 105 130 155 CQ-M5 x 50L x 55L x 60L x 65L x 70L x 75L x 80L x

Air Cylinder

135 160 185 12.5 25 37.5 50 75 100 125 52 65 77 90 115 140 165 40 41 46 77 90 102 115 140 165 190 12.5 25 37.5 50 75 100 125 54 67 79 92 117 142 167 Bore size Female Rod End (mm) With Air Cushion With Rod Boot (mm) (mm) ZZ JH JW 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 20 158 171 183 196 221 246 271 23.5 10.5 25 162 175 187 200 225 250 275 23.5 10.5 32 164

Magnetically Coupled Rodless Cylinder

Applicable load IC circuit, Relay, PLC Load voltage 24 V AC/DC or less 48 V AC/DC or less 100 V AC/DC or less Maximum load current 50 mA 40 mA 20 mA Contact protection circuit None Internal resistance D-A93/D-A96 (With indicator light) 1 or less (including lead wire length of 3 m) D-A93 D-A96 Auto switch part no.

Compact Cylinder

Cylinder model C D 45 50 55 60 65 70 75 80 85 90 115 140 55 60 65 70 75 80 85 90 95 120 145 60 65 70 75 80 85 90 95 100 125 150 D 65 70 75 80 85 90 95 100 105 130 155 75 80 85 90 95 100 105 110 115 140 165 Mounting bolt part no.

Table of Contents

(x 10-4 kgm2) Moment of inertia (x 10-4 kgm2) 5 40 4 30 3 20 2 10 1 0 0 0.2 0.4 0.6 0.8 0.2 0.4 0.5 0.3 0.6 Operating time (s/90) Operating time (s/90) MHY2-25D MHW2-40D 20 200 Moment of inertia (x 10-4 kgm2) Moment of inertia (x 10-4 kgm2) 15 150 10 100 5 50 0 0 0.2 0.4 0.6 0.8 1.0 0.2 0.4 0.6 0.8 1.0 Operating time (s/90) Operating time (s/90) 12-10-7 7 180 Angular Style Air Gripper Cam

Aluminum High Vacuum Angle Valve

XL-25 XL-40 XL-50 XL-63 XL-80 XL-100 XL-160 Item Rated heater voltage 90 to 240 VAC 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs. 3 pcs.

Air Cylinder

80, 100 @0 !

Air Cylinder

V A93V2 A93 A93V2 A93 V V V V No 100 V or less A90V A90 A90V A90 V V IC circuit Relay, PLC 24 V 12 V 2-wire Connector Yes C73C A73C V V V V No 24 V or less C80C A80C V V V V IC circuit Diagnostic indication (2-color indicator) Grommet Yes A79W V V 1: Water resistant type auto switches can be mounted on the above models, but in such case SMC cannot guarantee water resistance

Rotary Table/

type) 300 100 Displacement m Displacement m 250 90 200 80 50 130 150 MSQA30 (High precision type) 70 60 0 0 10 20 30 40 50 60 70 12 10 8 6 4 2 Load N Load N MSQ50 MSQB7A MSQB50 (Basic type) 100 200 Displacement m Displacement m 90 150 80 120 50 MSQA50 (High precision type) 70 60 0 0 20 40 60 80 100 120 6 8 10 14 12 2 4 Load N Load N 5 Rotary Table Air Consumption Air consumption is the volume