Electric Actuator

: In-line) 80 80 Lead 5: LEY32;C Regeneration (100%) Lead 4: LEY32D;C 70 70 Lead 10: LEY32;B Lead 8: LEY32D;B 60 60 Regeneration (50%) Vertical work load [kg] Regeneration (100%) Vertical work load [kg] 50 50 40 40 Lead 20: LEY32;A Lead 16: LEY32D;A 30 30 20 20 10 10 0 0 0 200 400 600 800 1000 1400 1200 0 200 400 600 800 1000 1400 1200 Speed [mm/s] Speed [mm/s] Allowable Stroke Speed [mm/

Compact Hydraulic Cylinder

V 200 V or less 3-wire (NPN equiv.)

Magnetically Coupled Rodless Cylinder

, 300 Bore size (mm) 0.3 0.2 0.4 0.5 0.6 0.7 100, 200, 300, 400, 500 15 750 1 axis 10 15 23 78 31 39 54 46 100, 200, 300, 400, 500, 600 20 1000 15 35 52 176 70 88 123 105 100, 200, 300, 400, 500, 600, 800 25 1200 CY3B CY3R 20 62 94 314 125 157 219 188 100, 200, 300, 400, 500, 600, 800, 1000 25 2 axes 98 147 25 490 196 245 343 294 1500 32 CY1S 161 241 804 322 402 563 32 483 Note) Strokes are

Mechanically Jointed Rodless Cylinder Series MY1

84 87 105 A B MY-S32 45 64 11.7 6 11 6.6 M8 x 1.25 113 131 A B MY-S50 55 80 14.8 8.5 14 9 M10 x 1.5 136 158 170 200 A B MY-S63 70 100 18.3 10.5 17.5 11.5 M12 x 1.75 206 236 A set of side supports consists of a left support and a right support.

Environment

200 0 0 0 0 0 10 5 15 20 0 10 5 15 20 30 25 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 1000 1000 800 800 1500 1500 m Me L8 [mm] L8 [mm] L8 [mm] L8 [mm] 600 600 L8 Wall 1000 1000 Y 400 400 500 500 200 200 0 0 0 0 0 10 5 15 20 0 10 5 15 20 30 25 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 Work load [kg] Work load [kg] Work

Table of Contents

400 300 200 100 0 VF B VFR VP4 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 800 700 600 500 400 300 200 100 0 VZS C VFS VS4 800 700 600 500 400 300 200 100 0 VQ7 D EVS VFN 800 700 600 500 400 300 200 100 0 E It is when the cylinder is extending that is meter-out

1

M12 x 1.75 32 40 50 63 117 117 12 16 20 25 24 24 24 28 33 34 36 38 200 121 122 124 124 48 48 48 52 45 46 48 50 300 171 172 174 174 83 84 86 88 124 200 200 300 300 105 105 167 167 15 17 29 29 25 27 39 39 77 77 20 24 24 24 40 44 44 44 120 120 200 200 200 300 300 300 124 124 128 124 20 72 320 90 74 148 220 121 171 28 64 210 236 35 47 85 100 11 32.5 89 48 188 210 166 17.5 M14 x 2.0 200 200

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

CS160-1618-G4 300 PNY-70 -X CS1WN300A-PS SDR-70 NLP-300A P7 G90 CS160-1618-G5 It is not available with auto switch.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

rate: 50% Stroke 300 mm Series MB, CA2 Pressure 0.5 MPa Load rate: 50% Stroke 500 mm Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation SY3140-01 Horizontal actuation 800 700 600 500 400 300 200 100 0 SY5140-02 800 700 600 500 400 300 200 100 0 SY7140-03 800 700 600 500 400 300 200 100 0 SY9140-04 Cylinder is in extending.

Air Cylinder Series MB

ML1C Bore size (mm) Standard stroke (mm) 32 40 50 63 80 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400,

Air Cylinder Series CA2

V 200 V or less 3-wire (NPN equiv.)

Table of Contents

4 70 >= 7 >= 70, 9= 5,'., ?4 0( 9= 5,'., ?

Integrated Controller

200 200 200 0 0 5 10 15 20 25 30 35 40 0 0 10 20 30 40 50 60 70 0 0 0 5 10 15 20 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 Horizontal/Bottom 800 800 800 800 L2 L2 [mm] L2 [mm] L2 [mm] L2 [mm] 600 600 600 600 Y 400 400 400 400 Mer m 200 200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20 0 10 20 30 40 50

AC Servo Motor Driver (Pulse input type/Positioning type ）

To comply with SEMI-F47 standard, it is unnecessary to change the initial value (200 ms). However, when the instantaneous power failure time exceeds 200 ms, and the instantaneous power failure voltage is less than 70% of the rated input voltage, the power may be normally turned off even if a value larger than 200 ms is set in the parameter.

Table of Contents

70 0 0 40 80 120 160 200 100 200 300 Outlet air flow rate (l/min (ANR)) Outlet air flow rate (l/min (ANR)) IDG100L (Type B products group) Refer to pages 14-19-28 to 29.

High Vacuum Angle Valve

Model XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 Rated voltage for heater 90 to 240 VAC Heater assembly quantity 1 1 1 1 H4 100C 100 V 200/40 200/50 400/100 600/150 Heater assembly quantity used Heater power W (Nominal value) Inrush/Power consumption (Option symbol, Operating voltage) 200 V 800/40 800/50 1600/100 2400/150 Heater assembly quantity 1 1 1 1 2 H5 120C 100 V 200/40 400/70 400/

MY1

(400) 200 l l MY1HT63 MY1HT50 100 2.

MY1

For detailed selection procedures, refer to pages 8-11-70 to 8-11-71. 100 200 300 400500 1000 1500 100 200 300 400500 1000 1500 100 200 300 400500 1000 1500 Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) 8-11-68 8-11-69 66 Series MY1H Model Selection Following are the steps for selecting the most suitable Series MY1H to your application. Calculation of Guide Load Factor 1.

Refrigerated Air Dryers Series IDF/IDU

VAC (50 Hz) Note 4) Single-phase/Three-phase: 200/220 VAC (60 Hz) Three-phase: 200 VAC (50 Hz) Three-phase: 200/220 VAC (60 Hz) ID Power consumption (W) 50/60 Hz 810/940 810/940 Single-phase 200 V 850/1070 850/1070 1300/1700 2000/2500 Three-phase 200 V IDG Operating current (A) 50/60 Hz 4.3/4.7 4.3/4.7 Single-phase 200 V 3.3/3.5 3.3/3.5 5.0/5.4 7.2/8.0 Three-phase 200 V AMG Applicable

Electric Grippers

Basic Compact LEHZ25 LEHZ25L 250 250 200 200 Overhang H [mm] Overhang H [mm] 70%, 40% 150 150 40% Pushing force 100% Pushing force 100% 100 100 70% 50 50 0 0 50 100 150 200 250 0 0 50 100 150 200 250 Gripping point L [mm] Gripping point L [mm] LEHZ32 250 200 Overhang H [mm] 150 40% 100 Pushing force 100% 70% 50 0 0 50 100 150 200 250 Gripping point L [mm] LEHZ40 250 200 Overhang H [mm] 150