Air Slide Table

V = 300 V = 500 0.2 V = 500 0.2 0.0 0.0 0 10 20 30 40 50 60 70 80 90 100 0 20 40 60 80 100 120 140 160 L3: Overhang Allowable range: 100 mm Allowable overhang L [mm] L3: Overhang Allowable range: 160 mm Allowable overhang L [mm] MXQ6B-50, 75Z 1.2 V = mm/s 1.0 Load mass m [kg] 0.8 V = 100 0.6 0.4 V = 200 V = 300 0.2 V = 500 0.0 0 50 100 150 200 250 300 L3: Overhang Allowable range: 300 mm

2

150 Nil C D Nil H L S 300 300 75 Auto-drains listed on page 95 are attached.

Made to Order

st Over 200 st to 300 st 30 st or less 25 st or less Over 300 st Over 300 st Over 30 st to 100 st Over 25 st to 100 st Over 100 st to 200 st Over 100 st to 200 st Over 200 st to 300 st Over 200 st to 300 st 30 st or less 25 st or less Over 300 st Over 300 st 12 16 20 25 32 40 50 63 300 300 167 167 20 24 24 24 300 300 300 300 171 172 174 174 24 24 24 28 105 105 117 117 40 44 44 44 121

CL

Bore e f 1 to 50 68 72 72 77 51 to 100 81 85 85 90 101 to 150 93 97 97 102 151 to 200 106 110 110 115 201 to 300 131 135 135 140 301 to 400 156 160 160 165 401 to 500 185 185 190 51 to 100 25 25 25 25 101 to 150 37.5 37.5 37.5 37.5 151 to 200 50 50 50 50 201 to 300 75 75 75 75 301 to 400 100 100 100 100 401 to 500 125 125 125 1 to 50 12.5 12.5 12.5 12.5 20 25 32 40 68 72 72 77 35 35 35

CATALOG

, 200, 300 40 100, 200, 300, 500 50 200, 300, 500 63 200, 300, 500 Courtesy of Steven Engineering, Inc. !

CL

Bore size (mm) 100 125 140 160 Kit no.

Table of Contents

the speed of 300 mm/s.

CL

125 to 160 Note) 125 to 160 with auto switch type is not available.

Table of Contents

200 100 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 MY3B max.

A

A I L A B I L I T Y 12 25, 50, 100 20 25, 50, 100, 200 32 50, 100, 200, 300 40 100, 200, 300, 500 50 200, 300, 500 63 200, 300, 500 Courtesy of Steven Engineering, Inc. !

Table of Contents

Discontinued Products and Equivalent Products Discontinued Product equivalent External dimension of a product Width x Depth x Height 76 x 76 x 178 122 x 122 x 259 160 x 160 x 311 220 x 220 x 461 63 x 63 x 159 76 x 76 x 172 (178) 90 x 90 x 204 (210) 122 x 122 x 259 160 x 160 x 311 63 x 63 x 159 76 x 76 x 172 (178) 90 x 90 x 204 106 x 106 x 225 122 x 122 x 259 160 x 160 x 311 76 x 76 x 152

CS1

Air Cylinder Series CS1 125, 140, 160, 180, 200, 250, 300 Variations CJ1 Basic style Standard variations Bore size (mm) Series Action Style Copper free Rod boot Page CJP CJ2 Standard Series CS1 125 140 160 180 200 250 300 Lube CM2 C85 Single rod Series CS1 Non-lube 1.10-2 CG1 (125 to 160 Only) 125 140 160 MB Air-hydro Series CS1 C95 Double acting CA1 125 140 160 180 200 250 300 Lube CS1 Double

Table of Contents

300 100 MI W S 100 300 Speed (mm/s) Speed (mm/s) Speed (mm/s) 300 300 CEP1 Max. 500 mm/s of high speed transfer is possible.

1

Tie-rod Length Changeable Range CS1 125 140 CA2, CVS, CV3, CBA All bore size 0 300 Model Bore size (mm) M Min. M Max. 200 22 250 26 300 32.5 160 18 180 20.5 270 15.5 Rod side 50 Head side 300 6-17-16 14 Simple Specials: -XC79: Tapped Hole, Drilled Hole, Pinned Hole Machined Additionally These changes are dealt with Simple Specials System.

Electric Actuators

160 300 150 1000 850 1000 860 400 260 400 250 1200 1050 1200 1060 500 360 500 350 600 460 600 450 Dimensions inside ( ) are for a 100 mm stroke.

High Vacuum Angle Valve

to space saving With restriction on exhaust direction (one way only: from valve element side to bellows side) B XL -100/160 Chamber A Model A [mm] B [mm] Weight [kg] Conductance [L/s] XLA-100-X152 108 300 10.6 300 XLA-160-X152 138 315 18.5 800 Vacuum pump Vacuum pump XL -100/160 Variations Leakage [Pam3/s] Flange size Option Model Valve type Operating pressure [Pa(abs)] Internal1 External1

Table of Contents

160 300 150 1000 850 1000 860 400 260 400 250 1200 1050 1200 1060 500 360 500 350 600 460 600 450 Dimensions inside ( ) are for a 100 mm stroke.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

SY3120-C6 Horizontal actuation 800 700 600 500 400 300 200 100 0 SY5120-01 800 700 600 500 400 300 200 100 0 SY7120-02 800 700 600 500 400 300 200 100 0 SY9120-03 Base Mounted Bore size Series CJ2 Pressure 0.5 MPa Load rate: 50% Stroke 60 mm Series CS1 Pressure 0.5 MPa Load rate: 50% Stroke 1000 mm 6 10 16 125 140 160 180 200 20 25 32 40 40 50 63 80 100 Series CM2 Pressure 0.5 MPa Load

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

] 0.42 0.33 0.59[0.25] Rc 1/8 3 position VFR 160 VZ520--C8 VP4 Note) [ ]: Denotes the normal position.

Smooth Cylinder/Low Speed Cylinder

D-X 1227 Smooth Cylinder Series CS2Y 125, 140, 160 How to Order 160 CS2 Y L 300 L 300 160 M9BW CDS2 With auto switch Y With auto switch (Built-in magnet) Number of auto switches Nil S 3 n 2 pcs. 1 pc. 3 pcs. n pcs. Smooth Cylinder Made to Order Mounting For details, refer to page 1229.