Magnetically Coupled Rodless Cylinder

50 mm/s.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Bore size/Stroke (mm) 6 10, 20, 30, 40, 50 8 10, 20, 30, 40, 50, 75 12 10, 20, 30, 40, 50, 75, 100 16 10, 20, 30, 40, 50, 75, 100, 125 20 10, 20, 30, 40, 50, 75, 100, 125, 150 25 10, 20, 30, 40, 50, 75, 100, 125, 150 Adjuster option Nil Without adjuster Functional option AS Extension end adjuster AT Retraction end adjuster Standard Nil A Both ends adjuster P Note) Axial piping CS Extension

Compact Cylinder Series NCQ8

L M9NL 197in (5 m) .

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

mm 190 30 MIS12-30D 30, 50 mm 300 10 MIS20-10D 20MIS 5 15 355 20 MIS20-20D Data 410 30 MIS20-30D 800 30 MIS25-30D 10 15 1000 50 MIS25-50D 1350 30 MIS32-30D 18 50 1650 50 MIS32-50D 10-11-9 9 Series MIW/MIS Construction: Double Finger Type (MIW) 8 12, 20 q y r !

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

mm 190 30 MIS12-30D 30, 50 mm 300 10 MIS20-10D 20MIS 5 15 355 20 MIS20-20D Data 410 30 MIS20-30D 800 30 MIS25-30D 10 15 1000 50 MIS25-50D 1350 30 MIS32-30D 18 50 1650 50 MIS32-50D 10-11-9 9 Series MIW/MIS Construction: Double Finger Type (MIW) 8 12, 20 w i !

Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

Indicator light Yes Applicable model Load voltage Type Special function Electrical entry Wiring (Output) 0.5 Nil 3 (L) 5 Note 2) DC Perpendicular 10 16 20 25 In-line AC (Z) M9NV F8N M9PV F8P M9BV F8B M9N M9P M9B 3-wire (NPN) Solid state auto switch 5 V 12 V IC circuit Relay PLC 3-wire (PNP) 24 V Grommet 2-wire 12 V Note 1) Lead wire length symbols: 0.5 mNil (Example) M9N 3 mL (Example) M9NL

Rotary Actuated Air Gripper/3-Finger Type MHR3/MDHR3 Series Size: 10, 15

0 10 20 30 40 50 F1 Gripping point L (mm) Gripping point L (mm) F1 F1 532 MHR3/MDHR3 Series Rotary Actuated Air Gripper 3-Finger Type Construction q !

High Vacuum Angle Valve

Example) -M9NL !

Aluminum High Vacuum Angle Valve

Example) -M9NL !

MHZ

2 L MRHQ 0 10 20 30 40 50 60 0 50 100 150 Misc.

MHZ

2 L MRHQ 0 10 20 30 40 50 60 0 50 100 150 Misc.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Because sizes 10, 20, 30 and 50 have the table press fit into an angular type bearing, they cannot be disassembled. 50 11-9-30

XM, XY

209 268 483 Stainless steel High Vacuum Angle/In-line Valve Double Acting/Bellows Seal XMC, XYC Series How to Order Angle type M9N A A 16 50 M9N XMC XMC Flange size 16, 25, 40 M9N A 25 1 Flange size 50, 63, 80 XYC XYC Flange size 25, 40 Flange size 50, 63, 80 In-line type A 1 50 M9N Note) The XMC and XYC series with solenoid valve are also available.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

-M9NL 7.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

20 82 36 36 41 20 74 65 90 50 20 8-8-27

Rotary Gripper Series MRHQ

50 Pressure 0.2MPa Pressure 0.2MPa Pressure 0.2MPa 0.2MPa Pressure 0.2MPa 40 40 Overhang H mm Overhang H mm 30 0.3MPa 0.3MPa 0.3MPa 0.6MPa, 0.7MPa 30 0.4MPa 0.4MPa 0.4MPa 0.3MPa 0.5MPa 0.5MPa 0.5MPa 20 0.4MPa 0.5MPa 20 0.6MPa 0.6MPa 0.6MPa 10 10 H H 0 10 20 30 40 50 0 10 20 30 40 50 Gripping point L Gripping point L mm Gripping point L mm MRHQ16 MRHQ16 Internal gripping 60 60 50 50 Pressure

XLAQ/XLDQ

Example) -M9NL Symbol Nil A B C Quantity Without auto switch 2 pcs. 1 pc. 1 pc.

Mounting: Both Ends Tapped, Bore Size: 63mm, Thread: Rc, Full Stroke: 125mm, First Stroke: 50mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Mounting: A (Both Ends Tapped), Bore Size: 63mm, Thread: Rc, Full Stroke: 125mm, First Stroke: 50mm

Rotary Actuated Air Gripper/3-Finger Type MHR3/MDHR3 Series Size: 10, 15

Lead wire length symbols: 0.5 m Nil (Example) M9N 1 m M (Example) M9NM 3 m L (Example) M9NL 5 m Z (Example) M9NZ Note) When using the 2-color indicator type, please make the setting so that the indicator is lit in red to ensure the detection at the proper position of the air gripper. 530 MHR3/MDHR3 Series Rotary Actuated Air Gripper 3-Finger Type Model/Specifications Nominal size 15 10 Action