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Standard Strokes Bore size [mm] Standard stroke [mm] 12, 16 10, 20, 30, 40, 50, 75, 100, 125, 150, 175, 200, 250 20, 25 20, 30, 40, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 32 to 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 Made to Order: Individual Specifications (For details, refer to page 491.)

Made to Order

Standard Strokes (mm) Max. manufacturable stroke Note 2) Bore size Standard stroke Note 1) 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 40 1000 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 1000 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 1000 Note 1) Intermediate strokes not listed above are produced

Table of Contents

Standard Stroke Bore size (mm) Standard stroke (mm) 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 Replacement Parts: Seal Kit 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Contents Kit no. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40-PS Rod seal 1 pc.

ISO Cylinder

101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 32 68 118 143 168 97 147 172 197 140 190 215 240 40 89 139 164 189 214 122 172 197 222 247 174 224 249 274 299 Boss-cut/Basic [mm] Bore size Stroke Item S ZZ 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to 200 201

LJ1H

Positioning distance (mm) 500 250 100 10 1 10 50.3 25.3 10.3 1.3 0.4 100 5.4 2.9 1.4 0.5 0.4 Speed (mm/s) 300 2.1 1.3 0.8 0.5 0.4 600 1.4 1.0 0.7 0.5 0.4 Values will vary slightly depending on the operating conditions.

IZx-OMT0049

200 150 100 50 0 50 100 150 200 250 150 100 50 0 50 100 150 150 100 50 0 50 100 150 (250) (200) (150) (100) (50) 0 50 100 150 200 250 (650) (550) (450) (350) (250) (150) (50) 50 150 250 350 450 550 650 0 0 mm () mm Installation distance in depth from ionizer to work piece [mm] Installation distance in widthfrom ionizer to work piece [mm] 50 50 100 100 1s 150 150 2s 200 200 0.5s 1s 2s 250

C95

, 125, 160, 200, 250, 320, 400, 500 40 1000 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 50 1000 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 63 1000 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 80 1000 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 100 1000 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 Intermediate strokes are available.

Cylinder with Lock

175 200 225 250 40 12.5 25 37.5 50 75 100 125 150 175 200 225 250 50 12.5 25 37.5 50 75 100 125 150 175 200 225 250 63 12.5 25 37.5 50 75 100 125 150 175 200 225 250 80 12.5 25 37.5 50 75 100 125 150 175 200 225 250 100 12.5 25 37.5 50 75 100 125 150 175 200 225 250 13 Cylinder with Lock Double Acting, Single Rod CP96N Series Dimensions: With Mounting Bracket * Refer to Basic (B) for other

CATALOG VC10

MODEL EW53 3-Way Normally Closed ATMOSPHERE EXHAUST EW53GG8DCCP EW53HH8DCCP EW53HJ8DCCP EW53JJ8DCCP EW53KK8DCCP 250 150 150 100 50 250 150 150 100 50 .022 .055 .055 .075 .150 .020 .048 .075 .075 .150 DE-ENERGIZED ENERGIZED MODEL EW53 3-Way Normally Closed WITH PIPED EXHAUST ** EW53GG8XCCP EW53HH8XCCP EW53HJ8XCCP EW53JJ8XCCP EW53KK8XCCP 250 150 150 100 50 250 150 150 100 50 .022 .055 .055

TABLE OF CONTENTS

MODEL EW53 3-Way Normally Closed ATMOSPHERE EXHAUST EW53GG8DCCP EW53HH8DCCP EW53HJ8DCCP EW53JJ8DCCP EW53KK8DCCP 250 150 150 100 50 250 150 150 100 50 .022 .055 .055 .075 .150 .020 .048 .075 .075 .150 DE-ENERGIZED ENERGIZED MODEL EW53 3-Way Normally Closed WITH PIPED EXHAUST ** EW53GG8XCCP EW53HH8XCCP EW53HJ8XCCP EW53JJ8XCCP EW53KK8XCCP 250 150 150 100 50 250 150 150 100 50 .022 .055 .055

C95

, 125, 160, 200, 250, 320, 400, 500, 600 63 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 100 Intermediate strokes are available.

Electric Slide Tables

100 200 Mey 50 100 m 0 0 0 0.2 0.4 0.6 0.8 1 0 1 2 3 4 5 0 0.5 1 1.5 2 2.5 3 Work load m [kg] Work load m [kg] Work load m [kg] 300 600 0 50 100 150 200 250 300 350 250 500 L5 200 400 L5 [mm] L5 [mm] L5 [mm] 150 300 Mer m 100 200 50 100 0 0 0 1 2 3 4 5 0 0.2 0.4 0.6 0.8 1 0 0.5 1 1.5 2 2.5 3 Work load m [kg] Work load m [kg] Work load m [kg] 300 600 0 50 100 150 200 250 300 350 250 500 200

Single Axis Electric Actuator Series LJ1H

Positioning distance (mm) 500 250 100 10 1 10 50.3 25.3 10.3 1.3 0.4 100 5.4 2.9 1.4 0.5 0.4 Speed (mm/s) 300 2.1 1.3 0.8 0.5 0.4 600 1.4 1.0 0.7 0.5 0.4 Values will vary slightly depending on the operating conditions.

Cylinder with Lock Series CLS

800 250 700 2000 600 200 200 CLJ2 500 180 Load mass: m (kg) Load mass: m (kg) 180 1000 160 700 800 900 400 CLM2 140 160 600 125 300 CLG1 500 140 400 CL1 125 300 200 200 MLGC CNG 100 500 400 300 200 100 100 500 400 300 200 100 MNB Maximum speed: V (mm/s) Maximum speed: V (mm/s) CNA Graph 6 Graph 3 0.4 MPa P < 0.5 MPa 0.4 MPa P < 0.5 MPa CNS 4000 2000 250 3000 CLS 250 200 2000 180 1000 CLQ

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Weight Product Weight: Top Mounting Type [kg] Series LEYG25M LEYG32M Stroke [mm] 30 50 100 150 200 250 300 30 50 100 150 200 250 300 Weight [kg] 1.7 1.9 2.2 2.6 3.0 3.3 3.6 3.1 3.4 4.0 4.7 5.3 5.7 6.2 Series LEYG25L LEYG32L Stroke [mm] 30 50 100 150 200 250 300 30 50 100 150 200 250 300 Weight [kg] 1.7 1.9 2.2 2.6 2.9 3.2 3.4 3.1 3.4 3.8 4.5 5.0 5.5 5.9 Product Weight: In-line Motor Type

Electric Actuator

LECP6 20 7.5 12 to 500 12 LEFS25 100 to 600 20 15 6 to 250 6 Step motor Series LECP1 (Servo/24 VDC) 40 10 16 to 500 16 Ball screw drive LEFS32 100 to 800 45 20 8 to 250 8 Series LECPA o0.02 Page 2 50 20 to 500 20 LEFS40 200 to 1000 Clean room compatible 60 23 10 to 250 10 7 2 10 to 500 10 LEFS16A 100 to 400 10 4 5 to 250 5 Servo motor (24 VDC) Series LECA6 11 2.5 12 to 500 12 LEFS25A 100

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

263 225 238 200 213 175 188 150 163 125 138 23 100 113 36 75 100 48 54 12.5 37.5 50 88 313 75 288 250 263 225 238 200 213 175 188 150 163 125 138 23 100 113 36 75 100 54 54 12.5 25 37.5 50 88 87 300 250 275 225 250 200 225 175 200 150 175 125 150 25 100 125 51 75 112 69 64 12.5 25 37.5 50 100 325 87 300 250 275 225 250 200 225 175 200 150 175 125 150 25 100 125 51 75 112 69 64 12.5 25 37.5

CLS

400 300 200 100 500 400 300 200 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa ) P 0.5 MPa ) P 250 4000 4000 3000 3000 200 180 2000 2000 160 250 140 Load weight: m (kg) Load weight: m (kg) 125 200 1000 1000 700 800 900 700 800 900 180 160 600 600 140 500 500 125 400 400 300 300 200 200 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V (mm/s

Magnetically Coupled Rodless Cylinder

, 150, 200 500 10 15 20 50, 100, 150, 200, 250, 300 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 1000 1500 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 25 3000 32 40 3000 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 5000 63 Note 1) Long stroke specification (XB11) applies to the strokes exceeding 2000 mm.

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Model LEY25 (Top/Parallel) LEY25D (In-line) LEY32 (Top/Parallel) LEY32D (In-line) Stroke [mm] Note 1) 30, 50, 100, 150, 200, 250 300, 350, 400 30, 50, 100, 150, 200, 250 300, 350, 400, 450, 500 30, 50, 100, 150, 200, 250 300, 350, 400, 450, 500 LEF Note 2) Horizontal 18 50 50 30 60 60 30 60 60 Vertical 8 16 30 9 19 37 12 24 46 Work load [kg] LEJ Force [N] Note 3) (Set value: Rated torque