Table of Contents

20 25 25 28 36 24 17.5 25 20 18.5 21 16 16 20 20 25 30 Grooves (Except 12, 16, 20, 25) (mm) Use grooves section a and section b in the figure below of the cylinder body for firmly fixing in the following case.

Table of Contents

25, 32 40, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16 20, 25 32, 40 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 10, 16, 20 25, 32 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50 mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50 mm/s Piston speed Air

Aluminum High Vacuum Angle Valve

XLS-16XLS16-20-G, C, T, D XLS-16-P XLS16-20-PG XLS-25XLS25-20-G, C, T, D XLS-25-P XLS25-20-PG Description Construction No. w y r e-1 e-2 Coil assembly Core assembly Armature assembly O-ring O-ring XLS25-30-1 XLS25-30-2 AS568-018V AS568-030V XLS16-30-1 XLS16-30-2 AS568-018V AS568-025V 465 b

Rotary Actuator/Vane Type

, 30, 40 RoHS How to Order B S E 20 180 S Z CRB2 u CDRB2 B W 20 180 S Z L M9B With auto switch q r e !

Smooth Cylinder/Low Speed Cylinder

40 12, 16, 20 25, 32, 40 50, 63, 80 100 10, 16 20, 25 32 6, 10 15, 20 25, 32 6, 10 15, 20 25, 32 12, 16 20, 25 32, 40 20, 25, 32 40, 50, 63 80, 100 32, 40 50, 63 80, 100 20, 25, 32 40, 50, 63 80, 100 20, 25 32, 40 50 6, 10 16 6, 10 16, 20 10, 15 25 Bore size (mm) 5 to 50 mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50 mm/s Piston speed Air cushion on both ends Shock absorber (CX2: Option) Rubber

Made to Order

, 32, 40 25, 32, 40 10, 20 16 to 40 16 to 40 10, 16, 20 16 to 40 16, 25, 40 16, 25, 40 16, 25 16 to 50 16, 25, 40 6 to 25 10 to 25 25 12 to 40 20 to 32 10, 15, 25 12 to 25 Vol. no.

5

Symbol Minimum Operating Pressure Rubber bumper Unit: MPa Bore size (mm) 12 16 20 25 Minimum operating pressure 0.03 0.02 Standard Strokes Bore size (mm) Standard stroke (mm) 12, 16 5, 10, 15, 20, 25, 30 20, 25 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 Replacement Parts/Seal Kit Theoretical Output Bore size (mm) Kit no.

Electric Actuator/Slider Type

5 15 20 0 10 5 15 20 30 25 0 10 20 30 50 40 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 L4 L4 [mm] L4 [mm] L4 [mm] L4 [mm] 600 600 600 600 Me X 400 400 400 400 m 200 200 200 200 0 0 0 0 0 10 20 30 50 40 0 20 40 60 80 0 10 5 15 20 0 10 5 15 20 30 25 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800

e-Rodless Actuator

Stroke range: 51 to 599 mm E-MY2 X168 Stroke Auto Switch Suffix Nominal size E-MY2 Nominal size Stroke Auto Switch Suffix XB10 Series/Nominal size 16 25 C H Cam follower guide type High precision guide type (Single axis) Series/Nominal size 16 25 High precision guide type (Single axis) H Example) E-MY2H25-300TAN-M9B-X168 Example) E-MY2H25-599TAN-M9B-XB10 2 Long stroke -XB11 Available with

2–4

Variations Standard stroke (mm) Series Bore size (mm) Cushion 5 10 15 20 25 30 35 40 45 50 75 100 12, 16 20, 25 Rubber cushion CQM 32, 40 50 Compact Cylinder/Guide Rod Type 12, 16, 20, 25, 32, 40, 50 Series CQM How to Order Without auto switch B 20 10 CQM B 20 10 M9B S CDQM With auto switch With auto switch Number of auto switches Mounting Bore size 12 16 20 25 32 40 50 Nil S n 2 pcs. 1 pc

Air Cylinder

30 25 M5 x 0.8 16 16 25 30 32 Rc1/8 16 16 28.5 25 40 Rc1/8 16 16 33 20 50 Rc1/4 18 18 40.5 20 63 Rc1/4 18 18 47.5 20 80 Rc3/8 22 22 60.5 20 100 Rc1/2 22 22 71 20 20 M5 x 0.8 16 15 (16) 23 30 25 M5 x 0.8 16 15 (16) 25 30 32 Rc1/8 16 15 (16) 28.5 25 40 Rc1/8 16 15 (16) 33 20 50 Rc1/4 18 17 (18) 40.5 20 63 Rc1/4 18 17 (18) 47.5 20 80 Rc3/8 22 22 60.5 20 100 Rc1/2 22 22 71 20 MB MB1 CA2 CS1

Auto Switch Guide

10-20-34 D-J79C Connector 10-20-35 D-F59/F5P/J59/J51 Grommet Tie-rod Terminal conduit 10-20-36 D-G39C/K39C D-M9N/M9P/M9B 10-20-37 D-M9NV/M9PV/M9BV D-F8N/F8P/F8B D-F9G/F9H 10-20-40 Direct Grommet D-Y59A/Y59B/Y7P 10-20-38 D-Y69A/Y69B /Y7PV 10-20-41 D-Y7G/7H 10-20-39 D-M5N/M5P/M5B D-H7NW/H7PW/H7BW 10-20-42 Band Grommet D-G59W/G5PW/K59W 10-20-43 2-color indication D-F79W/F7PW/J79W 10-20-44

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

The load factor for each direction can be obtained as follows. x = 0/250 = 0 y = 50/180 = 0.27 z = 200/1000 = 0.2 5. x + y + z = 0.47 1 LER LEH LEY -X5 1000 1500 1500 11LEFS 800 11LEJS 1000 1000 Lz 600 L2 [mm] L1 [mm] L3 [mm] 25A400 500 500 LEC 200 Ly Lx LEC S 0 5 10 15 20 25 0 0 5 10 15 20 25 0 0 5 10 15 20 25 0 LEC SS-T Work load [kg] Work load [kg] Work load [kg] LEC Y LEC Y Motorless

15

The load factor for each direction can be obtained as follows. x = 0/250 = 0 y = 50/180 = 0.27 z = 200/1000 = 0.2 5. x + y + z = 0.47 1 1000 1500 1500 800 1000 1000 Lz 600 L2 [mm] L1 [mm] L3 [mm] 400 500 500 200 Ly Lx 0 5 10 15 20 25 0 0 5 10 15 20 25 0 0 5 10 15 20 25 0 Work load [kg] Work load [kg] Work load [kg] 808 A Model Selection LEFB Series Motorless Type Table Accuracy (Reference

MHZ

25 32 40 6 10 16 20 25 32 40 6 10 16 20 25 32 40 32, 40 Double acting Normally closed Normally open Single acting 3.7 13 38 57 83 161 267 JIS Symbol Double acting Note 1) Values based on pressure of 0.5 MPa, gripping point L = 20 mm, at center of stroke.

MHZ

25 32 40 6 10 16 20 25 32 40 6 10 16 20 25 32 40 32, 40 Double acting Normally closed Normally open Single acting 3.7 13 38 57 83 161 267 JIS Symbol Double acting Note 1) Values based on pressure of 0.5 MPa, gripping point L = 20 mm, at center of stroke.

Integrated Controller

600 600 X 400 400 400 400 200 200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 Mey L5 [mm] L5 [mm] L5 [mm] L5 [mm] 600 600 600 600 m Wall L5 Y 400 400 400 400 200 200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20

Table of Contents

Auto switches are shipped together but not assembled. 6 10 16 20 25 32 6 mm 10 mm 16 mm 20 mm 25 mm 32 mm Action D Double acting Port thread type Type M5 x 0.8 Rc1/8 NPT1/8 G1/8 Bore size 6, 10, 16, 20, 25 32 32 32 Symbol Standard stroke (mm) 6, 10, 16 20, 25, 32 5, 10, 15, 20, 25, 30, 40, 50, 60 5, 10, 15, 20, 25, 30, 40, 50, 60, 70, 80, 90, 100 Nil TN TF Applicable Auto Switches/Refer

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

16 20 20 20 20 7.5 15 17.5 19.5 26.5 10 Stainless steel High Vacuum Angle/In-line Valve Manual Valve/Bellows Seal Series XMH, XYH How to Order XMH XYH 16 25 Angle type In-line type 1 2 3 2.

Auto Switch Guide

(Including band and screw) Cylinder series Applicable bore size (mm) 20 25 32 40 CDM2, CDBM2 CDLM2 BM3-020 BM3-025 BM3-032 BM3-040 Auto Switch Mounting Bracket Part No.