Smooth Cylinder/Low Speed Cylinder

Bolt for CQSYB without Auto Switch Cylinder model C Cylinder model C D 50 55 60 65 70 75 35 40 45 50 55 60 65 70 75 80 D 30 35 40 45 50 55 30 35 40 45 50 55 30 35 40 45 Mounting bolt part no.

High Vacuum Angle Valve

None XLF16-30-1-2 XLF25-30-1-2 XLF40-30-1-2 XLF50-30-1-2 XLF63-30-1-2 XLF80-30-1-2 Yes XLF16A-30-1-2 XLF25A-30-1-2 XLF40A-30-1-2 XLF50A-30-1-2 XLF63A-30-1-2 XLF80A-30-1-2 XLF High temperature None XLF16-30-1H-2 XLF25-30-1H-2 XLF40-30-1H-2 XLF50-30-1H-2 XLF63-30-1H-2 XLF80-30-1H-2 Yes XLF16A-30-1H-2 XLF25A-30-1H-2 XLF40A-30-1H-2 XLF50A-30-1H-2 XLF63A-30-1H-2 XLF80A-30-1H-2 XLFV General use

5

30 34 30 31 30 30 30 30 30 37.5 35 42.5 33 37 71.5 81.5 38.5 31.5 38 31.5 73 69 81 69 50 34 34 38 34 35 34 34 34 34 34 41.5 39 46.5 37.5 42 76.5 86.5 42 35.5 42 35.5 78.5 77 86.5 77 63 41 41 44 41 41.5 41 41 41 41 41 50 41 52 43 49 83.5 93.5 46.5 43 47 43 85.5 91 93.5 91 80 49.5 49 52.5 49 50 49 49.5 49 49.5 49 58 49 58.5 51.5 57.5 92 102 53.5 51 53.5 51 94 107 102 107 100 56.5 56 61 56

Electric Actuator/Slider Type

LEY25 (Top/Parallel)/LEY25D (In-line) LEY32 (Top/Parallel) LEY32D (In-line) Stroke [mm] Note 1) 30, 50, 100, 150, 200, 250, 300, 350, 400 30, 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 30, 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 Work load [kg] Horizontal Note 2) 18 50 50 30 60 60 30 60 60 Vertical 8 16 30 9 19 37 12 24 46 Pushing force lbf [N] Note 3) (Set value: 45 to 90%)

Auto Switch Guide

Applicable bore size (mm) Cylinder series 32 40 50 63 80 100 MDB1 BMP1-032 8-30-64

Auto Switch Guide

Applicable bore size (mm) Cylinder series 32 40 50 63 80 100 MDB1 BMP1-032 8-30-64

Auto Switch Guide

Applicable bore size (mm) Cylinder series 32 40 50 63 80 100 MDB1 BMP1-032 8-30-64

Made to Order

Dust resistant actuator Bore size (mm) Standard stroke Minimum operating pressure 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 32, 40 0.1 MPa 50 to 100 0.1 MPa MGPM Bore size Stroke XC92 Auto switch Suffix Dust resistant actuator Suffix Standard stroke 10, 20, 30, 40, 50, 75, 100 20, 30, 40, 50, 75, 100, 125, 150, 175, 200 25, 50, 75, 100, 125

15

20 30 0 10 40 50 20 30 60 70 80 LES Work load [kg] Work load [kg] 2000 LEPY LEPS 1000 800 1500 Horizontal L2 [mm] L2 [mm] LER L2 600 1000 Y m Me 400 LEH 500 200 LEY -X5 0 0 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 Work load [kg] Work load [kg] 11LEFS 2000 1000 11LEJS 800 m Me 1500 L3 [mm] L3 [mm] 600 25AL3 1000 Z 400 500 LEC 200 0 0 LEC S 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 Work

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

(In-line) LEY32 (Top/Parallel) LEY32D (In-line) Stroke [mm] Note 1) 30, 50, 100, 150, 200, 250, 300, 350, 400 30, 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 30, 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 Work load [kg] Horizontal Note 2) 18 50 50 30 60 60 30 60 60 Vertical 8 16 30 9 19 37 12 24 46 Force [N] Note 3) (Set value: 45 to 90%) 65 to 131 127 to 255 242 to 485 79 to 157

Air Cylinder

30 (44) 50 33 (47) Note 1) The values in ( ) are for long stroke.

Integrated Controller

EQY16 Without lock: 30 mm stroke, With lock: 30, 50, 100 mm strokes EQY25 Without lock: 30 mm stroke, With lock: 30, 50 mm strokes EQY32 Without lock: 30 mm stroke, With lock: 30, 50 mm strokes Rod end thread Nil Rod end female thread M Rod end male thread (1 rod end nut is included.)

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Mounting bolt Model C Model C D 30 35 40 45 50 55 60 65 70 75 110 135 35 40 45 50 55 60 65 70 75 80 115 140 45 50 55 60 65 70 75 80 85 120 145 Model C D 50 55 60 65 70 75 80 85 90 125 150 55 60 65 70 75 80 85 90 95 130 155 65 70 75 80 85 90 95 100 105 140 165 D 25 30 35 40 45 50 25 30 35 40 45 50 25 30 35 40 45 50 55 60 65 70 30 35 40 45 50 55 60 65 70 75 Mounting bolt Mounting bolt Mounting

2–4

-30 -35 -40 -45 -50 -75 -100 CDQMB50-10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 CDQMB12-5 -10 -15 -20 -25 -30 CDQMB16-5 -10 -15 -20 -25 -30 CDQMB20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CDQMB25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CDQMB32-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 40 45 50

Rotary Actuator/Vane Type

to 22 2 to 22 40 6.5 to 30 4.5 to 30 3 to 30 4.5 to 30 Symbol: A57 Symbol: A58 Both the long shaft and the short shaft are shortened.

Compact Cylinder

Mounting Bolt for C55 Model C D Mounting bolt Model C D Mounting bolt Model C D Mounting bolt C(D)55B20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B50-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B63-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B32-5 -

CQS

Model C D 25 30 35 40 45 50 25 30 35 40 45 50 25 30 35 40 45 50 55 60 65 70 30 35 40 45 50 55 60 65 70 75 C' D' 30 35 40 45 50 55 30 35 40 45 50 55 30 35 40 45 50 55 60 65 70 75 35 40 45 50 55 60 65 70 75 80 Mounting bolt Mounting bolt CQSKB12-5D -10D -15D -20D -25D -30D CQSKB16-5D -10D -15D -20D -25D -30D CQSKB20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQSKB25-5D -10D -15D -20D -

e-Rodless Actuator

Load weight Allowable moment E-MY2H/m3 E-MY2H/M3 E-MY2H/M1 E-MY2H/M2 60 50 60 50 60 50 60 50 40 40 30 30 30 30 q r w et 20 20 20 20 Moment (Nm) Moment (Nm) Moment (Nm) Moment (Nm) 10 10 10 10 MY2H25 MY2H25 MY2H25 MY2H25 5 5 5 5 4 4 MY2H16 4 4 3 3 3 3 MY2H16 MY2H16 2 2 2 2 MY2H16 0.2 1 1 1 100 200 300 400500 1000 1500 1 100 200 300400 500 1000 1500 100 200 300400500 1000 1500 100 200 300400500

MHZ

) MHZJ2-10C Internal Grip Pressure 0.7 MPa Pressure 0.7 MPa 20 MHZAJ2, MHZJ2 0.6 MPa 0.6 MPa Gripping force (N) 15 0.5 MPa 0.5 MPa 10 0.4 MPa 0.35 MPa 0.4 MPa 0.35 MPa 5 L 0 10 20 30 40 50 Gripping point L (mm) MHZJ2-16C 60 Pressure 0.7 MPa Pressure 0.7 MPa 50 Gripping force (N) 0.6 MPa 0.6 MPa 40 0.5 MPa 0.5 MPa 30 0.4 MPa 0.4 MPa 20 0.3 MPa 0.3 MPa 10 0.25 MPa 0.25 MPa 0 10 20 30 40 50

MHZ

2 L MRHQ 0 10 20 30 40 50 60 0 50 100 150 Misc.