209 268 483 Stainless steel High Vacuum Angle/In-line Valve Double Acting/Bellows Seal XMC, XYC Series How to Order Angle type M9N A A 16 50 M9N XMC XMC Flange size 16, 25, 40 M9N A 25 1 Flange size 50, 63, 80 XYC XYC Flange size 25, 40 Flange size 50, 63, 80 In-line type A 1 50 M9N Note) The XMC and XYC series with solenoid valve are also available.
20, 25, 32 5, 10, 15, 20, 25, 30, 40, 50 Precautions Be sure to read before handling.
L RR U Z ZZ 32 40 50 63 80 100 125 32 40 50, 63 80, 100 125 to 500 to 500 to 600 to 600 to 800 to 800 to 1000 23 23 30 30 42 42 50 10.5 11 15 15 23 23 28 13 13 17 17 26 26 30 28 28 40 40 60 60 64 154 158 182 182 228 228 267 164.5 169 197 197 251 251 295 10 10 14 14 22 22 25 14 14 20 20 30 30 32 160 164 190 238 279 170.5 175 205 261 307 Double clevis Model without air cushion is designed
M8 x 1.25 24 M20 x 1.5 1/8 9 14 25 22 19.5 17 9 30 25 10 19 10 26 0 0.033 13 10.5 8 45 6 33.5 5.5 8 30 M10 x 1.25 30 M26 x 1.5 1/8 9 14 32 22 19.5 17 9 30 25 10 19 12 26 0 0.033 13 10.5 8 45 6 37.5 5.5 10 30 M10 x 1.25 34.5 M26 x 1.5 1/8 9 14 40 24 21 22 10 38 41.2 15 30 14 32 0 0.039 16 13.5 11 50 8 46.5 7 12 39 M14 x 1.5 42.5 M32 x 2 1/4 11 18 Dimensions by Stroke (mm) Stroke 1 to 50 51
Applicable bore size (mm) Cylinder series 32 40 50 63 80 100 MDB1 BMP1-032 8-30-64
Applicable bore size (mm) Cylinder series 32 40 50 63 80 100 MDB1 BMP1-032 8-30-64
Applicable bore size (mm) Cylinder series 32 40 50 63 80 100 MDB1 BMP1-032 8-30-64
30 34 30 31 30 30 30 30 30 37.5 35 42.5 33 37 71.5 81.5 38.5 31.5 38 31.5 73 69 81 69 50 34 34 38 34 35 34 34 34 34 34 41.5 39 46.5 37.5 42 76.5 86.5 42 35.5 42 35.5 78.5 77 86.5 77 63 41 41 44 41 41.5 41 41 41 41 41 50 41 52 43 49 83.5 93.5 46.5 43 47 43 85.5 91 93.5 91 80 49.5 49 52.5 49 50 49 49.5 49 49.5 49 58 49 58.5 51.5 57.5 92 102 53.5 51 53.5 51 94 107 102 107 100 56.5 56 61 56
LEY25 (Top/Parallel)/LEY25D (In-line) LEY32 (Top/Parallel) LEY32D (In-line) Stroke [mm] Note 1) 30, 50, 100, 150, 200, 250, 300, 350, 400 30, 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 30, 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 Work load [kg] Horizontal Note 2) 18 50 50 30 60 60 30 60 60 Vertical 8 16 30 9 19 37 12 24 46 Pushing force lbf [N] Note 3) (Set value: 45 to 90%)
Black Bore size (mm) 20 Cylinder series 35 25 40 32 40 40 45 50 45 63 45 80 45 100 Mountable models 50 OUT () Blue Note) The operating range above indicates average values at room temperature including hysteresis (assuming approximately 30% dispersion).
driving force Fn (N) 50 500 40 30 20 300 200 100 10 Usable range Usable range 5 20 30 40 50 1 0 1 2 3 4 5 6 10 7 8 9 10 11 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3R20 CY3R63 1000 200 Allowable driving force Fn (N) Allowable driving force Fn (N) 100 500 400 50 300 30 200 100 10 20 30 40 50 Usable range
) MHZJ2-10C Internal Grip Pressure 0.7 MPa Pressure 0.7 MPa 20 MHZAJ2, MHZJ2 0.6 MPa 0.6 MPa Gripping force (N) 15 0.5 MPa 0.5 MPa 10 0.4 MPa 0.35 MPa 0.4 MPa 0.35 MPa 5 L 0 10 20 30 40 50 Gripping point L (mm) MHZJ2-16C 60 Pressure 0.7 MPa Pressure 0.7 MPa 50 Gripping force (N) 0.6 MPa 0.6 MPa 40 0.5 MPa 0.5 MPa 30 0.4 MPa 0.4 MPa 20 0.3 MPa 0.3 MPa 10 0.25 MPa 0.25 MPa 0 10 20 30 40 50
2 L MRHQ 0 10 20 30 40 50 60 0 50 100 150 Misc.
Dust resistant actuator Bore size (mm) Standard stroke Minimum operating pressure 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 32, 40 0.1 MPa 50 to 100 0.1 MPa MGPM Bore size Stroke XC92 Auto switch Suffix Dust resistant actuator Suffix Standard stroke 10, 20, 30, 40, 50, 75, 100 20, 30, 40, 50, 75, 100, 125, 150, 175, 200 25, 50, 75, 100, 125
20 30 0 10 40 50 20 30 60 70 80 LES Work load [kg] Work load [kg] 2000 LEPY LEPS 1000 800 1500 Horizontal L2 [mm] L2 [mm] LER L2 600 1000 Y m Me 400 LEH 500 200 LEY -X5 0 0 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 Work load [kg] Work load [kg] 11LEFS 2000 1000 11LEJS 800 m Me 1500 L3 [mm] L3 [mm] 600 25AL3 1000 Z 400 500 LEC 200 0 0 LEC S 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 Work
center trunnion Auto switch model 40 50 63 80 100 Center trunnion 35 55 Different surfaces Same surface 80 90 75 2 35 + 30(n 2) (n = 2, 3, 4, ) 75 + 30(n 2) (n = 2, 4, 6, 8, ) 80 + 30(n 2) (n = 2, 4, 6, 8, ) 90 + 30(n 2) (n = 2, 4, 6, 8, ) n Different surfaces D-A44 55 + 50(n 2) (n = 2, 3, 4, ) 75 + 50(n 2) (n = 2, 4, 6, 8, ) 80 + 50(n 2) (n = 2, 4, 6, 8, ) 90 + 50(n 2) (n = 2, 4, 6, 8,
(In-line) LEY32 (Top/Parallel) LEY32D (In-line) Stroke [mm] Note 1) 30, 50, 100, 150, 200, 250, 300, 350, 400 30, 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 30, 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 Work load [kg] Horizontal Note 2) 18 50 50 30 60 60 30 60 60 Vertical 8 16 30 9 19 37 12 24 46 Force [N] Note 3) (Set value: 45 to 90%) 65 to 131 127 to 255 242 to 485 79 to 157
30 (44) 50 33 (47) Note 1) The values in ( ) are for long stroke.
EQY16 Without lock: 30 mm stroke, With lock: 30, 50, 100 mm strokes EQY25 Without lock: 30 mm stroke, With lock: 30, 50 mm strokes EQY32 Without lock: 30 mm stroke, With lock: 30, 50 mm strokes Rod end thread Nil Rod end female thread M Rod end male thread (1 rod end nut is included.)
40 50 0 10 20 30 40 50 60 Gripping point L mm Gripping point L mm MRHQ16S MRHQ16C 60 Pressure 0.7MPa 40 Pressure 0.7MPa 50 0.6MPa 0.6MPa 40 30 Gripping force N Gripping force N 0.5MPa 0.5MPa 30 0.4MPa 20 0.4MPa 20 0.3MPa 0.3MPa 10 10 MHZ 0.25MPa 0.25MPa 0 10 20 30 40 50 60 0 10 20 30 40 50 60 MHF Gripping point L mm Gripping point L mm MHL MRHQ20S MRHQ20C 50 100 Pressure 0.7MPa Pressure