Cylinder (Tube) Inner Diameter(φ): 32, Stroke(mm): 175/70, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: [Block Shape] Block shape, Additional Function: With Intermediate Stop Function / Stroke with Adjustment, Environment, Applications: Standard, End Locking: No, Valves: No, Operating Pressure(MPa): 0.1～1.0, Support bracket:

Cylinder (Tube) Inner Diameter(φ): 32, Stroke(mm): 175/90, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: [Block Shape] Block shape, Additional Function: With Intermediate Stop Function / Stroke with Adjustment, Environment, Applications: Standard, End Locking: No, Valves: No, Operating Pressure(MPa): 0.1～1.0, Support bracket:

1

x 0.8 12 10 12 10 1 (P) 3 (R) 1 (P) XT34 Poppet VM200 2 port 3 port (A) 2 (A) 2 Side ported 1/4 Page 337 12 12 10 10 1 (P) 3 (R) 1 (P) VM400 3 port (OUT) 2 3 10 12 1 (N.C.)

Table of Contents

Bore size/Stroke (mm) 10 (25), 50, 75, 100 16 (25), 50, 75, 100, 125, 150, 175, 200 20 (25), 50, 75, 100, 125, 150, 175, 200 25 (25), 50, 75, 100, 125, 150, 175, 200 (25), (50), 75, 100, 125, 150, 175, 200 End lock 32 R End lock Note1) For the strokes indicated in the parentheses of the 10, 16 and 25, shock absorbers are to be mounted on both sides of the plate.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Series D 10-SY3000 SY3000-52-6A A 10-SY5000 SY5000-52-4A L Dimensions 10-SY7000 SY7000-70-2A EXH block disc Model A L D 16 18 20.5 22 24 16 18 20.5 22 Applicable fitting size d 4 6 8 10 12 5/32" 1/4" 5/16" 3/8" 10-KQP-04 10-KQP-06 10-KQP-08 10-KQP-10 10-KQP-12 10-KQP-03 10-KQP-07 10-KQP-09 10-KQP-11 6 8 10 12 14 6 8.5 10 11.5 32 35 39 43 45.5 32 35 39 43 By installing an EXH block disk in

Electric Actuators

8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

The minimum order quantity is 10 pieces. Order in multiples of 10.

Compact Cylinder

169 to 175.

Air Cylinder Series MB

15 15 + 10 (n 2) 15 + 15 (n 2) 15 + 20 (n 2) n 2 (Different surfaces, Same surface) 10 15 D-M9 D-M9V 1 10 15 15 + 5 (n 2) 10 + 10 (n 2) CJ1 n D-M9W D-M9WV D-M9AL D-M9AVL 2 (Different surfaces, Same surface) 15 10 CJP 1 15 10 10 + 10 (n 2) 10 + 15 (n 2) 15 + 10 (n 2) n CJ2 2 (Different surfaces, Same surface) 15 25 D-Z7 D-Z80 1 15 25 15 + 15 (n 2) 15 + 20 (n 2) 25 + 15 (n 2) CM2

MG

25 st to 175 st 20 20 21 19 10.5 22 78 84.5 122 12 0 6.5 44 25 25 26.5 16 8 19.5 78.5 85 122 16 0 6.5 43.5 MGPL (Ball bushing bearing) A, DB, E Dimensions A E Bore size (mm) DB 75 st or less Over 175 st 250 st Over 75 st to 175 st 75 st or less Over 175 st 250 st Over 75 st to 175 st 20 80 104 122 10 2 26 44 25 85.5 104.5 122 13 7 26 43.5 8-19-46 Series MGP Compact Guide Cylinder With End

SY

C4 C6 2 123 112.5 91.5 15.5 Stations n L1 L2 L3 L4 3 4 5 6 7 8 9 10 210.5 200 175.5 17.5 198 187.5 165 16.5 185.5 175 154.5 15.5 173 162.5 144 14.5 160.5 150 133.5 13.5 148 137.5 123 12.5 148 137.5 112.5 17.5 135.5 125 102 16.5 SS5Y3-45GUStations B-C4 C6 Stations n L1 L2 L3 L4 2 135.5 125 108 13.5 3 4 5 6 7 8 9 10 185.5 175 160.5 12.5 185.5 175 150 17.5 198 187.5 171 13.5 210.5 200 181.5

LX

10 1 1 10 10 10.1 10.1 5.1 5.1 1.1 1.1 0.2 0.2 Speed (mm/s) Speed (mm/s) 40 40 2.6 2.6 1.3 1.3 0.3 0.3 0.1 0.1 80 80 1.3 1.3 0.7 0.7 0.2 0.2 0.1 0.1 For transfer load of 1kg For transfer load of 3kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 100 100 50 50 10 10 1 1 10 10 10 10.1 5.1 5.1 1.1 1.1 0.2 0.2 Speed (mm/s) Speed (mm/s) 2.6 40

Table of Contents

20 12 10 20 20 20 40 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 2 Horizontal 8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room

LX

10 1 1 10 10 10.1 10.1 5.1 5.1 1.1 1.1 0.2 0.2 Speed (mm/s) Speed (mm/s) 40 40 2.6 2.6 1.3 1.3 0.3 0.3 0.1 0.1 80 80 1.3 1.3 0.7 0.7 0.2 0.2 0.1 0.1 For transfer load of 3kg For transfer load of 1kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 100 100 50 50 10 10 1 1 10 10 10 10.1 5.1 5.1 1.1 1.1 0.2 0.2 Speed (mm/s) Speed (mm/s) 2.6 40

24

[mm] Bore size [mm] A DB E Bore size [mm] A DB E 25 st or less Over 25 st to 175 st Over 175 st 25 st or less Over 25 st to 175 st Over 175 st 20 78 84.5 122 12 0 6.5 44 25 78.5 85 122 16 0 6.5 43.5 75 st or less Over 75 st to 175 st Over 175 st 75 st or less Over 75 st to 175 st Over 175 st 20 80 104 122 10 2 26 44 25 85.5 104.5 122 13 7 26 43.5 End Lock Mechanism Dimensions [mm] Bore size

2 Phase Stepper Motor/Without Motor Brake Series LXP

Allowable lateral load (F) Allowable plate rotation torque (T) Load (N) Torque (Nm) Stroke 50 75 100 125 150 175 200 Stroke 50 75 100 125 150 175 200 L L 42 2.87 m m 42 2.47 40 2.17 42 2.38 32 2.16 24 1.98 17 1.82 50 to 200mm stroke F T 10 Load weight m (kg) F 125 to 200mm stroke Plate non-rotating accuracy () 50 to 100mm stroke Non-rotating accuracy () 0.09 1 + 0.1 10 50 100 Eccentric distance

Made to Order

66 44 20 64 10.5 7 75, 100 167.5 50.5 63 50 or less 165 46 175 56 14 8 20 30 16.5 19.5 12.5 66 44 20 77 10.5 7 75, 100 175 56 Bore size K L M O P Q R RR RR1 U1 W Z A1 A2 B1 C1 H1 L1 MM X 32 14 46 34 M6 x 1.0 1/8 10 10 10 12 14 49.5 14 16 42 22 20.5 8 28.5 M14 x 1.5 23.5 40 14 46 40 M6 x 1.0 1/8 12.5 10 10 12 14 57 15 16 42 22 20.5 8 28.5 M14 x 1.5 23.5 50 17 59 50 M8 x 1.25 1/4 10.5 14 14

SX

Purchasing order is available in units of 10 pieces.

NCQ8

400 NCQ8B150-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCQ8B200-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCQ8B250-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCQ8B300-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCQ8B400-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 #10-24UNC-1 1/8 1 1/4

CATALOG

15 20 25 32 B O R E S I Z E / S TA N D A R D S T R O K E ( M M) B O R E S I Z E / L O N G S T R O K E ( M M) [XB11] 6 10, 20, 30, 40, 50 10 10, 20, 30, 40, 50 15 10, 20, 30, 40, 50 20 10, 20, 30, 40, 50, 75, 100 25 10, 20, 30, 40, 50, 75, 100 32 10, 20, 30, 40, 50, 75, 100 10 75, 100, 125, 150 15 75, 100, 125, 150 20 125, 150, 175, 200 25 125, 150, 175, 200 32 125, 150, 175, 200 Courtesy