Vacuum Parts List zsE2-0x-15o, zsPl-o0x-1 Note Return sp ng: For extmal vacuum syslem use only (NZXl0O) 30 Module Assembly / Ejector TYPe Nll( $enie Gon$nucNion / Moilule Assem[lY {swftcHfilted P32OO152-m ,a-iSE2-OX-t S1D 'isnouaas (Val,,/e unit) / NZXl -VAK5-"-O-S Manifold System / Ejector Type For individual exhausl plug (M5 x6 (W5j3)) A.a..ibt *t fansler plate adapler 4t{F1&tl -Tinr -otrea Rl6
signal list (CN-1/F connector) Driver dimensions Signal description Control signal power supply Servo ON input Alarm clear input Counter clear input Gain switching input Pin no. 12 13 14 19 20 21 22 23 24 25 26 Symbol IM COM GND OZ+ Pin no. 1 2 3 4 5 6 7 8 9 10 11 Signal description Torque monitor signal Control signal power supply Symbol COM+ SRV-ON A-CLR CL GAIN DIV CWL CCWL ALM COIN SP
signal list (CN-1/F connector) Driver dimensions Signal description Control signal power supply Servo ON input Alarm clear input Counter clear input Gain switching input Pin no. 12 13 14 19 20 21 22 23 24 25 26 Symbol IM COM GND OZ+ Pin no. 1 2 3 4 5 6 7 8 9 10 11 Signal description Torque monitor signal Control signal power supply Symbol COM+ SRV-ON A-CLR CL GAIN DIV CWL CCWL ALM COIN SP
Positioning complete signal 19 OZ+ Z Z 10 20 COIN OZ+ 14 GND VDC 12 to 24V 13 4.7k COM Torque monitor: Zout 4.7k 12 + IM VDD 30V max. 15mA max. 11 Speed monitor: Zout 4.7k 4.7k SP + 21 CZ Z (Pin 14 is GND.) 26 FG CN I/F 205 Non-standard Motor Compatible Drivers Mitsubishi Electric Corporation Drivers for LJ1, LG1, LX Dimensions (RS-232C without optional unit) Driver 5 100 40 1-5 hole 5
signal list (CN-1/F connector) Driver dimensions Signal description Control signal power supply Servo ON input Alarm clear input Counter clear input Gain switching input Pin no. 12 13 14 19 20 21 22 23 24 25 26 Symbol IM COM GND OZ+ Pin no. 1 2 3 4 5 6 7 8 9 10 11 Signal description Torque monitor signal Control signal power supply Symbol COM+ SRV-ON A-CLR CL GAIN DIV CWL CCWL ALM COIN SP
Sp ng washer: 2 pcs. Nomihal diameleri 3mm 41-140.F (5-60.C) Non-lube Not available Male thfead (srd.)
32 6 0.5 Section AA (Housing interior) Coupling mounting dimensions 11 Series LG1H Nonstandard Motors/Matsushita Electric Industrial Co., LTD Drivers Dimensions 5.2 150 160 168 5.2 20 A 105 3 Summary of input /output signals (connector CN-1/F) Dimension table Pin No. 1 2 3 4 5 6 7 8 9 10 11 Pin No. 12 13 14 19 20 21 22 23 24 25 26 Symbol COM+ SRV-ON A-CLR CL GAIN DIV CWL CCWL ALM COIN SP
list (CN-1/F connector) Signal description Control signal power supply Servo ON input Alarm clear input Counter clear input Gain switching input Pin no. 12 13 14 19 20 21 22 23 24 25 26 Symbol IM COM GND OZ+ OZ CZ CW+ CW CCW+ CCW FG Signal description Torque monitor signal Control signal power supply Pin no. 1 2 3 4 5 6 7 8 9 10 11 Symbol COM+ SRV-ON A-CLR CL GAIN DIV CWL CCWL ALM COIN SP
':2 wne(red, black),3 wircked, whil6. black), 20 in t . lmpact resitarce 3oG .Insulaion esisran@ 50m or mor undr tre tesl voltagE soovDc(Belwen cse and cable) . withstand vo tage 1500VAc 1 min(Betwen cass and cable) 'AmbienrtemDeratu 10 60C' {14" 14OqR ' Proldion slructure IEC sp 1P67, Wate4rmf(JlSC0920). Oil-pooJ xll118 in ld wire is rquird, L is pul al lhe end of model number.
Series SP adsorption plate was developed with an extremely flat surface to preserve the flatness of a workpiece surface, and adsorb without deforming. The SP adsorbs workpieces, and holds them without leaving wrinkles, air bubbles or marks, making the series ideal for adsorption and fixing in place thin sheets, glass, substrates, and soft workpieces.
Series SP adsorption plate was developed with an extremely flat surface to preserve the flatness of a workpiece surface, and adsorb without deforming. The SP adsorbs workpieces, and holds them without leaving wrinkles, air bubbles or marks, making the series ideal for adsorption and fixing in place thin sheets, glass, substrates, and soft workpieces.
Sp ng washer: 2 pcs. Nomihal diameleri 3mm 41-140.F (5-60.C) Non-lube Not available Male thfead (srd.)
':2 wne(red, black),3 wircked, whil6. black), 20 in t . lmpact resitarce 3oG .Insulaion esisran@ 50m or mor undr tre tesl voltagE soovDc(Belwen cse and cable) . withstand vo tage 1500VAc 1 min(Betwen cass and cable) 'AmbienrtemDeratu 10 60C' {14" 14OqR ' Proldion slructure IEC sp 1P67, Wate4rmf(JlSC0920). Oil-pooJ xll118 in ld wire is rquird, L is pul al lhe end of model number.
lor the ncessaryslat@ns only, enler the back pressure.he.k valve pan no and nd te fle number of nanrfold slations In he sp@lcaton sheet Terminal block box kit 1 to 10 (20) Lead vflre kit wilh 0.6m lead wrs Note 2) For specialD N rar ngth, nd.ale D!
Bore: 50mm, Port Thread: TF (G), Piping: A (Axial Direction), Stroke: 30mm, Action: D (Double Acting), Roller Material: M (Carbon Steel)
Bore: 50mm, Port Thread: TF (G), Piping: A (Axial Direction), Stroke: 30mm, Action: T (Single Acting/Spring Extend), Roller Material: M (Carbon Steel)
Bore: 50mm, Port Thread: TF (G), Piping: A (Axial Direction), Stroke: 30mm, Action: B (Double Acting Spring Type), Roller Material: M (Carbon Steel)
Cylinder (Tube) Inner Diameter(φ): 50, Stroke(mm): 30, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Others, Additional Function: Standard, Environment, Applications: Standard, Cushion: Rubber cushion, Operating Pressure(MPa): 1.0, Port thread type: G, Body Options: Without option, Auto Switches: Without auto switch, Lead Wire
Bore: 50mm, Port Thread: G, Piping: Axial Direction, Stroke: 30mm, Action: Single Acting/Spring Extend, Roller Material: Carbon Steel, Option: -, Port and Lever Position: -, Auto Switch: -, Leadwire or Prewired Connector: -, Number: -
Bore: 50mm, Port Thread: G, Piping: Axial Direction, Stroke: 30mm, Action: Double Acting Spring Type, Roller Material: Carbon Steel, Option: -, Port and Lever Position: -, Auto Switch: -, Leadwire or Prewired Connector: -, Number: -