Table of Contents

129 84 26 154 68 27.5 8 56 71 6.5 62 58 75 138 84 32 165 77 27.5 8 56 71 6.5 71 17-5-11 9 Series LVC Dimensions With flow rate adjustment With by-pass (Max.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

(Note 3) Series VFS300O-COM is also possible C bl ompatl e Plug A I (0 ssy ptlon Compatible Plug Ass'y (Option] t ABs'V No. Cable length . eomponents I ~YNo .

5 Port Solenoid Valve

For manifold exploded view, refer to page 75.

0.4

RD SD LRUN PW 93.5 116 B RATE 42 (35) 66 75 80 x 1 x 10 STATION NO.

•

C 54 56 ZPR10C I 56 ~PRllII ZPR10 ZPR16U 16 18 12.5 21.5 30.4 46.5 57.5 80.5 91.5 3.5 1.2 C Deep type 54 ZPR13 54 54 mml 54 'y o ' O A ~B Ij G 75 ~ 1 2 10 60 83 94 6 76 2; '" ZPR16D 16 18 15 6 5l 61 84 Z ~6 ~O 75 75 ZPR?S 76 76 76 Apphcable tube mm ZPI!~2 ZPR40 128 Q O P R .S 129 128 04 4. 20.6 15.6 10,4 130 .6 ' . 16.6 6 21.6 12.8 Applidal\le lWe 0.0 128 1 30 ZI!J!

CLA

With 1 switch 10 75 80 90 Wrth 1 switCh 10 75 80 90 0-8586 OGSKS Different 35 75 80 90 With 2 surface sWitches Same Surface 35 75 80 90 Av ro SWitch ~'B5 '86 D-GSoK5 '" " .J ~ ~ D-A4 Different SS.. 3O(n-2} 75+JO

Compact Rotary Actuator

e C a u t i o n o f d i s a s s e m b l e D i s a s s e m b l i n g p r o c e d u r e A s s e m b l e p r o c e d u r e T r o u bl e s hoo t i n g Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

JXCx-OMT0061CN

CN1: . 21 6.1 . 21 6.2 . 21 6.3 . 22 (1) (C24V,M24V,0V) . 22 (2) (EMG) . 22 1 - (3) (BL RLS) . 22 6.4 . 23 1 . 23 2 . 24 3() . 25 7. CN5: . 26 7.1 . 26 7.2 . 26 7.3 . 27 8.

CE2

M14 x 1 Notice label Locking condition indication plate S + Stroke ZZ + Stroke Metal connector With rod boot + ZZ + 5/4 stroke Stroke range A B C BL C CC D D E EE E F FF GA GB GC GD GL H1 J K M AA AL BB Bore size (mm) Without rod boot With rod boot 40 50 63 80 100 25 to 850 25 to 700 45 30 71.5 22 60 42 20 44 22 16 21 11 32 10 10 150.5 15 26 54 10 8 M8 x 1.25 6 11 27 25 to 800 25 to 650

CE2

, 63D-A3C-6, 100D-A3C-10 50D-A3C-5, 80D-A3C-8 1.08 0.32 0.38 0.38 0.73 Double knuckle Accessory bracket 0.19 0.05 0.05 0.05 0.14 Knuckle pin 10-12-49 7 Series CE2 Dimensions: 40 to 100 RC 1/4 Pressurized locking port RC P Rod side cylinder port RC P Head side cylinder port Basic style RC 1/4 Unlocking port Unlocked when pressurized 7 (6 core twisted pair shielded wire) Width across flat BL

Compact

Model N E F LXFHSB _ 25 1 5 1 160 138 60 30 (50) LXFHSB _ 50 176 145 90 60 (50) LXFHSB _. 75 6 201 210 188 90 60 100 LXFHsB _ 100 6 226 235 213 90 60 100 tlsclriD lclltolo 0inffsifls .

5 Port Solenoid Valve Series SV1000/2000/3000/4000

0 Mounting and Option D side 1 3 2 Stations U side Option None Name plate (With station number) Name plate (Without station number) Without name plate Name plate (With station number) Name plate (Without station number) Mounting Symbol Nil AA BA Dl Al Bl Direct mounting DIN rail mounting SS5Y5-M10F1-05D-C86 1 set (Type 10 5-station manifold base part no.)

LX Series Compact Electric Actuators

S C hwPmfile tlDD|niD Acilaton wiflr$uiiles $enies t)(P Specif ications Brake specifications 9troke (mm) 50, 75, '100, 125,150,175,200 Motor 2-phase stepping motor s-phase steppang motor Screw (mm) 08, Lead 6 08, Lead 12 @8.

Vacuum

Construction/Seals Spring pin Set screw 75 NztA Senies I Single/ Dimensions inch (mm) Note) The diagram on th lett is lor NZFA200. The bracket localion shown is on the left sid.

Vacuum

Suciion SCFi,/ (Namin) 0.18 (5) 0.3s (10) o.78 (22) 1.13 (32) Ak Consumplion SCF[, (N/m n) 0.46 (13) 0.81 (23) 1.63 (46) 2.65 (75) Max. Vacuum Pressure -25 in Hg (-630 mmHg) Exhaust Belease Built-in silencer. Manilold common exhausl .

Electric Rotary Table

30, 50 75, 100 30, 50, 75 100, 125, 150 50, 75 50, 100 50, 100 150 16 3 25 9 25 5 Miniature Rotary Table Step Motor (Servo/24 VDC) Step Motor (Servo/24 VDC) Rod type Slide table type Series LEPS Basic type Series LER High precision type Series LEPY Series LERH CAT.ES100-94 CAT.ES100-92 Series LER Series LEPY Series LEPS Max. speed (/s) Rotating torque (Nm) Size Size Max. work load (kg) Stroke

Vacuum Ejector Series ZM

Silencer assembly Blanking plate assembly Adapter A assembly Adapter B assembly Gasket E End plate L Gasket BL Gasket BB Gasket BR End plate R Clamp rod Related Equipment Note 1) Note 1) Note 1) Refer to Table (1).Note 2) The used quantity varies depending on the part number. Note 1) : Symbol corresponding to the port thread type.

Fieldbus System

Refer to the attached operation manual for mounting method. w Type Al Note 1) V V Bl Note 1) V 10 Side ported 11 Bottom ported* Note 1) Enter the number of stations inside l when it is larger than the number of valve stations. (Refer to DIN Rail Option below.)

2/3 Port Valve

Screw-in (6A to 50A) Flange (32F to 50F) 4.2-35 VND How to Order Body option Standard (BC6) Stainless steel body S Only screw-in style VND 15A Air Oparated 2 D S 0 Option With indicator With bracket None B L BL With bracket, indicator Only valve size 1, 2, 3, 4 Port size Valve style Valve size Symbol Symbol Portsize Rc(PT) Symbol Orifice size (mm) 0 2 4 N.C. N.O.

Title not found

Hea\,y duty gu de rod type Wdide bearng lOpott typ" l l l l l l l l l l r r t t t r r l l l t t t t t t l l l l tza t t t t t t t t t l t t t t t t t t t l ,75 _ t t t l l l l l l l znn t r t t t t l t l l ' For bore sizes 12 & 16, only tu15 x 0.8 is availade.