SMC Basic Pneumatics

x 7.5 N 28.U 33.38 30 (23) 26 41.5 35.2 19.97 22.t7 1 2 x 8 U 33.18 39.16 J) (24) 30 46.1 39.7 20.92 25.05 12x9 N 43.79 5 r.00 45 (27135 58.3 50.2 ?

CE2

(Assuming approximately 30% dispersion.)

CE2

(Assuming approximately 30% dispersion.)

JXCx-OMT0061CN

5F () Sub Function 9.5.1 1 F0 (P.30) 2 F0 Address 9.5.1 (P.30) 3 F0 Address(0) 0 4 F0 DATA(H) 9.5.1 (P.30) 5 F0 DATA(L) 6 F0 7 F0 815 F0 H= L= 46 - 11

Compact Rotary Actuator

Table5 Allowable load N Size Load direction Fsa Fsa Fsb Fr Fr 10 15.7 7.8 14.7 15 19.6 9.8 19.6 20 49 29.4 49 30 98 49 78 40 108 59 98 Fsb Point of application of force of Fr is the center of shaft flat face and longer dimension of the key.

IZT40/41/42

[mm] Bar length [mm] 160 220 340 400 460 580 640 820 1120 1300 1600 1900 2320 2500 4H/4L 4 6H/6L 6 8H/8L 8 AH/AL 10 5H/5L 3/16 7H/7L 1/4 9H/9L 5/16 BH/BL 3/8 : With piping on one side : With piping on both sides : Unrecommended piping Symbol High-voltage cable length [m] 1 1 2 2 3 3 The number of high-voltage cable holders differs depending on the high-voltage cable length.

AP3100

Indicator Switch (Option) Specification Wiring Diagram ISH NPN 3.8 to 30 VDC Max. 0.4 VDC Max. 11 mA Max. 20 mA AWG 24 3 m Blue (BL), Brown (BN), Black (BK) Code Output type Power supply voltage Output voltage Supply current Output current BN + BL Indicator switch Load BK Lead wire Cable length Color (Lead wire) Cable 1082

Series AP3100

Indicator Switch (Option) Specification Wiring Diagram ISH NPN 3.8 to 30 VDC Max. 0.4 VDC Max. 11 mA Max. 20 mA AWG 24 3 m Blue (BL), Brown (BN), Black (BK) Code Output type Power supply voltage Output voltage Supply current Output current BN + BL Indicator switch Load BK Lead wire Cable length Color (Lead wire) Cable 1082 Diaphragm Valve for Ultra High Purity Manually operated type (For

1

SY7000221-1A [for 10 valves (30 pcs.)] SY7000222-1A [for 10 valves (30 pcs.)]

Air Slide Table

30 30 30 30 30 40 40 40 40 40 40 Stroke 50 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 11 150 150 Low thrust with high rigidity type MXQB 10 10 10 10 10 20 20 20 20 20 30 30 30 30 30 40 40 40 40 40 Stroke 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 53 150 150 Single side-ported type MXQC 10 10 20 20 30 30 Stroke 40 40 50 50 75 75 Page 67 100 Height

Battery-less

500 500 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 0 5 10 15 20 25 30 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 2000 2000 Mey 1500 1500 1500 1500 L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 1000 1000 1000 1000 Wall L5 Y 500 500 500 500 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 0 5 10 15 20 25 30 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work

Table of Contents

4.5 10 15 20 30 40 50 60 3 2 6 30 60 8 25 35 10 20 40 10 35 Flow rate Q kg/h Figures inside [ ] indicate the saturated steam holding heat (kcal/kg).

MXS Series Air Slide Table

F A F Lr 6 6 6 Lr=24mm 0.020 0.04 0.04 0.015 0.03 0.03 Table deflection mm Table deflection mm Table deflection mm MXS6-10 MXS6-20 MXS6-30 MXS6-30 MXS6-20 MXS6-10 MXS6-40 MXS6-50 0.010 0.02 0.02 MXS6-20 MXS6-30 MXS6-10 MXS6-40 MXS6-50 MXS6-40 MXS6-50 0.005 0.01 0.01 10 20 30 40 10 20 30 0 10 20 30 40 0 0 Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf 8 8 8 Lr=50mm 0.020

Vacuum Ejector Series ZM

30 30 Suction flow rate 20 20 20 Suction flow rate 10 10 10 Flow characteristics are expressed in ejector vacuum pressure and suction flow.

0.4

Max. voltage (with no load): 30 Vrms (42.4 V peak) or less Max. current: q 8 A or less (including shorts), and w When controlled by a circuit protector (fuse) with the following ratings: VQC VQZ SQ VFS VFR VQ7 No-load voltage (V peak) Max. current rating 0 to 20 [V] 5.0 100 Over 20 [V] and up to 30 [V] Peak voltage value (2) A circuit (class 2 circuit) with maximum 30 Vrms (42.4 V peak)

Wedge Cam Operation Gripper Series MHK2

D. holding MHKL2 series 40 40 30 30 Pressure 0.6MPa Holding force N Holding force N Pressure 0.6MPa 0.5MPa 20 20 0.5MPa 0.4MPa L L 0.4MPa 0.3MPa 10 10 0.3MPa 0 0 60 10 20 30 40 50 10 20 30 40 50 60 Holding point L mm Holding point L mm MHKL2-20S MHKL2-20C 80 60 70 50 60 Holding force N Holding force N 50 40 Pressure 0.6MPa Pressure 0.6MPa 40 30 0.5MPa 0.5MPa 30 0.4MPa 20 0.4MPa 20 0.3MPa

Electric Rotary Table

to 420 20 to 280 30 to 420 20 to 280 30 to 420 Step Motor (Servo/24 VDC) Pushing speed [/sec] 20 30 20 30 20 30 Max. angular acceleration/deceleration [/sec2] Note 2) 3,000 0.5 Backlash [] 0.05 Positioning repeatability [] Impact/Vibration resistance [m/s2] Note 4) 150/30 Actuation type Special worm gear + Belt drive Max. operating frequency [c.p.m] 60 Operating temp. range [C] 5 to 40 Operating

CLA

-600 20-600 :J2 35 86 11 5 '/, Y. 64 20 40 10 95 17 27 59 13 12 MaX 1 25 7 30 80 20 40 10 102 17 26 67 18 15 Ml0Xl .2S 25 52 14 11 3 21 30 72 23 17 M1 2X 175 30 52 14 124 21 31 76 25 19 M12X1.75 7 40 99 80 1 750 20750 37 40 102 129 'I.

•

25 25 25 ZPY100 10 12 15 25 41 52 75 86 6 ZPV16 j6, ~16D 16 e26 42 7 '1a 53 70 +87 Applicable tube ,mm ZP20 I Applicable tube 0.0' ~ Q I>R' ZPY25 30 30 28 30 30 28 30 30 28 30 30 28 N4 (Nylon tube .4/2.5) 14.5 5 1.8 ZPY?2 , ~Y40 36 34 36 33 37 35 , 36 34 I ',ills (fIyjon tuIMIIl!

5 Port Solenoid Valve Series SV1000/2000/3000/4000

Max. voltage (with no load): 30 Vrms (42.4 V peak) or less Max. current: (1) 8 A or less (including shorts), and (2) When controlled by a circuit protector (fuse, etc.) with the following rating Max. current rating No-load voltage (V peak) 5.0 0 to 20 [V] 100 Over 20 [V] to 30 [V] Peak voltage value 2) A circuit (class 2 circuit) with maximum 30 Vrms (42.4 V peak) or less, and a power supply