Smooth Cylinder/Low Speed Cylinder

flats KA G G D E H1 AL B1 K A N F N B C M S + Stroke H ZZ + Stroke (mm) Bore size (mm) 40 50 63 80 100 Stroke range Up to 500 Up to 600 Up to 600 Up to 700 Up to 700 B C A AL B1 D E F G H H1 J K KA M MM N P S ZZ 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 15 17 17 21 21 51 58 58 71 72 8 11 11 13 16 M8 x 1.25 M8

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

MHSH3-32D MHSH3-32D 120 100 100 Pressure 0.6 MPa Pressure 0.6 MPa 80 Gripping force (N) Gripping force (N) 0.5 MPa 0.5 MPa 80 60 0.4 MPa 0.4 MPa 60 0.3 MPa 0.3 MPa 40 F 40 0.2 MPa 0.2 MPa 20 20 0.1 MPa 0.1 MPa F F 0 0 10 10 20 30 40 50 20 30 40 50 Gripping point L (mm) Gripping point L (mm) MHSH3-40D MHSH3-40D External grip 160 200 F Pressure 0.6 MPa Pressure 0.6 MPa 160 Gripping force (N

Air Cylinder

0.8 NN MM C D B 0 0.3 B 0 0.3 A F NA H Z + Stroke S + Stroke NB F For details of the mounting nut, refer to page 63.

Air Cylinder

Mounting B Basic (Double-side bossed) L Axial foot F Flange U Trunnion Cushion Nil Rubber bumper A Air cushion Made to Order Refer to page 225 for details. 40 150 A L CM2KW Z M9BW 40 150 CDM2KW A L Z With auto switch With auto switch (Built-in magnet) Bore size Number of auto switches Rod end thread 20 20 mm 25 25 mm 32 32 mm 40 40 mm Nil Male rod end F Female rod end Non-rotating rod type

Air Cylinder Series MB

GE K F A BN K A H S + Stroke H + Stroke ZZ + 2 strokes e e 10.2 13 9 f f l + Stroke l 10.2 h h + Stroke ZZ + 2 strokes With rod boot (mm) Bore size (mm) Stroke range (mm) Effective thread length (mm) Width across flats GL1 A B B1 H1 B2 BN BP C D Ee11 F GA GB GC GD GL 32 40 50 63 80 100 12 12 15 12 18 20 10 14 18 18 22 26 19.5 27 32 32 37 37 22 30 35 35 40 40 54 63 75 90 102 116 17 22 27 27

Aluminum High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

5

Rod flange: CG1YF F FT 4 x FD FX0.15 B E 0 0.05 H B FX0.15 Head flange: CG1YG 4 x FD E 0 0.05 FX0.15 B FT F B FX0.15 ZZ + Stroke (mm) Flange Bore size (mm) B E F FX FD FT H Head flange ZZ 20 40 12 2 28 5.5 6 35 120 25 44 14 2 32 5.5 7 40 126 32 53 18 2 38 6.6 7 40 128 40 61 25 2 46 6.6 8 50 147 50 76 30 2 58 9 9 58 171 63 92 32 2 70 11 9 58 171 80 104 40 3 82 11 11 71 207 100 128 50 3 100

Air Cylinder Series CA2

flats KA G G D E H1 AL B1 K A N F N B C M S + Stroke H ZZ + Stroke (mm) Bore size (mm) 40 50 63 80 100 Stroke range Up to 500 Up to 600 Up to 600 Up to 700 Up to 700 B C A AL B1 D E F G H H1 J K KA M MM N P S ZZ 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 15 17 17 21 21 51 58 58 71 72 8 11 11 13 16 M8 x 1.25 M8

NCM

8 6 7 8 6 11.5 9 125 13 7 5 6 7 5.5 10.5 8 150 (40) (40) (40) (40) (12) (12) (40) (40) 25 Type 1 Type 2 Type 3 (40) (40) (40) (12) (12) (40) (40) 34 50 (40) (12) (12) (40) (40) 36 27.5 32.5 75 1, 2 (40) (12) (12) (40) 31 24 28 36 100 W W (40) (12) (12) W 27.5 21 25 38 32 125 (40) (12) (12) 25 19 22.5 34.5 29 150 (40) (12) (12) (40) 30 23 27 35 25 (12) (12) 35 20.5 15.5 18.5 29 24 50 (12)

Free Mount Cylinder

(mm) 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pad type 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pressure gauge position Thread dia.

Air Cylinder

40 155 180 205 230 Bore size Stroke range B E F FX FD FT H 20 Up to 125 40 12 2 28 5.5 6 35 25 Up to 200 44 14 2 32 5.5 7 40 32 Up to 200 53 18 2 38 6.6 7 40 40 Up to 200 61 25 2 46 6.6 8 50 * End boss is machined on the flange for E.

Made to Order

-XC88 -XC89 CA2 Basic: CA2B G 2 x P 2 x Cushion valve G Width across flats KA 4 x J MM D E B C H1 AL WA WA B C B1 A K N ZZ + Stroke S + Stroke N F M H (mm) Bore size (mm) 40 50 63 80 100 AL B B1 C D E F G H1 J K KA M MM N P S WA H ZZ A 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 17.5 15 15 19 19 15 17 17 21 21 8 11 11 13 16 M8

Magnetically Coupled Rodless Cylinder

1 o q u r y e @6 @5 @3 @7 CY1L10 to 40 @2 $0 #9 @0$0 t !9 #5$2 #8 !2 !0 !6!7@4 @1 !8 !4 !5 @8 #7 #6 $1 F G Area G (10) Enlarged view F 10, 15 #0 @7 #1 w u i o !1 #2 q !3 r y e @6 @5 @3 $1 10 Component Parts Material No. Description Note No.

Rotary Clamp Cylinders

D C C G F 4 x F With Arm (mm) Head End Flange (mm) F D E C F B E D G C B A G A Model MK2G32 MK2G40 MK2G50 MK2G63 Model MK232-N MK240-N MK250-N MK263-N 0.15 56 0.1 34 48 65 39 M6 x 1.0 45 M8 x 1.25 20 5.5 67 8 18 0.15 0.1 15 to 25 62 40 54 72 46 M6 x 1.0 45 M8 x 1.25 20 5.5 67 8 18 76 50 67 89 58 65 M8 x 1.25 M10 x 1.5 22 6.6 88 9 22 0.15 0.1 30 to 40 92 60 80 108 57.5 65 M10 x 1.5 M10 x

Rotary Actuator/Vane Type

CRA1 B port A port A port B port A CRQ2 29 F 9h9 0 0.036 MSQ A parallel key is used instead of single flat for size 40.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

(Except D-P5DWL) A L F G D MU Bore size 32 40 50 63 80 100 32 mm 40 mm 50 mm 63 mm 80 mm 100 mm DMounting brackets are shipped together, (not assembled).

Electric Actuator/Slider Type

16 6 40 46 25 9.5 48 57.5 32 16 63 79 40 0 68 68 Step motor, Stroke: 300 mm Step motor Top surface of table and motor are level.

High Vacuum Angle Valve

Example) XLA-25H0-2M9NJLA-XAN1A 18 XLm Series Dimensions XLA/F (With D-M9mJm) C E E C E Fn D Heat-resistant auto switch H B A Heater G A [mm] Series Valve size A B C D E Fn G H 25 50 121 48 27 12 40 26 44 40 65 171 66 39 11 55 41 67 50 70 185 79 46 11 75 52 72 XLA XLF XLC/G25, 40 (With D-M9mJm) XLC/G50 (With D-M9mJm) C E C E E C E E C E Fn B A Fn D D Heat-resistant auto switch H J K H B A

Parallel Style Air Gripper Series MHZ

MHZ2-6D/MHZA2-6D MHZ2-25D/MHZL2-25D 100 Pressure 0.7 MPa 6 Pressure 0.7 MPa 0.6 MPa Gripping force (N) Gripping force (N) Gripping force (N) 80 0.6 MPa 0.5 MPa F 4 0.5 MPa 60 0.4 MPa 0.4 MPa 0.3 MPa 40 0.3 MPa 2 0.2 MPa 0.2 MPa 20 F 0 10 20 30 0 20 40 60 80 100 Gripping point L (mm) Gripping point L (mm) External Grip MHZ2-10D/MHZL2-10D MHZ2-32D MHZA2, MHZ2, MHZL2 250 Pressure 0.7 MPa 20

MHZ

MHZ2-6D/MHZA2-6D MHZ2-25D/MHZL2-25D MHZ 100 Pressure 0.7 MPa Pressure 0.7 MPa 6 MHF Pressure 0.7 MPa Pressure 0.7 MPa 0.6 MPa 0.6 MPa 80 Gripping force (N) Gripping force (N) 0.6 MPa 0.6 MPa 0.5 MPa 0.5 MPa MHL 4 0.5 MPa 0.5 MPa F 60 0.4 MPa 0.4 MPa 0.4 MPa 0.4 MPa MHR 0.3 MPa 0.3 MPa 40 0.3 MPa 0.2 MPa 0.3 MPa 0.2 MPa 2 0.2 MPa 0.2 MPa MHK 20 MHS 0 10 20 30 0 20 40 60 80 100 F Gripping point