Table of Contents

-ASD330F-01-08 10-ASD230F-M5-06 2.

2

Model Section Type Round type Standard G27-10-R1 G36-10-01 G46-10-01 0.02 to 0.2 MPa setting G27-10-R1 G36-4-01 G46-4-01 Round type (with color zone) Standard G36-10-01-L G46-10-01-L 0.02 to 0.2 MPa setting G36-4-01-L G46-4-01-L Square embedded type Note 2) Standard GC3-10AS [GC3P-010AS (Pressure gauge cover only)] 0.02 to 0.2 MPa setting GC3-4AS [GC3P-010AS (Pressure gauge cover only

Multi-channel Digital Sensor Monitor ( compatible)

Panel mount adapter (Model: ZS-26-B) Panel mount adapter + Front protective cover (Model: ZS-26-01) 48 conversion adapter (Model: ZS-26-D) : The panel mount adapter can be rotated by 90 degrees for mounting. : Front panel of this Controller meets IP65 (if 48 conversion adapter is used, it meets IP40).

3 Port Solenoid Valve

(Double) Port size C2, C4 (2, 4 one-touch fitting) Mass (g) 31 40 V110-C2/C4 Flow Characteristics Flow characteristics Port size 2a, 2b 1(P)2a/2b C [dm3/(sbar)] C [dm3/(sbar)] 2a/2b3(E) 1(P) b b C2 C4 0.03 0.03 0.22 0.19 0.05 0.05 0.31 0.29 C6 The effective area S (mm2) is approximately 5 times as large as the sonic conductance (S C x 5). 2 3 Port Solenoid Valve Series VV100 Construction

Table of Contents

(Including band and screw) Operating Range Bore size (mm) Bore size (mm) Auto switch model Auto switch model 20 25 32 40 50 20 25 32 40 50 D-C7/C8 D-H7 D-B5/B6 D-G5/K5 D-B7/B8 D-G7/K7 D-B7/B80 BMA2 -025 BMA2 -032 BMA2 -040 BMA2 -050 BMA2 -020 10 8 10 9 10 D-B73C/B80C D-C7/C80 BA -32 BA -04 BA -05 BA -01 BA -02 10 8 10 9 10 D-C73C/C80C D-B5/B64 BM1 -01 BM1 -02 BM1 -32 BM1 -04 BM1 -05 10 8

EX500-GPR1A.eng

SI Unit for VQC/S0700 Series Valves ( EX500-Q 01 ) SI Unit for SV Series Valves ( EX500-S 01 ) M3 28: 4 pcs. ( Plus-minus slot round head screw ) Supply/exhaust block assembly Supply/exhaust block assembly 1.

5

01 03 50 12 Part no.

Multi-channel Digital Sensor Monitor

Panel mount adapter (Model: ZS-26-B) Panel mount adapter + Front protective cover (Model: ZS-26-01) 48 conversion adapter (Model: ZS-26-D) : The panel mount adapter can be rotated by 90 degrees for mounting. : Front panel of this Controller meets IP65 (if 48 conversion adapter is used, it meets IP40).

Large Size Vacuum Module: Series ZR

Stations Port location R16 Arrangement (Right valve station which is looked from valve side is first station.) 01 1 Left side Right side R L B 06 6 Refer to (About individual spacer.)

Sensor Range: 1 [For Vacuum (0~-101kPa)], Port Size: 01 [R 1/8 (w/M5 Female Thread)], Output Specification: 28 [Current Output (4~20mA) Type], Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]

Sensor Range: 1 [For Vacuum (0~-101kPa)], Port Size: 01 [R 1/8 (w/M5 Female Thread)], Output Specification: 28 [Current Output (4~20mA) Type], Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]

ZR

06 ZZR1 1 RV3 ZR1 1 R1 ZR1 Port location Stations 01 R L Left side Right side 1 Arrangement (Right valve station which is looked from valve side is first station.)

CATALOG

G33-4-01 G33-10-01 G43-2-01 G43-4-01 G43-10-01 G43-10-01 G43-4-01 G43-10-01 Accuracy + 3% (full span) Courtesy of Steven Engineering, Inc. !

Table of Contents

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFT04-01 KFT04-02 KFT06-01 KFT06-02 KFT06-03 KFT08U-01 KFT08U-02 KFT08U-03 KFT08N-01 KFT08N-02 KFT08N-03 KFT10U-02 KFT10U-03

KJ

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFT04-01 KFT04-02 KFT06-01 KFT06-02 KFT06-03 KFT08U-01 KFT08U-02 KFT08U-03 KFT08N-01 KFT08N-02 KFT08N-03 KFT10U-02 KFT10U-03

Table of Contents

-06-X214 AS2301F-01-06-X214 2.

Compact 5-Port Solenoid Valve

C2: 2 (SMC) C4: 4 (SMC) 9.1 (C6) 10.3 (C2, C4) D D 3/5 B 2 E 3/5 B 2 B 2 B 2 E B 2 27 (C2, C4) 25.8 (C6) A 4 A 4 A 4 1 P P 1 4 A 4 A S (Pitch of C2, C4) P = 6.5 One-touch fitting [1(P), 3/5(E) port] Applicable tubing: 8 (SMC) (Pitch of C6) P = 9 * Refer to page 97 for dimensions of external pilot and built-in silencer. * Refer to pages 65 to 68, 79, and 80 for dimensions when L6, b, and

VS 8-2/VS 8-4

8 Manifold Block Assembly Standard 18 mm and 26 mm sizes mixed MBS8020 01 D M MBS80 0 01 D 2 With/Without tie-rod Size 2 4 Size 18 mm Size 26 mm With/Without tie-rod Cylinder port size 01 01B Side ported 1/8 Bottom ported 1/8 Nil Nil -1 Included None 1 Included None Thread type Wiring specifications D S Double wiring Single wiring Rc NPTF G Note) Nil T F Note) Conforms to ISO1179-1 Thread

A_HEC-OM-K001

Signal 1 DC output 2 DC output 3 FG DC connector HED007-C2* (HED003-C2*, HED005-C2*) DDK D/MS3102A20-15S Connect the DC cable connector of Heat Exchanger. Pin No.

A

+.002 1.88 2.56 3.50 .75 NCA1-P325 1.25 0 0.75 +.004 .53 .78 .62 -.01 +.002 Courtesy of Steven Engineering, Inc. !