CRBU

(mm) L2 (3 x P) L2 max Q2 Y Size Q1 = M 10 5.5 to 8 M3 Y 1 (mm) C1 = C Y = X Q1 L1 max 15 7.5 to 9 Size M3, M4 Y 1.5 L2 = C2 = C 10 20 5.5 to 14 M3 X 1 9.5 to 10 Y 1.5 M3, M4, M5 L1 (3 x P) 15 7.5 to 18 M3, M4 X 1.5 M3, M4, M5, M6 30 11 to 13 Y 2 Q2 = M X = L1 = 20 9 to 20 X 1.5 M3, M4, M5 M3, M4, M5, M6, M8 M3, M4, M5, M6 40 14 to 15 30 Y 4.5 11 to 22 X 2 11-3-24 Simple Specials

Rotary Actuator/Vane Style Series CRB2

(Example) For M3: L1 = 6 mm Applicable shaft type: W CRB2 Q1=M L1+(3 x P) CRBU2 (mm) L1= Y Q2 Size (mm) Y= CRB1 15 M3 1.5 to 9 X Q1 Size 15 20 M3, M4 M3 1.5 to 10 4 to 18 L2+(3 x P) MSU 20 X= 30 M3, M4, M5 M3, M4 2 to 13 4.5 to 20 L2= 30 40 M3, M4, M5 M3, M4, M5 4.5 to 15 5 to 22 Q2=M CRJ Symbol: A3 Symbol: A4 CRA1 The short shaft can be further shortened by machining male threads into it

Rotary Actuator

(Example) For M3: L1 = 6 mm (Example) For M3: L2 = 6 mm $Applicable shaft type: W $ Applicable shaft type: W L1 + (3 x P) Q1= M (mm) L1 = Y Q2 Size (mm) Y = 15 X Q1 1.5 to 9 M3 Size 20 15 L2 + (3 x P) 1.5 to 10 M3, M4 4 to 18 M3 30 20 2 to 13 M3, M4, M5 X = 4.5 to 20 M3, M4 L2 = 40 30 4.5 to 15 M3, M4, M5 Q2 = M 5 to 22 M3, M4, M5 Symbol: A3 The long shaft can be further shortened by machining

5 Port Solenoid Valve Series SV1000/2000/3000/4000

Gasket SY5000-11-18 SY9000-11-2 o SY7000-11-14 SY3000-11-25 For valve mounting (Matt nickel plated) Round head combination screw SV2000-21-1 (M3 x 30) SV3000-21-1 (M4 x 35) SX3000-22-2 (M2 x 24) SV2000-21-2 (M3 x 40) Note) Round head combination screw requires 2 pcs. per one valve for Series SV1000, SV2000, SV3000.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

(Example) For M3: L1 = 6 mm Applicable shaft type: W CRB2 CRBU2 Q1 = M L1 + (3 x P) (mm) CRB1 Y Q2 Size (mm) Y = L1 = 15 X Q1 M3 Size 1.5 to 9 MSU 15 20 M3, M4 1.5 to 18 M3 1.5 to 10 L2 + (3 x P) L2 = 20 30 M3, M4, M5 1.5 to 20 M3, M4 X = 2 to 13 CRJ 30 40 Q2 = M M3, M4, M5 2 to 22 M3, M4, M5 4.5 to 15 CRA1 Symbol: A3 The long shaft can be further shortened by machining male threads into

3.2

close proximity with each other either horizontally or vertically Plug connection ower supply output connection 30 e-Con connector Analog output or auto shift input 2 outputs + Sensor connection M5 female thread, through type (with mounting holes) M3 M5 female thread, through type M5 6 reducer 4 reducer R1/8,NPT1/8 Applications Manifolding is possible.

High Precision Digital Pressure Switch with 2-color Display Series PSE300/540∗

Series Pressure range 0~-101kPa PSE541 Vacuum pressure -101kPa 0Pa For air -100~100kPa PSE543 Compound pressure 100kPa -100kPa

Compact Rotary Actuator Series CRQ2

L1 (3 x P) Q1 = M C2 = C Y = C1 = C C2 Y = L2 = L2 (3 x P) C2 = C L2 = Q2 = M L1 = X = DD2 = (mm) (mm) (mm) Y 1 to 9 1 to 10 D2 Q1 M3, M4 M3, M4, M5 Q2 M3, M4 M3, M4, M5 L2 max Y Y Y 6 to 9 7.5 to 10 X 8 to 18 9.5 to 20 L1 max X 2 X 2 L2 max Y Y Size 10 15 Size 10 15 Size 10 15 3.5 to 4.9 3.5 to 5.9 257 Series CRQ2 (Size: 10, 15, 20, 30, 40) Simple Specials: -XA1 to -XA24: Shaft Pattern

Possible to transfer a workpiece at low-speed.

Applicable shaft type: W L1 (3 x P) Q1 = M C2 = C Y = DC1 = C C2 Y = L2 = L2 (3 x P) C2 = C L2 = Q2 = M L1 = X = D2 = (mm) (mm) (mm) Y 1 to 9 1 to 10 L2 max Y Y D2 L1 max X 2 X 2 L2 max Y Y Q1 M3, M4 M3, M4, M5 Q2 M3, M4 M3, M4, M5 Y 6 to 9 7.5 to 10 X 8 to 18 9.5 to 20 Size 10 15 Size 10 15 Size 10 15 3.5 to 4.9 3.5 to 5.9 319 CRQ2X Series (Size: 10, 15, 20, 30, 40) Simple Specials: -

CRQ2

Q1= M L1 (3 x P) C1 = C C2 = C Y = C2 Y = L2 = C2 = C L2 = L2 (3 x P) L1 = X = Q2 = M D2 = (mm) (mm) (mm) Y 1 to 9 1 to 10 D2 Q1 M3, M4 M3, M4, M5 Q2 M3, M4 M3, M4, M5 L2 max Y Y Y 6 to 9 7.5 to 10 Size 10 15 Size 10 15 Size 10 15 L1 max X 2 X 2 X 8 to 18 9.5 to 20 L2 max Y Y 3.5 to 4.9 3.5 to 5.9 11-8-13 14 Series CRQ2 (Size: 10, 15, 20, 30, 40) Simple Specials: -XA1 to -XA24: Shaft Pattern

Series SV

(M3 x 40) VZ1000-11-4SV3000-69A : Manifold stations Manifold Specification Sheets Refer to DIN rail dimension tables on page 85.

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

C2 SJ3l60-C2 SJ2l60-C2 2 onetouch fitting 2 onetouch fitting 3 position 4 position 3 position 4 position 71 65 73 46 41 44 2 position 2 position C4 C4 SJ3l60-C4 SJ2l60-C4 4 onetouch fitting 4 onetouch fitting 3 position 4 position 3 position 4 position 77 48 73 61 69 44 39 42 2 position 2 position C6 SJ3l60-C6 SJ2l60-M3 6 onetouch fitting M3 x 0.5 3 position 4 position 3 position 4 position

ZP3

M3 x 0.5 8.5 Model Vacuum inlet direction q Pad dia.

7ND9071en

Connections 1/4 NPT (S, C1, C2), converts also ND91_ connections to1/4 NPT. RC03 H127093 Cable assembly remote mount sensor cable 30 m, angle connector D3 D3B As D3 but two pressure gauges with connections 1/4 NPT (S, C2).

SMC Pneumatic Clean Series

Note 1) Sampling air flow rate: Number of particles contained in 75l of air Note 2) Actuator: 1 million cycles Solenoid valve: 2 million cycles Particle generation characteristics of CM2 Particle generation characteristics of CXSL Particle generation characteristics of CY1B 106 106 106 Particle concentration (particles/m3) Particle concentration (particles/m3) Particle concentration (particles

Smooth Cylinder/Low Speed Cylinder

CQ-M3 x 30L x 35L x 40L x 45L x 50L x 55L CQ-M3 x 30L x 35L x 40L x 45L x 50L x 55L CQ-M5 x 30L x 35L x 40L x 45L Mounting bolt part no. CQ-M5 x 50L x 55L x 60L x 65L x 70L x 75L CQ-M5 x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L Mounting method: Mounting bolt for through-hole mounting style of CQSYB is available as an option.

SV

With External Pilot Specifications (Pitch) 24 P = 24 48.6 11 25 11.8 20 14.5 13.7 E 3/5 E 3/5 E 3 E 3 4 A A 4 A 4 A 4 A 4 A 4 A 4 A 4 4 A A 4 35.8 40.4 35 58.3 63.9 74.8 B 2 B 2 B 2 B 2 B 2 P 1 P 1 B 2 B 2 B 2 B 2 P 1 P 1 B 2 C2 C2 One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 12 3/8" One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 8, 5/16" 10, 3/8" 12 X PE X PE

Table of Contents

x 0.35 x 19 M3 x 0.35 x 23 M3 x 0.35 x 24 M3 x 0.35 x 28 M3 x 0.35 x 68 M3 x 0.35 x 72 M3 x 0.35 x 73 M3 x 0.35 x 77 y u Components Ejector unit + Vacuum switch/Filter unit i o For nozzle size 10, 13, 15 M3 x 0.35 x 84 4 [For ZSE4 spec.]

3 Port Solenoid Valve

Bracket Mounting Procedure q Fit the bracket to the groove at the connector block (end block). w Tighten the screws (Tightening torque M3: 0.6 Nm). Tighten the screws (Tightening torque M3: 0.6 Nm). Note) The bracket can be mounted on the block with the mounting nut (Metric size: M3) only.

ZR

x 0.35 x 19 M3 x 0.35 x 23 M3 x 0.35 x 24 M3 x 0.35 x 28 M3 x 0.35 x 68 M3 x 0.35 x 72 M3 x 0.35 x 73 M3 x 0.35 x 77 y u Components Ejector unit + Vacuum switch/Filter unit i o For nozzle size 10, 13, 15 M3 x 0.35 x 84 4 [For ZSE4 spec.]