Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: Rc1/8, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: Bracket for w/Flow Adjustment Valve

HRX-OM-M005

) Table 8-1 Specification for fluorinated fluid (wide temperature) double inverter (HRZD020-WS-WS) Model HRZD020-WS-WS Channel 1 2 Cooling method Water cooled refrigerant type Temperature control system PID control PID control Cooling capacity*1 kW 9.5 (Circulating fluid at 20C) 9.5 (Circulating fluid at 20C) Operating temperature range C -30 to 90 -30 to 90 Temperature stability C 0.1*2

Large Capacity Compressed Air Filters Series AFW

AFW1500-N30D-WS 1,500 1/2 1/2 215 3 flg. ** 32 39 7.5 16 2,550 AFW1500-N30FM-WS 1,500 1/2 1/2 326 4 flg. ** 32 39.5 9.75 18.25 3,570 AFW2100-N40FM-WS 2,100 C 1/2 1/2 439 6 flg. ** 32 41 12 20.5 6,460 AFW3800-N60FM-WS 3,800 3/4 3/4 647 8 flg. ** 32 41.5 14.5 24 11,050 AFW6500-N80FM-WS 6,500 3/4 3/4 778 10 flg. ** 32 42.5 17.5 28 17,000 AFW10-N100FM-WS 10,000 CF CF CF 12 flg. ** CF CF CF CF

Refrigerated Thermo-chiller

Power consumption: Facility water: Max.82% reduction (SMC comparison) Max.90% reduction (SMC comparison) 20 l/min Conventional model HRZ010-WS Conventional model HRZ010-WS 6.2 kWh/h 2 l/min 1.1 kWh/h Operating conditions: 10C, 0 kW with 50% load, 2 kW with 50% load Operating conditions: 10C, 0 kW with 50% load, 2 kW with 50% load High Performance + Temperature stability: 0.1C (when a load

CLK1

Hs 33 37.5 43 43 n-2 2 D-H7, D-H7W D-H7F 15 + 45 ( ) (n = 2, 4, 6...) A B 3 5.5 7 7 15 60 65 + 45 (n-2) D-H7, D-H7W D-H7F 30.5 28.5 30 30 n-2 2 15 + 50 ( ) (n = 2, 4, 6...) Approx. Hs 30.5 35 40.5 47.5 D-H7C 15 65 10 65 + 50 (n-2) A B Approx. Hs 3 5.5 7 7 n-2 2 D-H7C 31.5 28.5 30 30 15 + 50 ( ) (n = 2, 4, 6...)

Clamp Cylinder with Lock Series CLK1

Hs 33 37.5 43 43 n-2 2 D-H7, D-H7W D-H7F 15 + 45 ( ) (n = 2, 4, 6...) A B 3 5.5 7 7 15 60 65 + 45 (n-2) D-H7, D-H7W D-H7F 30.5 28.5 30 30 n-2 2 15 + 50 ( ) (n = 2, 4, 6...) Approx. Hs 30.5 35 40.5 47.5 D-H7C 15 65 10 65 + 50 (n-2) A B Approx. Hs 3 5.5 7 7 n-2 2 D-H7C 31.5 28.5 30 30 15 + 50 ( ) (n = 2, 4, 6...)

HRX-OM-I051

Brake lever Caster w/ brake (2 pcs. on the front) M12 anchor bolt M8 nut (2 pcs.)

SGC200-OMJ0004

4) 4) , , , , 1)-10-20 2) 1) 1) 1) 1) 50mm 2/s 2) 2) 2) 2) 3) 3) 3) 3) 4) 5), 6) 4 SGC200*-OMJ0004-A SGC/SGH Series SGC/SGH Series SGC/SGH Series SGC/SGH Series 2 2 2 2 / / / / Nm Rc1/8 79 Rc1/4 1214 Rc3/8 2224 Rc1/2 2830 Rc3/4 4550 Rc1 6570 , , , , 1.5~2 1) 2) 3) 2 5 SGC200*-OMJ0004-A SGC/SGH Series SGC/SGH Series SGC/SGH Series SGC/SGH Series 2 2 2 2 / / / / 30 1 1) 2)1 0.1MPa

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: N (None), Calibration Certificate: A (w/Calibration Certificate), Connector: Lead Wire w/Connector (2 m), Option: S (Bracket for w/Flow Adjustment Valve)

Sensor, Monitor Structure: [Separate Type Connector Connection] Separated sensor, Output Method: Analog, Analog Output Specification: Current, Pipe Port Type: Female Thread, Plumbing Thread Type: [NPT] NPT, Plumbing Thread Nominal: [1/8] 1/8, Pressure Resistance(MPa): 1, Flow Rate Type: Standard, Operating Temperature Range(°C): -10～60, Operating Humidity Range(%): 35～85, Number of Inputs: 2,

Table of Contents

Qty. 1 1 2 2 2 2 4 2 !4 !

NCQ2/CQ2

2, !3, !

Magnetically Coupled Rodless Cylinder

B Counter bore depth C T Y HP 0 -0.1 Note 1) L 2-P (Piping port) 4-J x E TC 4-3.2 X F WP WP D GW QW PW WS GP 4-LD 4-6.5 CY3R6 2 x 4-MM Thread depth M Switch rail W K HS Plug G G Q + Stroke HR CR Z + Stroke CY3R25 to 63 Note 1) 50, 63: L 0 0.2 CY3R10 to 20 (mm) D 7.6 12 16.6 21.6 26.4 33.6 41.6 52.4 65.4 CR 0.5 0.5 0.5 1 1 1.5 2 2 3 CB 2 2 2 3 3 3 5 5 5 C 3.2 4.2 5.2 5.2 6.5 6.5 8.2 8.2 B

Basic type / Direct mount type Series CY3B/CY3R

B Counter bore depth C T Y HP 0 -0.1 Note 1) L 2 x P (Piping port) 4 x J x E TC 4 x 3.2 X F WP WP D GW QW 4 x LD PW WS GP 4 x 6.5 CY3R6 2 x 4 x MM Thread depth M Switch rail W K HS Plug G G Q + Stroke HR CR Z + Stroke CY3R25 to 63 Note 1) 50, 63: L 0 0.2 CY3R10 to 20 (mm) D 7.6 12 16.6 21.6 26.4 33.6 41.6 52.4 65.4 CR 0.5 0.5 0.5 1 1 1.5 2 2 3 CB 2 2 2 3 3 3 5 5 5 H 19 26 32 39 44 55 67 85

CY1

2 @7 #2 r @8 u o y t @1 @2 @5 @4 @3 CY1HT32 @6 Material Note Parts list Material Note Parts list Qty. 1 2 1 2 2 1 5 5 4 4 1 2 2 1 2 2 2 No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 Qty. 2 2 2 2 1 4 2(4) 2 4 2 2 4(2) 1 2 4 2 Description Body Plate Cylinder tube Piston Piston nut Shaft Piston side yoke External slider side yoke Magnet A Magnet B External slider tube Spacer Space ring Slide

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

2!6 @4 @1 @8 MX MTS MY #0 #1 $1 w @9 i #2 !1 o q u r y e @6 @5 @3 @7 CY CY1L10 to 40 @2 $0 #9 @0$0 t !9 #5$2 #8 !2 !0 !6!7@4 @1 !8 !4 !

Basic Type/Direct Mount Type

2 2 3 3 3 5 5 5 CR 0.5 0.5 0.5 1 1 1.5 2 2 3 D 7.6 12 16.6 21.6 26.4 33.6 41.6 52.4 65.4 Model CY3R6 CY3R10 CY3R15 CY3R20 CY3R25 CY3R32 CY3R40 CY3R50 CY3R63 L 34 38 53 62 70 76 90 110 118 W 20 20 25 40 40 50 60 60 70 WS 6 8 7 7 7 7 7 10 10 X 10 15 18 22 28 35 40 50 60 LD 3.5 3.5 4.3 5.4 5.4 7 7 8.6 8.6 WP 9.5 13 16 19 21.5 27 32 41 47 Y 35.5 39.5 54.5 64 72 79 93 113 121 M 3.5 4 5 5 6 7 8

Profile Design ISO/VDMA Air Cylinder Series CP95

Piping length [m] Air consumption Q [Nl/min.] 4 3 100 cylinder [mm] 40 50 63 80 2 2 100 100 Stroke [mm] Air consumption Q [Nl/min.]

Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: S (Bracket for w/Flow Adjustment Valve)

Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: Bracket for w/Flow Adjustment Valve