Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: None, Calibration Certificate: None, Connector: w/o Lead Wire w/Connector, Option: -

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: Rc1/8, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: None, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: Bracket for w/o Flow Adjustment Valve: ZS-33-M

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: Rc1/8, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: None, Calibration Certificate: None, Connector: w/o Lead Wire w/Connector, Option: -

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: None, Calibration Certificate: None, Connector: Lead Wire w/Connector (2 m), Option: Panel Mount Adapter for w/o Flow Adjustment Valve

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N7 (ø1/4 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate), Connector: Lead Wire w/Connector (2 m), Option: R (Bracket for w/o Flow Adjustment

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: ø1/4 One-touch Fitting, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: Lead Wire w/Connector (2 m), Option: Bracket for w/o Flow Adjustment Valve: ZS-33

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Symbol N3 N7 M N3 N7 N9 M One-touch fitting for 5/32" NPN output (+COM.) EX510-S002A Nil N EX510-S102A P.1715 to 1717 SY3000 One-touch fitting for 1/4" PNP output (COM.)

1

n = 4 to 24 n = 1 to 3 n = 4 to 24 n = 1 to 3 42.3 62.5 n: Number of stations 3 5 4 3 2 1 1 3 1 2 3 4 5 n: Number of stations Pitch 10.5 Pitch P = 16 (SY5000) P = 19 (SY7000) Make sure to mount in the right direction. Make sure to mount in the right direction. (20) SY5000: SY50M-86-(N) SY7000: SY70M-86-(N) Name plate is the number of stations (1 to 24).

5-Port Solenoid Valve

n = 4 to 24 n = 1 to 3 n = 4 to 24 n = 1 to 3 42.3 62.5 n: Number of stations 3 5 4 3 2 1 1 3 1 2 3 4 5 n: Number of stations Pitch 10.5 Pitch P = 16 (SY5000) P = 19 (SY7000) Make sure to mount in the right direction. Make sure to mount in the right direction. (20) SY5000: SY50M-86(N) SY7000: SY70M-86(N) Name plate is the number of stations (1 to 24).

5 Port Solenoid Valve Series SV1000/2000/3000/4000

C6: 6 (SMC) N7: 1/4" (SMC) One-touch fitting [PE: Pilot EXH port] Applicable tube O.D. C6: 6 (SMC) N7: 1/4" (SMC) Applicable tube O.D.

Series SV

A, B port Symbol N1 N3 N7 N3 N7 N9 N7 N9 N11 N9 N11 02N 03N 02T 03T M P, E port Applicable series 1/8" One-touch fitting 5/32" One-touch fitting 1/4" One-touch fitting 5/32" One-touch fitting 1/4" One-touch fitting 5/16" One-touch fitting 1/4" One-touch fitting 5/16" One-touch fitting 3/8" One-touch fitting 5/16" One-touch fitting 3/8" One-touch fitting NPT 1/4 NPT 3/8 NPTF 1/4 NPTF 3/8 A

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Model SY3000-37-81A-3-N Single : For 1 to 4 stations SY3000-37-81A-3-6 Double/3 position : For 1 to 4 stations 10-SS5Y3-20SA SY3000-37-81A-2-N Single : For 5 to 8 stations SY3000-37-81A-2-4 Double/3 position : For 5 to 8 stations SY3000-37-81A-3-N Single : For 1 to 8 stations 10-SS5Y5-20SA SY3000-37-81A-3-6 Double/3 position : For 1 to 8 stations SY3000-37-81A-3-N Single : For 1 to 4 stations

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

side: Orange 2(B) port side: Green 12.3 4 x 5.3 (For mounting) L2 5 (Rail mounting hole pitch: 12.5) L1 With option (Station n) (Station 1) Light/surge voltage suppressor 58.4 E 4 A 3/5 3/5 E 4 A 4 A 4 A 82.7 101.2 77.3 2 B 2 B 2 B 2 B 63.8 P 1 P 1 5 5 3 E 1 P 3 E 1 P 12 1 1 1 1 Individual SUP spacer (For DIN rail mounting) (10) Individual EXH spacer 14.7 L Dimension n: Stations L n 2 185.5

4/5 Port Solenoid Valve

assembly SYJ5000-21-4A 02 2 stations -+ -+ A : : B B R port 1/4 R P 20 20 stations Applicable individual EXH spacer assembly SYJ5000-17-1A Applicable individual SUP spacer assembly SYJ5000-16-2A Applicable individual SUP spacer assembly ARBYJ5000-00-P Thread type A, B port size A, B port 1/8, C6 Nil F N T Rc G NPT NPTF P port 1/4 01 1/8 One-touch fitting for 6 C6 N7 One-touch fitting for

5 Port Solenoid Valve

silencer M5 external pilot port Stations 1 2 3 4 5 6 7 8 n D side U side Flat ribbon cable connector assembly (26P) AXT100-FC26-1: 1.5 m AXT100-FC26-2: 3 m AXT100-FC26-3: 5 m DIN rail clamping screw 3 8.2 23.5 1 13.8 (12) 4.9 8.5 (7.5) 23.1 (n-1) x 8.5 7.3 2n x C6, C8, N7, N9 (1(P), 3(R) port) C6: 6 one-touch fitting C8: 8 one-touch fitting N7: 1/4" one-touch fitting N9: 5/16" one-touch

0.4

Parts D 01 02 C6 C8 N7 N9 01 02 C6 C8 N7 N9 Rc 1/8 Rc 1/4 6 one-touch fitting 8 one-touch fitting 1/4" one-touch fitting 5/16" one-touch fitting Rc 1/8 Rc 1/4 6 one-touch fitting 8 one-touch fitting 1/4" one-touch fitting 5/16" one-touch fitting F With bracket N Name plate Note) When two or more symbols are specified, indicate them alphabetically.

SV

P 1 5 3 E 1 P (Station n) (Station 1) Light/Surge voltage suppressor 1 1 Individual SUP spacer SV3000-00Interface regulator Individual EXH spacer 82.7 77.3 63.8 SV3000-M1Interface regulator 12 (For DIN rail mounting) (10) B B B B 14.7 157.9 139.9 A A A A B A B A B A B A L Dimension n: Stations L n 2 185.5 175 121.5 17.5 97 3 198 187.5 142 13.5 117.5 4 223 212.5 162.5 16 138 5 235.5 225 183

SX

Clean appearance P N SS5X3-42 SX340(R) P N SS5X5-41 SX540 P N SS5X5-42 SX540(R) P N SS5X7-42 SX740(R) P N SS5X3-41 SX340 Single base/B mount Common SUP/Common EXH 4 to 12 stations 3 to 12 stations Base Side Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Model Applicable valve Manifold type P (SUP)/R (EXH) Valve stations (1) In case of a flat cable style, each valve is wired on the print board of manifold

Valve Single Unit

Clean appearance P N SS5X3-42 SX340(R) P N SS5X5-41 SX540 P N SS5X5-42 SX540(R) P N SS5X7-42 SX740(R) P N SS5X3-41 SX340 Single base/B mount Common SUP/Common EXH 4 to 12 stations 3 to 12 stations Base Side Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Model Applicable valve Manifold type P (SUP)/R (EXH) Valve stations (1) In case of a flat cable style, each valve is wired on the print board of manifold

Valve Single Unit

Clean appearance P N SS5X3-42 SX340(R) P N SS5X5-41 SX540 P N SS5X5-42 SX540(R) P N SS5X7-42 SX740(R) P N SS5X3-41 SX340 Single base/B mount Common SUP/Common EXH 4 to 12 stations 3 to 12 stations Base Side Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Model Applicable valve Manifold type P (SUP)/R (EXH) Valve stations (1) In case of a flat cable style, each valve is wired on the print board of manifold