Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: G1/8, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: -, Calibration Certificate: -, Connector: -, Option: -

Table of Contents

2 !

VFR

2 !

IR1000/2000/3000

(2) (2) (2) (3) KTIR2120 KTIR3120 KT-IR2000 KT-IR3000 Repair kit no.

FILTER REGULATOR

Applicable tube D.O. 10 NPT3/8" 18 Option Note 2 Note 2 Semi-standard Semi-standard Semi-standard 2 Port thread Part no. Part no. Port thread Rc Rc AD48-A AD48-2-A G G NPT AD48N(-Z)-A NPT AD48N-2(Z)-A Semi-standard 6 External B B Port thread Part no. appearance Rc drawing and AD48-6-A part no. G NPT AD48N-6(Z)-A Applicable tube D.O.

FILTER REGULATOR

Applicable tube D.O. 10 NPT3/8" 18 Option Note 2 Note 2 Semi-standard Semi-standard Semi-standard 2 Port thread Part no. Part no. Port thread Rc Rc AD48-A AD48-2-A G G NPT AD48N(-Z)-A NPT AD48N-2(Z)-A Semi-standard 6 External B B Port thread Part no. appearance Rc drawing and AD48-6-A part no. G NPT AD48N-6(Z)-A Applicable tube D.O.

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

Body size 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Port size Type Symbol Cylinder side In the side of solenoid valve M5 01 02 03 04 F01 F02 F03 F04 U10/32 N01 N02 N03 N04 Elbow 2 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 M5 x 0.8 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 G 1/8 G 1/4 G 3/8 G 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

Port size Type Symbol Cylinder side In the side of solenoid valve M5 01 02 03 04 F01 F02 F03 F04 U10/32 N01 N02 N03 N04 Elbow 2 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 M5 x 0.8 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 G 1/8 G 1/4 G 3/8 G 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 Control 0 1 Meter-out Meter-in 15-9-89 16 Construction AS2200

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

With gasket is provided as standard. 1/8, 1/4 standard 3/8 standard 1/2 standard Port size Symbol Cylinder side In the side of solenoid valve M5 01 M5 x 0.8 R 1/8 M5 x 0.8 Rc 1/8 Rc 1/4 Note 1) Elbow 02 R 1/4 Rc 3/8 Note 2) 03 04 F01 Rc 3/8 Rc 1/2 G 1/8 G 1/4 Note 1) R 3/8 R 1/2 R 1/8 F02 R 1/4 G 3/8 Note 2) Caution Control F03 F04 U10/32 N01 G 3/8 G 1/2 10-32 UNF NPT 1/8 NPT 1/4 Note 1)

VZM400

2.0 mm O.T. 2-3.5 mounting hole 3.5 mm T.T.

VMx-OMP0001

1.41.6Nm 8 2 VR2110 3 01.0MPa 0.250.8MPa 0.560s (*) 10 (%) F.S. oC( -560 3/ (s C (dm 0.6 [1 (P) 2 (A) ] 0.5 [2 (A) 3 (R) ] bar) ) b 0.2 [1 (P) 2 (A) ] 0.15 [2 (A) 3 (R) ] Rc, NPT, G1/8 ON Delay 480g (*) 4 4 V R 2 1 1 0 01 01 Rc 1/8 N01 NPT 1/8 F01 F01 2 G 1/8 9 5 VR 1 ON Delay 0.560 () () 1 ON OFF 6 (1) 2 0.5MPa 2 10 (2) VR2110 3 )0.25MPa A 60sec (), (S) 0.8MPa 40sec

PFM7

Piping Variations With one-touch fittings (C4, C6, C8, N7) Female thread (01, 02, N01, N02, F01, F02) Straight (Nil) Bottom (L) Straight (Nil) Bottom (L) Without flow adjustment valve (Nil) S 1 2 S 1 2 S S 1 1 2 2 IN 1 IN 1 IN IN With flow adjustment valve (S) S S 1 2 1 2 S S 1 1 2 2 IN IN 1 IN 1 IN 906 2-Color Display Digital Flow Switch Series PFM7 Option 1 Nil With lead wire with connector

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: F01 (G1/8), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate)

Structure: IP40, Lead Wire: With lead wire with connector (2 m), Handling Instructions: With Instruction Manual (Japanese and English), Calibration Certificate included: With Calibration Certificate, Flow rate control valve: None, Custom-made Specifications: None, Rating Flow Range(L/min): 1 to 50 (25), Accessory: None, Option: None, Analog Current Output(mA): None

Nozzle Diameter: 10 (ø1.0mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: F01 (Screw-in G1/8), VAC: F01 (Screw-in G1/8), EXH: F01 (Screw-in G1/8)

Nozzle Diameter: 10 (ø1.0mm), Vacuum Pressure: S (-90 kPa), SUP: F01 (Screw-in G1/8), VAC: F01 (Screw-in G1/8), EXH: F01 (Screw-in G1/8)

Nozzle Diameter: 07 (ø0.7mm), Vacuum Pressure: S (-90 kPa), SUP: F01 (Screw-in G1/8), VAC: F01 (Screw-in G1/8), EXH: F01 (Screw-in G1/8)

1

3 2 B 2 B 2 B 2 B 2 B PCI BUS IN BUS OUT 8 7 1 2 3 4 5 Valve stations For N, sizes are in inches.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

pilol 0.08(2) 2 ~ting "" I 0.51~n(12) Opemtorport \IDJ-v!}]

Vacuum System Peripherals:

Connection NPT 1/8 N01 Connection NPT 1/4 N02 Port size Connection NPT 3/8 N03 Applicable model IRV1000 Option Connection NPT 1/2 N04 Size Symbol IRV3000 IRV2000 Connection G 1/8 F01 01 02 03 04 1/8 1/4 3/8 1/2 Connection G 1/4 F02 Connection G 3/8 F03 Connection G 1/2 F04 13-14-2 3 Vacuum System Peripherals: Electronic Vacuum Regulator: ITV209 Specifications ITV2090 ITV2091 Model 24 VDC