Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: ø6 One-touch Fitting, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: -

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Valve 1 8 1 4 1 8 1 4 P, EA, EB port 1 4 M5 x 0.8, C4 (One-touch fitting for 4) C6 (One-touch fitting for 6) Port size C4 (One-touch fitting for 4) C6 (One-touch fitting for 6) C8 (One-touch fitting for 8) A, B port C8 (One-touch fitting for 8) C10 (One-touch fitting for 10) Manifold base mass W (g) n: Stations W = 19n + 45 W = 43n + 77 W = 51n + 81 Flat ribbon cable connector, Socket: 26

1

Unit 8 D side U side Station 7 6 5 4 3 2 1 n DIN rail clamping screw C8: 8 One-touch fitting C8 [3(R) EXH port] DIN rail clamping screw (12) 30 56.6 8 R R 11.5 63.5 62.5 3 3 12 X 12 X 40.5 B B B B B B B B P P 25 A 1 1 A A A A A A A 18.5 7.5 9.5 7.5 C3, C4, C6, M5 [4(A), 2(B) port] C8: 8 One-touch fitting C8 [1(P) SUP port] C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch

5-Port Solenoid Valve

(B) 4 2 t t q e w r e q w r 2-position single 5 (EA) 3 (EB) 1 (P) 2 (B) 3 (EB) 4 (A) 5 (EA) 1 (P) (A)4 2(B) 1 (P) (EA)5 3(EB) 2-position double t e q w r 2-position double 1 (P) 2 (B) 3 (EB) 4 (A) 5 (EA) 2(B) (A)4 (EA)5 1 (P) 3(EB) 3-position closed center/exhaust center/pressure center t e q w r 3-position closed center 3-position exhaust center 2(B) (A)4 2(B) (A)4 (EA)5 1 (P) 3(EB) (EA

0.4

B A B A B A B A B A A 93.5 0 (35) 66 75 1 2 (40) 3 2 4 6 x M4 mounting hole Input block SI unit D side 8 Stations 7 6 5 4 3 2 1 U side n C8: 8 one-touch fitting C8 [3(R) EXH port] 2 x M12 4 x M8 3-pin socket DIN rail clamp screw R R 0 BUS 62.5 1 3 3 60 X X 40.5 2 B B B B B B B B 12 12 PWR 3 P P 25 1 1 A A A A A A A A 18.5 9.5 7.5 (12) (7.5) M3 C8: 8 one-touch fitting C8 [1(P) SUP port]

SY

Valve Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 P, EA, EB port Rc 1/4 M5 x 0.8 C4 (4 One-touch fitting) C6 (6 One-touch fitting) Port size C4 (4 One-touch fitting) C6 (6 One-touch fitting) C8 (8 One-touch fitting) A, B port C8 (8 One-touch fitting) C10 (10 One-touch fitting) Type 20P P to A/B 15.84 (0.88) A/B to EA/EB 14.94 (0.83) P to A/B 9.18 (0.51) A/B to EA/EB 9.9 (0.55) P to A/B 3.6 (0.2) A/B to EA

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

(196) A/BR 3.24 (177) Rc(PT)1/8: Rc(PT) 1/4: M5: PA/B 3.42 (186) A/BR 3.24 (177) PA/B 3.6 (196) A/BR 3.6 (196) C4: C8 : C4: Valve effective area mm2 (Nl/min) Note 2) C6: C10: C6: C8: Manifold base weight W (g) Note 3) W = 65.4n + m + 128.2 W = 13n + m + 36 W = 41.2n + m + 77.6 (n: Number of SUP/EXH blocks, m: DIN rail weight) Note 1) In cases such as when many valves are operated simultaneously

SQ1000/2000

5 1 3 (R1) (P)(R2) 5 1 3 (R1)(P)(R2) SQ2530 SQ2531 (A) (B) (A) (B) 2 4 2 4 u u 5 1 3 (R1) (P)(R2) 5 1 3 (R1)(P)(R2) Dual 3 port valve: SQ2 31 A B C SQ2A31 4 2 y e e q w w 1 5 3 N.C.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

P (SUP)/R (EXH) Valve stations A, B port location Valve 1 8 1 4 1 8 1 4 P, EA, EB port 1 4 M5 x 0.8 C4 (4 One-touch fitting) C6 (6 One-touch fitting) C4 (4 One-touch fitting) C6 (6 One-touch fitting) C8 (8 One-touch fitting) Port size C8 (8 One-touch fitting) C10 (10 One-touch fitting) A, B port Manifold base weight W (g) n: Stations W = 13n + 24 W = 36n + 64 W = 43n + 35 Note 1) For more

0.4

e q w VQ1100 VQ1101 (B) 2 (A) 4 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e w q VQ1200 VQ1201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) VQ1500 VQ1501 r r (B) 2 (A) 4 (B) 2 (A) 4

5 Port Solenoid Valve Series SV1000/2000/3000/4000

Stations D side U side [Communication connector D-sub] C8: 3(R) port C8: 8 One-touch fitting DIN rail clamping screw 76.7 76.7 33.6 33.6 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A (12) (12) 17.5 6.5 9.6 8.5 17.2 (7.5) (7.5) C8: 1(P) port C8: 8 One-touch fitting 2n x C3, C4 (4(A), 2(B) port) C3: 3.2 One-touch fitting C4: 4 One-touch fitting Dimensions 1 39.5 Formula L1

0.4

: SQ1230D r e e q w r e e q w SQ1230D SQ1231D 2 (B) (A) 4 2 (B) (A) 4 (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) 3 position: SQ1 30 3 4 5 3 position: SQ1 31 3 4 5 r e e q w r e e q w SQ1331 SQ1431 SQ1531 SQ1330 SQ1430 SQ1530 2 (B) (A) 4 2 (B) (A) 4 2 (B) (A) 4 2 (B) (A) 4 2 (B) (A) 4 2 (B) (A) 4 (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2

Base Mounted Metal Seal/Rubber Seal Series VQ

3 n (41.5) (33) (59.5) 58 Residual pressure release manual override 2-Rc1/8, 1/4, C6, C8 C6: One-touch fitting assembly for 6 C8: One-touch fitting assembly for 8 C8: One-touch fitting assembly for 8 C6: One-touch fitting assembly for 6 2-Rc 1/8, 1/4, C6, C8 B B B 2 2 2 A A A 45 65.5 4 4 4 B 25 2 (1.5) 37.5 17.5 A 1 2 3 4 5 6 7 8 10 11 12 L n 13 14 15 16 Dimensions Formula L1 = 22n + 24

0.4

VQ1000/2000 Series VQ1000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w VQ1100 VQ1101 2(B) (A)4 2(B) (A)4 r r (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w e w q VQ1201 VQ1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQ1301 VQ1401 VQ1300 VQ1400 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P

5 Port Solenoid Valve

4 (A) 1 (P) 2 (B) 3 (R2) t u Dual 3-Port: S07B0 A Plug-in Manifold Stacking Base C i r e w q y r S07A0 4 (A) 2 (B) 5 (R1) 1 (P) 3 (R2) N.C. + N.C.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

Compact 5-Port Solenoid Valve

68.6 D D B 2 S B 2 B 2 B 2 B 2 1 P P 1 A 4 A 4 A 4 A 4 A 4 * These figures show the JJ5SY3-10F2-05DR-C8.

SX

Valve Rc 1 8 Rc 1 4 Rc 1 8 Rc 1 4 A, B port location P, EA, EB port Rc 1 4 M5 x 0.8 C4 (One-touch fitting for 4) C6 (One-touch fitting for 6) C4 (One-touch fitting 4) C6 (One-touch fitting for 6) C8 (One-touch fitting for 8) Port size C8 (One-touch fitting for 8) C10 (One-touch fitting for 10) A, B port SV Manifold base weight W (g) n: Stations W = 19n + 45 W = 43n + 77 W = 51n + 81 SZ Note

Table of Contents

1, Metal joint q, w, Gasket A e, Guard !3 End plate (U side) assembly !1 AXT625-2A-20 End plate (U) !1, Metal joint q, w, Gasket A e, Guard !3 AXT625-2A-10 End plate (U) !1, Metal joint q, w, Gasket A e, Guard !3 AXT625-3A End plate (D) !2, Metal joint q, w, Gasket B r, Guard !3, Steel ball End plate (D side) assembly !2 AXT625-3A-20 End plate (D) !