Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: N7 (ø1/4 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)]

[Separate Type Connector Connection] Separated sensor, Output Method: Analog, Analog Output Specification: Voltage, Pipe Port Type: [One-Touch Couplings] One-Touch Couplings (Straight), Plumbing Thread Type: -, Plumbing Thread Nominal: -, Pressure Resistance(MPa): 1, Flow Rate Type: Standard, Operating Temperature Range(°C): -10～60, Operating Humidity Range(%): 35～85, Number of Inputs: 2,

5 Port Solenoid Valve Series SY3000/5000/7000/9000

[35.1] SQ 32.5 For manifold gasket positioning 2 x 2.2 die-cast hole (P, EA, EB port) 1/8 27.2 20.5 23 VFS VFR L plug connector (L): SY5120-L(-F ) 1 2 C4, N3 C6, N7 C8, N9 M plug connector (M): SY5120-M(-F ) DIN terminal (D, Y): C4, N3 C6, N7 C8, N9 SY5120-WO(-F ) 1 2 M8 connector (WO): C4, N3 C6, N7 C8, N9 VQ7 1 2 C4, N3 C6, N7 C8, N9 D Y 1 2 SY5120(-F ) 60.9 Applicable cable O.D. 3.5 to

1

U and/or D sides) ( ) C6: 3.6 N7: 7.4 M5 x 0.8 [4(A), 2(B) port] One-touch fitting [4(A), 2(B) port] Applicable tube O.D.: 2 : 3.2, 1/8" : 4, 5/32" : 6, 1/4" (Station n) (Station 1)--( ) C6: 77.3 N7: 81.1 P 1 P 1 (73.8) 3/5 E 3/5 E B 2 B B 2 B 2 B 2 2 A 4 A 4 A 4 A 4 A 4 Note 1) These figures show the SS5Y3-12F2-05D.

5-Port Solenoid Valve

D sides) ( ) C6: 3.6 N7: 7.4 M5 x 0.8 [4(A), 2(B) port] One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 2 : 3.2, 1/8" : 4, 5/32" : 6, 1/4" Connector Connecting Base (Station n) (Station 1)--D-sub, Flat Ribbon ( ) C6: 77.3 N7: 81.1 P 1 P 1 (73.8) Terminal Block 3/5 E 3/5 E B 2 B B 2 B 2 B 2 2 Lead Wire A 4 A 4 A 4 A 4 A 4 Circular Connector EX500 * These figures show the SS5Y3

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Port size Applicable series C4 C6 C6 C8 Symbol Port size Applicable series N3 N7 N7 N9 Note) Z: Positive common specifications only.

Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate), Connector: Z (w/o Lead Wire w/Connector)

Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: w/o Lead Wire w/Connector, Option: -

4/5 Port Solenoid Valve

Exhaust center: 4/2 5/3, Pressure center: 1 4/2 Note 2) ( ): Without sub-plate Note 3) For DC voltages.

5 Port Solenoid Valve Series SV1000/2000/3000/4000

C6: 6 (SMC) C8: 8 (SMC) C10: 10 (SMC) N7: 1/4" (SMC) N9: 5/16" (SMC) N11: 3/8" (SMC) (11) (47.7) [Communication connector D-sub] (76.8) (External pilot specification) BUS OUT BUS P 1 P 1 P 1 2 B 2 B 2 B 2 B 2 B 2 B 2 B 82.7 76.7 76.7 63.8 (60.3) BUS IN 11.6 13.5 37.6 36.1 4 A 4 A 4 A 4 A E 4 A 4 A A PWR 3/5 E E 3/5 3/5 PWR 12 53.2 (10) (Pitch) P = 20.5 21.2 53.2 (14.7) One-touch fitting [

7.5

34.3 23.6 15.4 15.6 3/5 3/5 2 2 2 2 2 30.6 32.1 1 1 4 4 4 4 4 D D One-touch fitting One-touch fitting [4(A), 2(B) port] M5 x 0.8 [1(P), 3/5(E) port] Applicable tubing O.D: 8, 5/16" [4(A), 2(B) port] Applicable tubing O.D: 2, 1/8" 4, 5/32" 6, 1/4" L4 L3 U side D side Valve lock switch Switch for locking a connector C6: 18.1 N7: 20.6 C6: 9.6 N7: 12.1 (9.1) 8 (1.8) 20.8 5.5 21 7.5 COM 6 PWR

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Exhaust center: 4/2 5/3, Pressure center: 1 4/2 Note 2) ( ): Without sub-plate Note 3) For DC voltages.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

) 10-SS5YJ5-20SA-05(-Q) Z With light/surge voltage suppressor With light/surge voltage suppressor (Non-polar type) R P R U 1 2 3 Stations Power saving circuit is only available for the Z type.

CATALOG

X B 5 _ C D N R O D T H R E A D R O D B O R E S I Z E S TA N D A R D S T R O K E 150 1.5 200 2 250 2.5 325 3.25 400 4 500 5 600 6 800 6 100010 120012 140014 7/16-20 7/16-20 7/16-20 3/4-16 3/4-16 3/4-16 1-14 1-14 1 1/4-12 1 1/2-12 1 7/8-12 5/8 5/8 5/8 1 1 1 1-3/8 1-3/8 1-3/8 2 2-1/2 Inches Example: 04 = 4 Stroke E 1 G 1 3/8 H 1 3/4 J 2 K 2 1/2 L 3 M 3 1/2 Z Consult SMC Customer Service For

5 Port Solenoid Valve

2 x C8, C6, N7, (1(P), 3(R) port) C8: 8 one-touch fitting C6: 6 one-touch fitting N7: 1/4" one-touch fitting Dotted line indicates DIN rail mounting bracket (-D).

0.4

C6: 6 (SMC) C8: 8 (SMC) C10: 10 (SMC) N7: 1/4" (SMC) N9: 5/16" (SMC) N11: 3/8" (SMC) (11) (47.7) [Communication connector D-sub] (76.8) (External pilot specification) BUS OUT BUS P 1 P 1 P 1 2 B 2 B 2 B 2 B 2 B 2 B 2 B 82.7 76.7 76.7 63.8 (60.3) BUS IN 11.6 13.5 37.6 36.1 4 A 4 A 4 A 4 A E 4 A 4 A A PWR 3/5 E E 3/5 3/5 PWR 12 53.2 (10) (Pitch) P = 20.5 21.2 53.2 (14.7) One-touch fitting [

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

34.3 23.6 15.4 15.6 3/5 3/5 2 2 2 2 2 30.6 32.1 1 1 4 4 4 4 4 D D One-touch fitting One-touch fitting [4(A), 2(B) port] M5 x 0.8 [1(P), 3/5(E) port] Applicable tubing O.D: 8, 5/16" [4(A), 2(B) port] Applicable tubing O.D: 2, 1/8" 4, 5/32" 6, 1/4" L4 L3 U side D side Valve lock switch Switch for locking a connector C6: 18.1 N7: 20.6 C6: 9.6 N7: 12.1 (9.1) 8 (1.8) 20.8 5.5 21 7.5 COM 6 PWR

SX

M D U D side U side B 2 to 17 2 to 10 stations 2 to 10 stations D U D side U side B 2 to 8 2 to 8 2 to 8 One-touch fitting for 5/32" N3 One-touch fitting for 5/32" N3 One-touch fitting for 1/4" N7 One-touch fitting for 1/4" N7 Both sides M Special specifications SX5000 Both sides M Special specifications SX5000 One-touch fitting for 5/16" N9 One-touch fitting for 5/16" N9 Mixed M Mixed M

V

Length) DO DIN Rail Mounting Type (Without DIN Rail) N o t e 1 ) 1 VQZ100 2 VQZ200 3 VQZ300 C Connector K I T Note 1) Order DIN Rail Separately 2 Body Ported M A N I F O L D T Y P E N O O F S TAT I O N S 02 2 Stations 20 20 Stations H O W T O O R D E R S E R I E S V Q Z 1 0 0 / 2 0 0 / 3 0 0 B O D Y P O R T E D P L U G L E A D T Y P E V A L V E 2 VQZ P O R T S I Z E 2(A) P O R T S E R I

Valve Single Unit

M D U D side U side B 2 to 17 2 to 10 stations 2 to 10 stations D U D side U side B 2 to 8 2 to 8 2 to 8 One-touch fitting for 5/32" N3 One-touch fitting for 5/32" N3 One-touch fitting for 1/4" N7 One-touch fitting for 1/4" N7 Both sides M Special specifications SX5000 Both sides M Special specifications SX5000 One-touch fitting for 5/16" N9 One-touch fitting for 5/16" N9 Mixed M Mixed M